JPH0181029U - - Google Patents

Info

Publication number

JPH0181029U

JPH0181029U JP1987175004U JP17500487U JPH0181029U JP H0181029 U JPH0181029 U JP H0181029U JP 1987175004 U JP1987175004 U JP 1987175004U JP 17500487 U JP17500487 U JP 17500487U JP H0181029 U JPH0181029 U JP H0181029U

Authority

JP

Japan

Prior art keywords

substrate

conversion means

surface acoustic

delay device

temperature

Prior art date

1987-11-18

Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)

Pending

Links

• Espacenet
• Global Dossier
• Discuss

• 239000000758 substrate Substances 0.000 claims description 6
• 238000006243 chemical reaction Methods 0.000 claims description 5
• 238000010897 surface acoustic wave method Methods 0.000 claims 3
• 238000010586 diagram Methods 0.000 description 4