JPH0179840U - - Google Patents
Info
- Publication number
- JPH0179840U JPH0179840U JP1987175267U JP17526787U JPH0179840U JP H0179840 U JPH0179840 U JP H0179840U JP 1987175267 U JP1987175267 U JP 1987175267U JP 17526787 U JP17526787 U JP 17526787U JP H0179840 U JPH0179840 U JP H0179840U
- Authority
- JP
- Japan
- Prior art keywords
- grooves
- detection mechanism
- pitch detection
- pitch
- wafers
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000001514 detection method Methods 0.000 claims description 5
- 235000012431 wafers Nutrition 0.000 claims description 5
- 238000010586 diagram Methods 0.000 description 1
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1987175267U JPH0179840U (ko) | 1987-11-17 | 1987-11-17 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1987175267U JPH0179840U (ko) | 1987-11-17 | 1987-11-17 |
Publications (1)
Publication Number | Publication Date |
---|---|
JPH0179840U true JPH0179840U (ko) | 1989-05-29 |
Family
ID=31467072
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP1987175267U Pending JPH0179840U (ko) | 1987-11-17 | 1987-11-17 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH0179840U (ko) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH03133152A (ja) * | 1989-10-18 | 1991-06-06 | Yodogawa Kasei Kk | ガラス基板用カセット |
JPH04162745A (ja) * | 1990-10-26 | 1992-06-08 | Fujitsu Ltd | ウエハの移し換え方法 |
-
1987
- 1987-11-17 JP JP1987175267U patent/JPH0179840U/ja active Pending
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH03133152A (ja) * | 1989-10-18 | 1991-06-06 | Yodogawa Kasei Kk | ガラス基板用カセット |
JPH04162745A (ja) * | 1990-10-26 | 1992-06-08 | Fujitsu Ltd | ウエハの移し換え方法 |