JPH0177961U - - Google Patents

Info

Publication number

JPH0177961U

JPH0177961U JP17203087U JP17203087U JPH0177961U JP H0177961 U JPH0177961 U JP H0177961U JP 17203087 U JP17203087 U JP 17203087U JP 17203087 U JP17203087 U JP 17203087U JP H0177961 U JPH0177961 U JP H0177961U

Authority

JP

Japan

Prior art keywords

rate sensor

gas

small protrusions

gas rate

utility

Prior art date

1987-11-12

Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)

Pending

Links

• Espacenet
• Global Dossier
• Discuss

• 238000001514 detection method Methods 0.000 claims description 8
• 238000010438 heat treatment Methods 0.000 claims 1
• 238000010586 diagram Methods 0.000 description 3
• 239000011248 coating agent Substances 0.000 description 1
• 238000000576 coating method Methods 0.000 description 1