JPH0177255U - - Google Patents

Info

Publication number

JPH0177255U

JPH0177255U JP1987172650U JP17265087U JPH0177255U JP H0177255 U JPH0177255 U JP H0177255U JP 1987172650 U JP1987172650 U JP 1987172650U JP 17265087 U JP17265087 U JP 17265087U JP H0177255 U JPH0177255 U JP H0177255U

Authority

JP

Japan

Prior art keywords

sample

tilt control

observing

function

control device

Prior art date

1987-11-13

Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)

Pending

Links

• Espacenet
• Global Dossier
• Discuss

• 238000002003 electron diffraction Methods 0.000 claims 1
• 238000010586 diagram Methods 0.000 description 2
• 238000012544 monitoring process Methods 0.000 description 1