JPH0176038U - - Google Patents

Info

Publication number

JPH0176038U

JPH0176038U JP1987172396U JP17239687U JPH0176038U JP H0176038 U JPH0176038 U JP H0176038U JP 1987172396 U JP1987172396 U JP 1987172396U JP 17239687 U JP17239687 U JP 17239687U JP H0176038 U JPH0176038 U JP H0176038U

Authority

JP

Japan

Prior art keywords

nozzle

storage section

wafer

wafer storage

cleaning

Prior art date

1987-11-10

Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)

Pending

Links

• Espacenet
• Global Dossier
• Discuss

• 238000004140 cleaning Methods 0.000 claims description 8
• 238000001035 drying Methods 0.000 claims description 5
• 235000012431 wafers Nutrition 0.000 claims 11
• XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims 3
• 230000001154 acute effect Effects 0.000 claims 1
• 238000009434 installation Methods 0.000 claims 1
• 239000007921 spray Substances 0.000 claims 1
• 238000005507 spraying Methods 0.000 claims 1
• 125000006850 spacer group Chemical group 0.000 description 1

Cited By (1)