JPH0174139U - - Google Patents

Info

Publication number

JPH0174139U

JPH0174139U JP1987170632U JP17063287U JPH0174139U JP H0174139 U JPH0174139 U JP H0174139U JP 1987170632 U JP1987170632 U JP 1987170632U JP 17063287 U JP17063287 U JP 17063287U JP H0174139 U JPH0174139 U JP H0174139U

Authority

JP

Japan

Prior art keywords

heat generating

generating parts

recess

substrate

partition wall

Prior art date

1987-11-07

Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)

Pending

Links

• Espacenet
• Global Dossier
• Discuss

• 238000005192 partition Methods 0.000 claims description 5
• 239000000758 substrate Substances 0.000 claims description 3
• PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 1
• 239000011241 protective layer Substances 0.000 description 1