JPH0174053U - - Google Patents

Info

Publication number

JPH0174053U

JPH0174053U JP1987170362U JP17036287U JPH0174053U JP H0174053 U JPH0174053 U JP H0174053U JP 1987170362 U JP1987170362 U JP 1987170362U JP 17036287 U JP17036287 U JP 17036287U JP H0174053 U JPH0174053 U JP H0174053U

Authority

JP

Japan

Prior art keywords

semiconductor substrate

cutting

injection port

rotary

water injection

Prior art date

1987-11-06

Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)

Pending

Links

• Espacenet
• Global Dossier
• Discuss

• 239000004065 semiconductor Substances 0.000 claims description 6
• 239000000758 substrate Substances 0.000 claims description 6
• XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims description 4
• 239000000498 cooling water Substances 0.000 claims description 3
• 238000002347 injection Methods 0.000 claims description 3
• 239000007924 injection Substances 0.000 claims description 3