JPH0173929U - - Google Patents

Info

Publication number

JPH0173929U

JPH0173929U JP1987170363U JP17036387U JPH0173929U JP H0173929 U JPH0173929 U JP H0173929U JP 1987170363 U JP1987170363 U JP 1987170363U JP 17036387 U JP17036387 U JP 17036387U JP H0173929 U JPH0173929 U JP H0173929U

Authority

JP

Japan

Prior art keywords

liquid

etching

etching tank

tank

side walls

Prior art date

1987-11-06

Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)

Pending

Links

• Espacenet
• Global Dossier
• Discuss

• 239000007788 liquid Substances 0.000 claims description 6
• 238000005530 etching Methods 0.000 claims description 5
• 238000001039 wet etching Methods 0.000 claims 1

Cited By (2)