JPH0173926U - - Google Patents

Info

Publication number
JPH0173926U
JPH0173926U JP1987169701U JP16970187U JPH0173926U JP H0173926 U JPH0173926 U JP H0173926U JP 1987169701 U JP1987169701 U JP 1987169701U JP 16970187 U JP16970187 U JP 16970187U JP H0173926 U JPH0173926 U JP H0173926U
Authority
JP
Japan
Prior art keywords
wafer
heat treatment
jig
lower plate
support column
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP1987169701U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0519952Y2 (US20020051482A1-20020502-M00012.png
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP16970187U priority Critical patent/JPH0519952Y2/ja
Publication of JPH0173926U publication Critical patent/JPH0173926U/ja
Application granted granted Critical
Publication of JPH0519952Y2 publication Critical patent/JPH0519952Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

JP16970187U 1987-11-06 1987-11-06 Expired - Lifetime JPH0519952Y2 (US20020051482A1-20020502-M00012.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP16970187U JPH0519952Y2 (US20020051482A1-20020502-M00012.png) 1987-11-06 1987-11-06

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP16970187U JPH0519952Y2 (US20020051482A1-20020502-M00012.png) 1987-11-06 1987-11-06

Publications (2)

Publication Number Publication Date
JPH0173926U true JPH0173926U (US20020051482A1-20020502-M00012.png) 1989-05-18
JPH0519952Y2 JPH0519952Y2 (US20020051482A1-20020502-M00012.png) 1993-05-25

Family

ID=31459994

Family Applications (1)

Application Number Title Priority Date Filing Date
JP16970187U Expired - Lifetime JPH0519952Y2 (US20020051482A1-20020502-M00012.png) 1987-11-06 1987-11-06

Country Status (1)

Country Link
JP (1) JPH0519952Y2 (US20020051482A1-20020502-M00012.png)

Also Published As

Publication number Publication date
JPH0519952Y2 (US20020051482A1-20020502-M00012.png) 1993-05-25

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