JPH0173372U - - Google Patents

Info

Publication number

JPH0173372U

JPH0173372U JP1987169403U JP16940387U JPH0173372U JP H0173372 U JPH0173372 U JP H0173372U JP 1987169403 U JP1987169403 U JP 1987169403U JP 16940387 U JP16940387 U JP 16940387U JP H0173372 U JPH0173372 U JP H0173372U

Authority

JP

Japan

Prior art keywords

section

silicon oxide

immersion

adjusting

treatment liquid

Prior art date

1987-11-05

Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)

Pending

Links

• Espacenet
• Global Dossier
• Discuss

• 238000007654 immersion Methods 0.000 claims description 6
• VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 5
• 239000007788 liquid Substances 0.000 claims description 5
• 229910052814 silicon oxide Inorganic materials 0.000 claims description 5
• 238000004519 manufacturing process Methods 0.000 claims description 4
• 239000000758 substrate Substances 0.000 claims 2
• 239000011248 coating agent Substances 0.000 claims 1
• 238000000576 coating method Methods 0.000 claims 1
• 238000010586 diagram Methods 0.000 description 1
• 239000000463 material Substances 0.000 description 1

Cited By (1)