JPH0171438U - - Google Patents

Info

Publication number
JPH0171438U
JPH0171438U JP1987166456U JP16645687U JPH0171438U JP H0171438 U JPH0171438 U JP H0171438U JP 1987166456 U JP1987166456 U JP 1987166456U JP 16645687 U JP16645687 U JP 16645687U JP H0171438 U JPH0171438 U JP H0171438U
Authority
JP
Japan
Prior art keywords
gas
suction port
processing chamber
vacuum processing
dry etching
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP1987166456U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1987166456U priority Critical patent/JPH0171438U/ja
Publication of JPH0171438U publication Critical patent/JPH0171438U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Drying Of Semiconductors (AREA)
JP1987166456U 1987-10-30 1987-10-30 Pending JPH0171438U (US20090163788A1-20090625-C00002.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1987166456U JPH0171438U (US20090163788A1-20090625-C00002.png) 1987-10-30 1987-10-30

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1987166456U JPH0171438U (US20090163788A1-20090625-C00002.png) 1987-10-30 1987-10-30

Publications (1)

Publication Number Publication Date
JPH0171438U true JPH0171438U (US20090163788A1-20090625-C00002.png) 1989-05-12

Family

ID=31453853

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1987166456U Pending JPH0171438U (US20090163788A1-20090625-C00002.png) 1987-10-30 1987-10-30

Country Status (1)

Country Link
JP (1) JPH0171438U (US20090163788A1-20090625-C00002.png)

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