JPH0170331U - - Google Patents
Info
- Publication number
- JPH0170331U JPH0170331U JP1987165541U JP16554187U JPH0170331U JP H0170331 U JPH0170331 U JP H0170331U JP 1987165541 U JP1987165541 U JP 1987165541U JP 16554187 U JP16554187 U JP 16554187U JP H0170331 U JPH0170331 U JP H0170331U
- Authority
- JP
- Japan
- Prior art keywords
- etching liquid
- spin etcher
- nozzle
- diagram showing
- etching
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000005530 etching Methods 0.000 claims description 11
- 239000007788 liquid Substances 0.000 claims description 4
- 239000004065 semiconductor Substances 0.000 claims 2
- 238000004519 manufacturing process Methods 0.000 claims 1
- 229910052751 metal Inorganic materials 0.000 claims 1
- 239000002184 metal Substances 0.000 claims 1
- 150000002739 metals Chemical class 0.000 claims 1
- 239000007921 spray Substances 0.000 claims 1
- 239000000758 substrate Substances 0.000 claims 1
- 239000010409 thin film Substances 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 7
- 238000002347 injection Methods 0.000 description 3
- 239000007924 injection Substances 0.000 description 3
- 238000001035 drying Methods 0.000 description 2
- 238000005406 washing Methods 0.000 description 2
- 230000001105 regulatory effect Effects 0.000 description 1
- 238000001179 sorption measurement Methods 0.000 description 1
Landscapes
- Weting (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987165541U JPH0170331U (enrdf_load_stackoverflow) | 1987-10-28 | 1987-10-28 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987165541U JPH0170331U (enrdf_load_stackoverflow) | 1987-10-28 | 1987-10-28 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0170331U true JPH0170331U (enrdf_load_stackoverflow) | 1989-05-10 |
Family
ID=31452120
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1987165541U Pending JPH0170331U (enrdf_load_stackoverflow) | 1987-10-28 | 1987-10-28 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0170331U (enrdf_load_stackoverflow) |
-
1987
- 1987-10-28 JP JP1987165541U patent/JPH0170331U/ja active Pending
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