JPH0167508U - - Google Patents

Info

Publication number
JPH0167508U
JPH0167508U JP1987164359U JP16435987U JPH0167508U JP H0167508 U JPH0167508 U JP H0167508U JP 1987164359 U JP1987164359 U JP 1987164359U JP 16435987 U JP16435987 U JP 16435987U JP H0167508 U JPH0167508 U JP H0167508U
Authority
JP
Japan
Prior art keywords
membrane
electrodes
long
piezoelectric elements
thin plate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP1987164359U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1987164359U priority Critical patent/JPH0167508U/ja
Publication of JPH0167508U publication Critical patent/JPH0167508U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
  • Transmission And Conversion Of Sensor Element Output (AREA)
JP1987164359U 1987-10-26 1987-10-26 Pending JPH0167508U (US20020051482A1-20020502-M00012.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1987164359U JPH0167508U (US20020051482A1-20020502-M00012.png) 1987-10-26 1987-10-26

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1987164359U JPH0167508U (US20020051482A1-20020502-M00012.png) 1987-10-26 1987-10-26

Publications (1)

Publication Number Publication Date
JPH0167508U true JPH0167508U (US20020051482A1-20020502-M00012.png) 1989-05-01

Family

ID=31449896

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1987164359U Pending JPH0167508U (US20020051482A1-20020502-M00012.png) 1987-10-26 1987-10-26

Country Status (1)

Country Link
JP (1) JPH0167508U (US20020051482A1-20020502-M00012.png)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH04366702A (ja) * 1991-06-13 1992-12-18 Agency Of Ind Science & Technol 微小変位検出器

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH04366702A (ja) * 1991-06-13 1992-12-18 Agency Of Ind Science & Technol 微小変位検出器

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