JPH0165852U - - Google Patents

Info

Publication number

JPH0165852U

JPH0165852U JP1987162372U JP16237287U JPH0165852U JP H0165852 U JPH0165852 U JP H0165852U JP 1987162372 U JP1987162372 U JP 1987162372U JP 16237287 U JP16237287 U JP 16237287U JP H0165852 U JPH0165852 U JP H0165852U

Authority

JP

Japan

Prior art keywords

source

evaporation source

deposition

deposition source

semiconductor manufacturing

Prior art date

1987-10-22

Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)

Pending

Links

• Espacenet
• Global Dossier
• Discuss

• 230000008021 deposition Effects 0.000 claims description 6
• 238000004519 manufacturing process Methods 0.000 claims description 5
• 239000004065 semiconductor Substances 0.000 claims description 5
• 238000007740 vapor deposition Methods 0.000 claims description 3
• 238000010894 electron beam technology Methods 0.000 claims description 2
• 230000008020 evaporation Effects 0.000 claims 4
• 238000001704 evaporation Methods 0.000 claims 4
• 230000003028 elevating effect Effects 0.000 claims 1
• 238000010586 diagram Methods 0.000 description 1