JPH0165149U - - Google Patents

Info

Publication number

JPH0165149U

JPH0165149U JP1987159315U JP15931587U JPH0165149U JP H0165149 U JPH0165149 U JP H0165149U JP 1987159315 U JP1987159315 U JP 1987159315U JP 15931587 U JP15931587 U JP 15931587U JP H0165149 U JPH0165149 U JP H0165149U

Authority

JP

Japan

Prior art keywords

doped polysilicon

electrode

semiconductor capacitor

sio

lead wire

Prior art date

1987-10-20

Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)

Pending

Links

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• 239000003990 capacitor Substances 0.000 claims description 3
• 229910021420 polycrystalline silicon Inorganic materials 0.000 claims description 3
• 229920005591 polysilicon Polymers 0.000 claims description 3
• 239000004065 semiconductor Substances 0.000 claims description 3
• 229910004298 SiO 2 Inorganic materials 0.000 claims description 2
• 239000000758 substrate Substances 0.000 claims description 2
• XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims 1
• IZJSTXINDUKPRP-UHFFFAOYSA-N aluminum lead Chemical compound [Al].[Pb] IZJSTXINDUKPRP-UHFFFAOYSA-N 0.000 claims 1
• 229910052710 silicon Inorganic materials 0.000 claims 1
• 239000010703 silicon Substances 0.000 claims 1
• 238000010586 diagram Methods 0.000 description 1
• WABPQHHGFIMREM-UHFFFAOYSA-N lead(0) Chemical compound [Pb] WABPQHHGFIMREM-UHFFFAOYSA-N 0.000 description 1
• 238000000926 separation method Methods 0.000 description 1

Cited By (1)