JPH0163130U - - Google Patents

Info

Publication number
JPH0163130U
JPH0163130U JP1987159046U JP15904687U JPH0163130U JP H0163130 U JPH0163130 U JP H0163130U JP 1987159046 U JP1987159046 U JP 1987159046U JP 15904687 U JP15904687 U JP 15904687U JP H0163130 U JPH0163130 U JP H0163130U
Authority
JP
Japan
Prior art keywords
semiconductor wafer
transfer device
gripping claw
view
tip
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP1987159046U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1987159046U priority Critical patent/JPH0163130U/ja
Publication of JPH0163130U publication Critical patent/JPH0163130U/ja
Pending legal-status Critical Current

Links

JP1987159046U 1987-10-16 1987-10-16 Pending JPH0163130U (US06649357-20031118-C00005.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1987159046U JPH0163130U (US06649357-20031118-C00005.png) 1987-10-16 1987-10-16

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1987159046U JPH0163130U (US06649357-20031118-C00005.png) 1987-10-16 1987-10-16

Publications (1)

Publication Number Publication Date
JPH0163130U true JPH0163130U (US06649357-20031118-C00005.png) 1989-04-24

Family

ID=31439910

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1987159046U Pending JPH0163130U (US06649357-20031118-C00005.png) 1987-10-16 1987-10-16

Country Status (1)

Country Link
JP (1) JPH0163130U (US06649357-20031118-C00005.png)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0250955U (US06649357-20031118-C00005.png) * 1988-10-03 1990-04-10

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0250955U (US06649357-20031118-C00005.png) * 1988-10-03 1990-04-10

Similar Documents

Publication Publication Date Title
JPH0163130U (US06649357-20031118-C00005.png)
JPS6315947U (US06649357-20031118-C00005.png)
JPH0359189U (US06649357-20031118-C00005.png)
JPS62154648U (US06649357-20031118-C00005.png)
JPS6454331U (US06649357-20031118-C00005.png)
JPH03104986U (US06649357-20031118-C00005.png)
JPS63178335U (US06649357-20031118-C00005.png)
JPS62113576U (US06649357-20031118-C00005.png)
JPH03104736U (US06649357-20031118-C00005.png)
JPS6434137U (US06649357-20031118-C00005.png)
JPS62120341U (US06649357-20031118-C00005.png)
JPS63144953U (US06649357-20031118-C00005.png)
JPH0265341U (US06649357-20031118-C00005.png)
JPS62190350U (US06649357-20031118-C00005.png)
JPS6332847U (US06649357-20031118-C00005.png)
JPS63131133U (US06649357-20031118-C00005.png)
JPH0158961U (US06649357-20031118-C00005.png)
JPS6336048U (US06649357-20031118-C00005.png)
JPS6418726U (US06649357-20031118-C00005.png)
JPS5927889U (ja) フロス吸引口移動装置
JPS6385664U (US06649357-20031118-C00005.png)
JPS63170949U (US06649357-20031118-C00005.png)
JPH0327044U (US06649357-20031118-C00005.png)
JPS6426831U (US06649357-20031118-C00005.png)
JPH0184435U (US06649357-20031118-C00005.png)