JPH0162363U - - Google Patents

Info

Publication number
JPH0162363U
JPH0162363U JP15823687U JP15823687U JPH0162363U JP H0162363 U JPH0162363 U JP H0162363U JP 15823687 U JP15823687 U JP 15823687U JP 15823687 U JP15823687 U JP 15823687U JP H0162363 U JPH0162363 U JP H0162363U
Authority
JP
Japan
Prior art keywords
boat
wall
roughness
processed
utility
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP15823687U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP15823687U priority Critical patent/JPH0162363U/ja
Publication of JPH0162363U publication Critical patent/JPH0162363U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Crystals, And After-Treatments Of Crystals (AREA)
  • Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
JP15823687U 1987-10-15 1987-10-15 Pending JPH0162363U (US07534539-20090519-C00280.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP15823687U JPH0162363U (US07534539-20090519-C00280.png) 1987-10-15 1987-10-15

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP15823687U JPH0162363U (US07534539-20090519-C00280.png) 1987-10-15 1987-10-15

Publications (1)

Publication Number Publication Date
JPH0162363U true JPH0162363U (US07534539-20090519-C00280.png) 1989-04-20

Family

ID=31438378

Family Applications (1)

Application Number Title Priority Date Filing Date
JP15823687U Pending JPH0162363U (US07534539-20090519-C00280.png) 1987-10-15 1987-10-15

Country Status (1)

Country Link
JP (1) JPH0162363U (US07534539-20090519-C00280.png)

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