JPH0160782U - - Google Patents

Info

Publication number

JPH0160782U

JPH0160782U JP15577487U JP15577487U JPH0160782U JP H0160782 U JPH0160782 U JP H0160782U JP 15577487 U JP15577487 U JP 15577487U JP 15577487 U JP15577487 U JP 15577487U JP H0160782 U JPH0160782 U JP H0160782U

Authority

JP

Japan

Prior art keywords

cathode

nozzle

gas supply

surrounding

supply path

Prior art date

1987-10-12

Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)

Pending

Links

• Espacenet
• Global Dossier
• Discuss

• 239000007789 gas Substances 0.000 claims description 4
• MRELNEQAGSRDBK-UHFFFAOYSA-N lanthanum(3+);oxygen(2-) Chemical compound [O-2].[O-2].[O-2].[La+3].[La+3] MRELNEQAGSRDBK-UHFFFAOYSA-N 0.000 claims 2
• 229910021193 La 2 O 3 Inorganic materials 0.000 claims 1
• 239000011261 inert gas Substances 0.000 claims 1
• WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 claims 1
• 229910052721 tungsten Inorganic materials 0.000 claims 1
• 239000010937 tungsten Substances 0.000 claims 1
• XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 6
• 229910052786 argon Inorganic materials 0.000 description 3
• 238000010586 diagram Methods 0.000 description 3