JPH0159865U - - Google Patents

Info

Publication number
JPH0159865U
JPH0159865U JP15560587U JP15560587U JPH0159865U JP H0159865 U JPH0159865 U JP H0159865U JP 15560587 U JP15560587 U JP 15560587U JP 15560587 U JP15560587 U JP 15560587U JP H0159865 U JPH0159865 U JP H0159865U
Authority
JP
Japan
Prior art keywords
reticle
sensor
optical fibers
spatial filter
illumination section
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP15560587U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP15560587U priority Critical patent/JPH0159865U/ja
Publication of JPH0159865U publication Critical patent/JPH0159865U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
JP15560587U 1987-10-13 1987-10-13 Pending JPH0159865U (US20110009641A1-20110113-C00116.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP15560587U JPH0159865U (US20110009641A1-20110113-C00116.png) 1987-10-13 1987-10-13

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP15560587U JPH0159865U (US20110009641A1-20110113-C00116.png) 1987-10-13 1987-10-13

Publications (1)

Publication Number Publication Date
JPH0159865U true JPH0159865U (US20110009641A1-20110113-C00116.png) 1989-04-14

Family

ID=31433381

Family Applications (1)

Application Number Title Priority Date Filing Date
JP15560587U Pending JPH0159865U (US20110009641A1-20110113-C00116.png) 1987-10-13 1987-10-13

Country Status (1)

Country Link
JP (1) JPH0159865U (US20110009641A1-20110113-C00116.png)

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