JPH01276043A - Waveguide type liquid detector - Google Patents

Waveguide type liquid detector

Info

Publication number
JPH01276043A
JPH01276043A JP63105884A JP10588488A JPH01276043A JP H01276043 A JPH01276043 A JP H01276043A JP 63105884 A JP63105884 A JP 63105884A JP 10588488 A JP10588488 A JP 10588488A JP H01276043 A JPH01276043 A JP H01276043A
Authority
JP
Japan
Prior art keywords
waveguide
type liquid
detector
part
liquid
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP63105884A
Inventor
Moriyuki Fujita
Hideaki Ito
Masao Katsuyama
Masaaki Morisawa
Original Assignee
Mitsubishi Cable Ind Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Cable Ind Ltd filed Critical Mitsubishi Cable Ind Ltd
Priority to JP63105884A priority Critical patent/JPH01276043A/en
Publication of JPH01276043A publication Critical patent/JPH01276043A/en
Application status is Granted legal-status Critical

Links

Classifications

    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS, OR APPARATUS
    • G02B6/00Light guides
    • G02B6/24Coupling light guides
    • G02B6/26Optical coupling means
    • G02B6/28Optical coupling means having data bus means, i.e. plural waveguides interconnected and providing an inherently bidirectional system by mixing and splitting signals
    • G02B6/2804Optical coupling means having data bus means, i.e. plural waveguides interconnected and providing an inherently bidirectional system by mixing and splitting signals forming multipart couplers without wavelength selective elements, e.g. "T" couplers, star couplers
    • G02B6/2852Optical coupling means having data bus means, i.e. plural waveguides interconnected and providing an inherently bidirectional system by mixing and splitting signals forming multipart couplers without wavelength selective elements, e.g. "T" couplers, star couplers using tapping light guides arranged sidewardly, e.g. in a non-parallel relationship with respect to the bus light guides (light extraction or launching through cladding, with or without surface discontinuities, bent structures)
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS, OR APPARATUS
    • G02B6/00Light guides
    • G02B6/24Coupling light guides
    • G02B6/26Optical coupling means
    • G02B6/264Optical coupling means with optical elements between opposed fibre ends which perform a function other than beam splitting
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS, OR APPARATUS
    • G02B6/00Light guides
    • G02B6/24Coupling light guides
    • G02B6/42Coupling light guides with opto-electronic elements
    • G02B6/4201Packages, e.g. shape, construction, internal or external details
    • G02B6/4287Optical modules with tapping or launching means through the surface of the waveguide
    • G02B6/429Optical modules with tapping or launching means through the surface of the waveguide by surface irregularities on the light guide, e.g. by mechanical modification of the surface of the light guide on its exterior

Abstract

PURPOSE:To facilitate the generation and to improve the profitability by connecting a flexible waveguide film which has been bent to a U-shape to input/output optical fibers and using it. CONSTITUTION:A waveguide type liquid detector is formed by connecting input/ output optical fibers 3, 4, respectively to each end of a waveguide 2 obtained by bending to a U-shape a flexible organic substance film which has formed a waveguide by irradiating with a light beam and polymerizing a monomer of an exposing part in a state that masking has been performed to a sheet of a mixture of, for instance, a base organic high polymer and the monomer for varying its refractive index. In this state, by a liquid 5 which has adhered to the top part of the U-shaped bend part of this detector, an incident light is radiated into the air, a total reflectivity of the waveguide 2 is varied substantially and the liquid 5 is detected. By this cutting working, etc., the waveguide type liquid detector which can be generated easily and whose profitability is high is obtained by the constitution by which it is unnecessary to generate a flat part in the waveguide.
JP63105884A 1988-04-28 1988-04-28 Waveguide type liquid detector Granted JPH01276043A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP63105884A JPH01276043A (en) 1988-04-28 1988-04-28 Waveguide type liquid detector

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP63105884A JPH01276043A (en) 1988-04-28 1988-04-28 Waveguide type liquid detector

Publications (1)

Publication Number Publication Date
JPH01276043A true JPH01276043A (en) 1989-11-06

Family

ID=14419359

Family Applications (1)

Application Number Title Priority Date Filing Date
JP63105884A Granted JPH01276043A (en) 1988-04-28 1988-04-28 Waveguide type liquid detector

Country Status (1)

Country Link
JP (1) JPH01276043A (en)

Cited By (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH03115832U (en) * 1990-03-14 1991-12-02
JP2012154854A (en) * 2011-01-27 2012-08-16 Nippon Signal Co Ltd:The Liquid leakage detection method and liquid leakage detector
US20130271945A1 (en) 2004-02-06 2013-10-17 Nikon Corporation Polarization-modulating element, illumination optical apparatus, exposure apparatus, and exposure method
US9250537B2 (en) 2004-07-12 2016-02-02 Nikon Corporation Immersion exposure apparatus and method with detection of liquid on members of the apparatus
US9341954B2 (en) 2007-10-24 2016-05-17 Nikon Corporation Optical unit, illumination optical apparatus, exposure apparatus, and device manufacturing method
US9423698B2 (en) 2003-10-28 2016-08-23 Nikon Corporation Illumination optical apparatus and projection exposure apparatus
US9678437B2 (en) 2003-04-09 2017-06-13 Nikon Corporation Illumination optical apparatus having distribution changing member to change light amount and polarization member to set polarization in circumference direction
US9678332B2 (en) 2007-11-06 2017-06-13 Nikon Corporation Illumination apparatus, illumination method, exposure apparatus, and device manufacturing method
CN106872847A (en) * 2017-02-16 2017-06-20 马玉荣 U-shaped lamp plug-connection detection device
CN106932364A (en) * 2017-03-10 2017-07-07 吉林大学 Macro bending dislocation tapered type optical fiber liquid refractive index sensor
US9760026B2 (en) 2003-07-28 2017-09-12 Nikon Corporation Exposure apparatus, method for producing device, and method for controlling exposure apparatus
US9885872B2 (en) 2003-11-20 2018-02-06 Nikon Corporation Illumination optical apparatus, exposure apparatus, and exposure method with optical integrator and polarization member that changes polarization state of light
US9891539B2 (en) 2005-05-12 2018-02-13 Nikon Corporation Projection optical system, exposure apparatus, and exposure method
US10101666B2 (en) 2007-10-12 2018-10-16 Nikon Corporation Illumination optical apparatus, exposure apparatus, and device manufacturing method

Cited By (21)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH03115832U (en) * 1990-03-14 1991-12-02
US9678437B2 (en) 2003-04-09 2017-06-13 Nikon Corporation Illumination optical apparatus having distribution changing member to change light amount and polarization member to set polarization in circumference direction
US9885959B2 (en) 2003-04-09 2018-02-06 Nikon Corporation Illumination optical apparatus having deflecting member, lens, polarization member to set polarization in circumference direction, and optical integrator
US10185232B2 (en) 2003-07-28 2019-01-22 Nikon Corporation Exposure apparatus, method for producing device, and method for controlling exposure apparatus
US9760026B2 (en) 2003-07-28 2017-09-12 Nikon Corporation Exposure apparatus, method for producing device, and method for controlling exposure apparatus
US9423698B2 (en) 2003-10-28 2016-08-23 Nikon Corporation Illumination optical apparatus and projection exposure apparatus
US9760014B2 (en) 2003-10-28 2017-09-12 Nikon Corporation Illumination optical apparatus and projection exposure apparatus
US9885872B2 (en) 2003-11-20 2018-02-06 Nikon Corporation Illumination optical apparatus, exposure apparatus, and exposure method with optical integrator and polarization member that changes polarization state of light
US10234770B2 (en) 2004-02-06 2019-03-19 Nikon Corporation Polarization-modulating element, illumination optical apparatus, exposure apparatus, and exposure method
US10007194B2 (en) 2004-02-06 2018-06-26 Nikon Corporation Polarization-modulating element, illumination optical apparatus, exposure apparatus, and exposure method
US20130271945A1 (en) 2004-02-06 2013-10-17 Nikon Corporation Polarization-modulating element, illumination optical apparatus, exposure apparatus, and exposure method
US10241417B2 (en) 2004-02-06 2019-03-26 Nikon Corporation Polarization-modulating element, illumination optical apparatus, exposure apparatus, and exposure method
US9250537B2 (en) 2004-07-12 2016-02-02 Nikon Corporation Immersion exposure apparatus and method with detection of liquid on members of the apparatus
US9891539B2 (en) 2005-05-12 2018-02-13 Nikon Corporation Projection optical system, exposure apparatus, and exposure method
US10101666B2 (en) 2007-10-12 2018-10-16 Nikon Corporation Illumination optical apparatus, exposure apparatus, and device manufacturing method
US9857599B2 (en) 2007-10-24 2018-01-02 Nikon Corporation Optical unit, illumination optical apparatus, exposure apparatus, and device manufacturing method
US9341954B2 (en) 2007-10-24 2016-05-17 Nikon Corporation Optical unit, illumination optical apparatus, exposure apparatus, and device manufacturing method
US9678332B2 (en) 2007-11-06 2017-06-13 Nikon Corporation Illumination apparatus, illumination method, exposure apparatus, and device manufacturing method
JP2012154854A (en) * 2011-01-27 2012-08-16 Nippon Signal Co Ltd:The Liquid leakage detection method and liquid leakage detector
CN106872847A (en) * 2017-02-16 2017-06-20 马玉荣 U-shaped lamp plug-connection detection device
CN106932364A (en) * 2017-03-10 2017-07-07 吉林大学 Macro bending dislocation tapered type optical fiber liquid refractive index sensor

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