JPH01267403A - Measuring apparatus for warped shape of disc - Google Patents

Measuring apparatus for warped shape of disc

Info

Publication number
JPH01267403A
JPH01267403A JP9754988A JP9754988A JPH01267403A JP H01267403 A JPH01267403 A JP H01267403A JP 9754988 A JP9754988 A JP 9754988A JP 9754988 A JP9754988 A JP 9754988A JP H01267403 A JPH01267403 A JP H01267403A
Authority
JP
Japan
Prior art keywords
measuring
disc
warping
angle
optical disc
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP9754988A
Other languages
Japanese (ja)
Inventor
Yoshio Miyai
Original Assignee
Sanyo Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sanyo Electric Co Ltd filed Critical Sanyo Electric Co Ltd
Priority to JP9754988A priority Critical patent/JPH01267403A/en
Publication of JPH01267403A publication Critical patent/JPH01267403A/en
Pending legal-status Critical Current

Links

Abstract

PURPOSE: To measure a three-dimensional shape of warping, by correcting distances to points on a disc from an outside specified point from an angle of warping at a point where the distance involved is measured.
CONSTITUTION: A radial distance (r) from the center of a rotating axis at a measuring point A on an optical disc 1 is calculated based on a signal to be outputted from a motor 3 according to the rotation of a pinion 5 moving along a rack gear 6. An angle θ from radial reference line is calculated based on a signal to be outputted from a motor 2 for turning the optical disc 1. Moreover, a distance x to the measuring point A from a probe 41 is measured with a measuring section (not illustrated). A position sensor 45 detects an angle of warping of the optical disc 1 at the measuring point A from a displacement of reflected light from the optical disc 1 between an incoming position and a reference incoming position. Then, the distance (x) is corrected by a correction means (not illustrated) using the angle of warping, thereby achieving a higher measuring accuracy in a three-dimensional shape of a disc.
COPYRIGHT: (C)1989,JPO&Japio
JP9754988A 1988-04-19 1988-04-19 Measuring apparatus for warped shape of disc Pending JPH01267403A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9754988A JPH01267403A (en) 1988-04-19 1988-04-19 Measuring apparatus for warped shape of disc

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9754988A JPH01267403A (en) 1988-04-19 1988-04-19 Measuring apparatus for warped shape of disc

Publications (1)

Publication Number Publication Date
JPH01267403A true JPH01267403A (en) 1989-10-25

Family

ID=14195323

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9754988A Pending JPH01267403A (en) 1988-04-19 1988-04-19 Measuring apparatus for warped shape of disc

Country Status (1)

Country Link
JP (1) JPH01267403A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2011020860A1 (en) 2009-08-19 2011-02-24 Ers Electronic Gmbh Method and device for determining a deformation of a disk-shaped workpiece, particularly a mold wafer
JP2011117851A (en) * 2009-12-04 2011-06-16 Sharp Corp Vapor phase growth device and vapor phase growth method

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2011020860A1 (en) 2009-08-19 2011-02-24 Ers Electronic Gmbh Method and device for determining a deformation of a disk-shaped workpiece, particularly a mold wafer
DE102009037939A1 (en) * 2009-08-19 2011-06-30 ERS electronic GmbH, 82110 Method and device for determining the deflection of a disk-shaped workpiece
US8599366B2 (en) 2009-08-19 2013-12-03 Ers Electronic Gmbh Method and device for determining a deformation of a disk-shaped workpiece, particularly a mold wafer
JP2011117851A (en) * 2009-12-04 2011-06-16 Sharp Corp Vapor phase growth device and vapor phase growth method

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