JPH01253237A - Vacuum processor - Google Patents

Vacuum processor

Info

Publication number
JPH01253237A
JPH01253237A JP8009688A JP8009688A JPH01253237A JP H01253237 A JPH01253237 A JP H01253237A JP 8009688 A JP8009688 A JP 8009688A JP 8009688 A JP8009688 A JP 8009688A JP H01253237 A JPH01253237 A JP H01253237A
Authority
JP
Japan
Prior art keywords
substrate
substrates
robot
7a
carrying
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP8009688A
Inventor
Takashi Inoue
Masami Sasaki
Toshiaki Sumiya
Katsuzo Ukai
Original Assignee
Anelva Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Anelva Corp filed Critical Anelva Corp
Priority to JP8009688A priority Critical patent/JPH01253237A/en
Publication of JPH01253237A publication Critical patent/JPH01253237A/en
Application status is Pending legal-status Critical

Links

Abstract

PURPOSE: To reduce the driving mechanisms in respective vacuum chambers thereby decreasing the dirt sticking to the substrates by a method wherein substrates are carried between respective chambers by a substrate carrying robot capable of freely carrying the substrates in the three directions of radius, circumference and axis.
CONSTITUTION: A substrate carrying robber 10 capable of freely carrying substrates 7 in the three directions of radius γ, circumference θ and axis Z is actuated to mount the other substrate 7a on the end of a finger 100. The robot 10 pushes the substrate 7a against a substrate centering mechanism 11. When the robot 10 places the substrate 7a on the A surface of a substrate holder 12, the A surface holds the substrate 7a. Then, the robot 10 puts the finger 100 back in a preparatory chamber 2. The robot 10 carries the other substrate 7b to the B surface. The substrates 7a, 7b are simultaneously plasma- processed in parallel with each other by the plasma produced in plasma producers 13, 13'. Through these procedures, the driving mechanisms in respective vacuum chambers can be reduced to decrease the dirt sticking to the substrates 7.
COPYRIGHT: (C)1989,JPO&Japio
JP8009688A 1988-03-31 1988-03-31 Vacuum processor Pending JPH01253237A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP8009688A JPH01253237A (en) 1988-03-31 1988-03-31 Vacuum processor

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP8009688A JPH01253237A (en) 1988-03-31 1988-03-31 Vacuum processor

Publications (1)

Publication Number Publication Date
JPH01253237A true JPH01253237A (en) 1989-10-09

Family

ID=13708662

Family Applications (1)

Application Number Title Priority Date Filing Date
JP8009688A Pending JPH01253237A (en) 1988-03-31 1988-03-31 Vacuum processor

Country Status (1)

Country Link
JP (1) JPH01253237A (en)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH03155619A (en) * 1989-11-14 1991-07-03 Anelva Corp Vacuum processor
JPH04124274A (en) * 1990-09-13 1992-04-24 Hitachi Electron Eng Co Ltd Vapor phase reaction device
JPH04137613A (en) * 1990-09-28 1992-05-12 Handotai Process Kenkyusho:Kk Method and apparatus for manufacture of semiconductor device
JPH04226048A (en) * 1990-04-19 1992-08-14 Applied Materials Inc Double cassette loading lock device
JPH05304197A (en) * 1992-04-27 1993-11-16 Hitachi Ltd Multi-chamber system

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57149748A (en) * 1981-03-12 1982-09-16 Anelva Corp Treating device for substrate
JPS629643A (en) * 1985-07-08 1987-01-17 Nippon Kogaku Kk <Nikon> Substrate carrier system

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57149748A (en) * 1981-03-12 1982-09-16 Anelva Corp Treating device for substrate
JPS629643A (en) * 1985-07-08 1987-01-17 Nippon Kogaku Kk <Nikon> Substrate carrier system

Cited By (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH03155619A (en) * 1989-11-14 1991-07-03 Anelva Corp Vacuum processor
US6454508B2 (en) 1990-04-19 2002-09-24 Applied Materials, Inc. Dual cassette load lock
US6599076B2 (en) 1990-04-19 2003-07-29 Applied Materials, Inc. Dual cassette load lock
JPH04226048A (en) * 1990-04-19 1992-08-14 Applied Materials Inc Double cassette loading lock device
EP0452939B1 (en) * 1990-04-19 2000-11-02 Applied Materials, Inc. Apparatus and method for loading workpieces in a processing system
US6454519B1 (en) 1990-04-19 2002-09-24 Applied Materials, Inc. Dual cassette load lock
JPH04124274A (en) * 1990-09-13 1992-04-24 Hitachi Electron Eng Co Ltd Vapor phase reaction device
JPH04137613A (en) * 1990-09-28 1992-05-12 Handotai Process Kenkyusho:Kk Method and apparatus for manufacture of semiconductor device
JPH05304197A (en) * 1992-04-27 1993-11-16 Hitachi Ltd Multi-chamber system

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