JPH01219072A - Metal-ceramic joined body - Google Patents

Metal-ceramic joined body

Info

Publication number
JPH01219072A
JPH01219072A JP4421188A JP4421188A JPH01219072A JP H01219072 A JPH01219072 A JP H01219072A JP 4421188 A JP4421188 A JP 4421188A JP 4421188 A JP4421188 A JP 4421188A JP H01219072 A JPH01219072 A JP H01219072A
Authority
JP
Japan
Prior art keywords
metal
ceramic
recess
joining
groove
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP4421188A
Other languages
Japanese (ja)
Other versions
JP2572800B2 (en
Inventor
Nobuo Tsuno
伸夫 津野
Takashi Ando
安藤 孝志
Yoshiatsu Nakasuji
中筋 善淳
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NGK Insulators Ltd
Original Assignee
NGK Insulators Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NGK Insulators Ltd filed Critical NGK Insulators Ltd
Priority to JP63044211A priority Critical patent/JP2572800B2/en
Priority to US07/312,667 priority patent/US5028162A/en
Priority to DE89301814T priority patent/DE68906692T2/en
Priority to EP92118285A priority patent/EP0530854B1/en
Priority to EP89301814A priority patent/EP0333339B1/en
Priority to DE68925128T priority patent/DE68925128T2/en
Publication of JPH01219072A publication Critical patent/JPH01219072A/en
Application granted granted Critical
Publication of JP2572800B2 publication Critical patent/JP2572800B2/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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Abstract

PURPOSE:To easily obtain the subject joined body hardly causing the breaking of the ceramic member and having superior bonding strength, reliability and durability by inserting a projection fitted to a ceramic member into a recess having a specified shape in a metal member and by joining the members together with a brazing filler metal. CONSTITUTION:A projection 2 fitted to a ceramic member 1 is inserted into a recess 5 so stepped 3 as to increase the inside diameter at the inlet in a metal member 4. The entire inner circumferential surface of the recess 5 has been plated with Ni. A brazing filler metal 6 such as an active brazing filler metal is then put in the gap between the stepped part 3 and the projection 2 and the members 1, 4 are joined together.

Description

【発明の詳細な説明】 (産業上の利用分野) 本発明はセラミック部材と金属部材とを一体的に接合し
てなる金属・セラミックス接合体に関するものである。
DETAILED DESCRIPTION OF THE INVENTION (Industrial Application Field) The present invention relates to a metal-ceramic bonded body formed by integrally bonding a ceramic member and a metal member.

(従来の技術) ジルコニア、窒化珪素、炭化珪素等のセラミックスは、
機械的強度、耐熱性、耐摩耗性にすぐれているため、ガ
スタービンエンジン部品、エンジン部品等の高温構造材
料あるいは耐摩耗材料として実用化が図られている。し
かし、セラミックスは一般に硬くて脆いため、金属材料
に比較して成形加工性が劣る。また、靭性が乏しいため
、衝撃力に対する抵抗が弱い。このため、セラミック材
料のみでエンジン部品のような機械部品を形成すること
は難しく、一般には金属部材とセラミック部材を接合し
た複合構造体としての形で使用されることが多い。
(Conventional technology) Ceramics such as zirconia, silicon nitride, and silicon carbide are
Because it has excellent mechanical strength, heat resistance, and wear resistance, it is being put into practical use as a high-temperature structural material or wear-resistant material for gas turbine engine parts, engine parts, etc. However, since ceramics are generally hard and brittle, their moldability is inferior to that of metal materials. In addition, since it has poor toughness, it has low resistance to impact forces. For this reason, it is difficult to form mechanical parts such as engine parts only from ceramic materials, and they are generally used in the form of a composite structure in which a metal member and a ceramic member are bonded together.

接合に際して、セラミック部材の凸部を金属部材の凹部
に焼きばめまたはろう付等の方法により接合し、接合体
とするのが一般的である。このとき、セラミック部材の
凸部外表面と金属部材の凹部内表面の接合端部に応力集
中が生じやすく、接合体の曲げやねじりに対する強度が
低下し、セラミック部材が破壊するおそれが大きかった
At the time of joining, it is common to join the convex portion of the ceramic member to the recessed portion of the metal member by shrink fitting, brazing, or the like to form a joined body. At this time, stress concentration tends to occur at the joint end between the outer surface of the convex portion of the ceramic member and the inner surface of the recessed portion of the metal member, reducing the strength of the joined body against bending and twisting, and there is a large possibility that the ceramic member will break.

この接合体端部への応力集中を防止するため、セラミッ
ク部材に凸部を設けるとともに金属部材に凹部を設けて
、該凸部と該凹部を接合した金属・セラミックス接合体
において、接合を焼きばめの機械的接合により行い、該
凸部の外周部に溝部を設け、該溝部の端が接合端部にな
るように該凹部を位置させた形状が、特開昭59−15
9408号公報において開示されている。
In order to prevent this stress concentration on the end of the joined body, a convex part is provided on the ceramic member and a concave part is provided on the metal member, and in the metal-ceramic joined body in which the convex part and the concave part are joined, the joining is performed by baking. JP-A-59-15 discloses a shape in which a groove is provided on the outer periphery of the convex portion and the recess is positioned such that the end of the groove becomes the joint end.
It is disclosed in Japanese Patent No. 9408.

(発明が解決しようとする課題) しかしながら、上述したように機械的接合により本構造
を実施しても、なおセラミック部材の凸部の実質的全周
にわたって設けた溝部の端と金属部材の凹部とが当接し
、その位置で過大な応力集中が生じ、接合体の曲げやね
じりに対する強度が低下し、セラミック部材が破壊しや
すい欠点があった。
(Problem to be Solved by the Invention) However, even if the present structure is implemented by mechanical bonding as described above, the end of the groove provided over substantially the entire circumference of the convex part of the ceramic member and the recess of the metal member still When the ceramic members come into contact with each other, excessive stress concentration occurs at that position, which reduces the strength of the joined body against bending and torsion, and the ceramic member is easily destroyed.

なお、該溝部の端がエツジ部であっても、丸め部であっ
ても程度の差はあるが応力集中が生じるため、このため
に接合体の曲げやねじりに対する強度が低下し、セラミ
ック部材が破壊しやすい欠点は同様である。さらに、接
合体が燃焼ガス等の雰囲気下で用いられた場合、接合端
部が燃焼ガス等にさらされ、接合体の耐久性が低下しや
すい欠点があった。
Furthermore, whether the end of the groove is an edge or a rounded part, stress concentration occurs to varying degrees, which reduces the strength of the joined body against bending and torsion, causing the ceramic member to deteriorate. They also have the same disadvantage of being easily destroyed. Furthermore, when the joined body is used in an atmosphere of combustion gas or the like, there is a drawback that the joined end portions are exposed to the combustion gas or the like, and the durability of the joined body tends to decrease.

本発明は上述した課題を解消して、製造が容易でしかも
接合部の接合強度の高い金属・セラミックス接合体を提
供しようとするものである。
The present invention aims to solve the above-mentioned problems and provide a metal-ceramic bonded body that is easy to manufacture and has high bonding strength at the bonded portion.

(課題を解決するための手段) 本発明の金属・セラミックス接合体の一例は、セラミッ
ク部材に設けた凸部が金属部材に設けた凹部に挿入され
て一体的に接合されている構造の金属・セラミックス接
合体において、前記金属部材の凹部の内径が凹部開口部
で大きくなるように段部を設け、接合時に前記段部とセ
ラミック部材の凸部との間の隙間に少なくともろう材を
介在させることを特徴とするものである。
(Means for Solving the Problems) An example of the metal/ceramic bonded body of the present invention is a metal/ceramic bonded body having a structure in which a convex part provided on a ceramic member is inserted into a recessed part provided in a metal member and is integrally joined. In the ceramic bonded body, a stepped portion is provided so that the inner diameter of the recessed portion of the metal member becomes larger at the opening of the recessed portion, and at least a brazing material is interposed in the gap between the stepped portion and the convex portion of the ceramic member during bonding. It is characterized by:

また、本発明の金属・セラミックス接合体の他の例は、
セラミック部材に設けた凸部が金属部材に設けた凹部に
挿入されて一体的に接合されている構造の金属・セラミ
ックス接合体において、前記セラミック部材の凸部接合
端近傍の実質的全周にわたって溝部を設け、少なくとも
該溝部の端と前記金属部材の凹部との間にろう材が介在
するようにろう材を該溝部に設けたことを特徴とするも
のである。
Further, other examples of the metal-ceramic bonded body of the present invention include:
In a metal-ceramic bonded body having a structure in which a protrusion provided on a ceramic member is inserted into a recess provided in a metal member and integrally joined, a groove portion is formed over substantially the entire circumference near the joining end of the protrusion of the ceramic member. A brazing material is provided in the groove so that the brazing material is interposed between at least the end of the groove and the recess of the metal member.

なお、本発明の接合体でいう接合端とは、金属部材の凹
部開口部近傍におけるセラミック部材の凸部とろう材と
の接合部の端のことであって、第4図に示すように接合
端20が該凸部の溝部の位置にあってもよいし、該溝部
より外側にあってもよい。
Note that the joint end in the joined body of the present invention refers to the end of the joint between the protrusion of the ceramic member and the brazing material near the opening of the recess of the metal member, and as shown in FIG. The end 20 may be located at the groove of the convex portion, or may be located outside of the groove.

(作 用) 上述した構成において、セラミック部材の凸部接合端近
傍の実質的全周にわたって溝部を設け、少なくとも該溝
部の端と金属部材の凹部との間にろう材が介在するよう
構成するか、金属部材の凹部の内径が凹部開口部で大き
くなるように段部を設け、接合時に前記段部とセラミッ
ク部材の凸部との間の隙間に少なくともろう材を介在さ
せるよう構成したため、ろう材の緩衝作用でセラミック
部材中の応力集中の低減がはかれるので、曲げやねじり
に対し破壊しにくく、信頼性が高い金属・セラミックス
接合体を得ることができる。さらに、上述のセラミック
部材の凸部接合端近傍の実質的全周にわたって溝部を設
け、少なくとも該溝部の端と金属部材の凹部との間にろ
う材が介在するように構成し、ろう材を該溝部内に設け
た場合は、ろう材が溝部内に存在することによりセラミ
ック部材の抜は防止になり、抜けに対する信頼性が増大
する。
(Function) In the above-described configuration, a groove is provided over substantially the entire circumference near the joining end of the convex portion of the ceramic member, and a brazing material is interposed between at least the end of the groove and the recess of the metal member. , a stepped portion is provided so that the inner diameter of the recessed portion of the metal member becomes larger at the opening of the recessed portion, and at least a brazing material is interposed in the gap between the stepped portion and the convex portion of the ceramic member during bonding. Since the stress concentration in the ceramic member is reduced by the buffering effect of , it is possible to obtain a highly reliable metal-ceramic bonded body that is resistant to breakage due to bending or torsion. Furthermore, a groove is provided over substantially the entire circumference near the joining end of the convex portion of the ceramic member, and a brazing material is interposed between at least the end of the groove and the recess of the metal member. When provided in the groove, the presence of the brazing material in the groove prevents the ceramic member from coming off, increasing reliability against coming off.

さらに、金属部材とセラミック部材との接合をセラミッ
ク部材の凸部外表面と金属部材の凹部内表面との間に限
定するとともに、空間またはろうと非接合性物質の低弾
性体からなる中間体または該物質からなる膜を介在させ
てセラミック部材の凸部先端表面と金属部材の凹部底面
との接合を妨げると、セラミ・レフ部材の凸部先端およ
び接合端での残留応力による応力集中が緩和され、曲げ
やねじりに対し破壊しにくく信頼性が高い金属・セラミ
ックス接合体を得ることができさらに好ましい。
Further, the joining between the metal member and the ceramic member is limited between the outer surface of the convex part of the ceramic member and the inner surface of the recess of the metal member, and the space or the intermediate made of a low-elastic body of a non-bonding substance or the When a film made of a substance is interposed to prevent the bonding between the tip surface of the convex part of the ceramic member and the bottom surface of the concave part of the metal member, stress concentration due to residual stress at the tip of the convex part and the joint end of the ceramic reflex member is alleviated, This is more preferable since it is possible to obtain a highly reliable metal-ceramic bonded body that is resistant to breakage due to bending or twisting.

接合をろう付けにより行う場合は、セラミック部材の凸
部に設けた溝部と金属部材の凹部との間にろう材が存在
し、ろう材の厚みが厚くなることにより、セラミツ゛り
部材の接合端部にろう付は温度からの金属部材とセラミ
ック部材との収縮量の差により発生する応力集中を低減
できるため好ましい。
When joining is performed by brazing, a brazing material is present between the groove provided in the convex part of the ceramic member and the recessed part of the metal member, and the increased thickness of the brazing material causes the joint end of the ceramic member to Brazing is preferable because it can reduce stress concentration caused by the difference in shrinkage between the metal member and the ceramic member due to temperature.

また、上記凸部外表面と金属部材凹部内表面との接触部
のみでろう付けすると、接合端に発生する残留応力を緩
和でき、さらにろうとセラミック部材ならびに金属部材
が反応し、両部材の間に強固な接合体が形成されるため
に室温から高温までの接合強度が強くなるばかりでなく
、接合温度からの冷却に際して焼嵌め効果が付加される
ので、安定して高強度が得られ好ましい。
In addition, by brazing only the contact area between the outer surface of the protrusion and the inner surface of the recess of the metal member, the residual stress generated at the joint end can be alleviated, and the solder reacts with the ceramic member and the metal member, causing a gap between the two members. Since a strong bonded body is formed, not only the bonding strength from room temperature to high temperature becomes strong, but also a shrink-fitting effect is added when cooling from the bonding temperature, so high strength can be stably obtained, which is preferable.

接合部の上記位置への限定は、ろうと接合性を持たない
物質からなる薄い膜をセラミック部材に設けた凸部先端
表面へ形成させることや、該物質からなる中間体または
空間を金属部材に設けた凹部底面とセラミック部材に設
けた凸部先端表面との間に配置すること、およびそれら
を組合せて行う。
The bonding portion can be limited to the above position by forming a thin film made of a substance that does not have bonding properties with wax on the tip surface of the convex part provided on the ceramic member, or by providing an intermediate body or space made of the substance on the metal member. The ceramic member may be disposed between the bottom surface of the concave portion and the tip surface of the convex portion provided on the ceramic member, or a combination thereof may be performed.

ろうと接合性を持たない物質の一例としては、黒鉛があ
る。前記凸部先端表面への黒鉛膜の形成は、黒鉛粒子懸
濁液を刷毛またはスプレーによる塗布、あるいは浸漬な
どで容易に行うことができる。また、前記中間体として
は、例えば黒鉛繊維からなるスライバー、フェルト、ウ
ェブ、ウェブ焼結体、織布のような低弾性体を単独でま
たは組合わせて使用すると好ましい。
Graphite is an example of a material that does not bond with solders. The graphite film can be easily formed on the tip surface of the convex portion by applying a graphite particle suspension with a brush or spray, or by dipping. Further, as the intermediate body, it is preferable to use a low elastic body such as a sliver made of graphite fiber, felt, web, web sintered body, or woven fabric alone or in combination.

さらに、前記中間体を前記凸部先端表面と前記凹部底面
との間に介在させると、接合部位の限定を容易にしかも
確実に行なえるので、接合後にセラミック部材の接合端
に生じる残留応力の低減と管理が可能となり、接合強度
の増大とばらつきの減少が達成される。
Furthermore, when the intermediate body is interposed between the tip surface of the convex portion and the bottom surface of the recessed portion, the joining area can be easily and reliably limited, thereby reducing residual stress generated at the joining end of the ceramic member after joining. This makes it possible to increase bond strength and reduce variation.

低弾性体からなる中間体の介在は、ろうと前記凹部底面
との接合を阻止する効果だけでなく、接合温度からの冷
却に際しセラミック部材と金属部材との収縮量の差によ
り生じる前記凸部先端と前記凹部底面の相互干渉を防止
し、接合部に過大な残留応力が発生することを阻止する
効果と、溶融したろうを凸部外表面と凹部内表面の間の
隙間に効率良く浸透させる効果も有している。
The interposition of the intermediate body made of a low elastic material not only has the effect of preventing the solder from joining with the bottom surface of the concave portion, but also prevents the tip of the convex portion caused by the difference in the amount of shrinkage between the ceramic member and the metal member upon cooling from the bonding temperature. It also has the effect of preventing mutual interference between the bottom surfaces of the recess and the generation of excessive residual stress in the joint, and the effect of efficiently penetrating the molten solder into the gap between the outer surface of the convex part and the inner surface of the recess. have.

セラミック部材と金属部材との接合に使用するろうは、
セラミック部材と化学的接合が可能な活性金属元素を含
有する活性金属ろうであると好ましい。該ろうとしては
、活性金属元素を含む合金ろうであってもよいし、金属
基材の上に活性金属元素を被覆した構造のろう材でもよ
い。ろう材に対する活性金属の添加量の調整、取り扱い
の容易さあるいは製造の容易さを考慮すると、金属基材
の上に活性金属元素を被覆した構造のろう材の使用が好
ましく、金属基材の上に活性金属元素を蒸着した構造の
ろう材の使用がより好ましい。このような活性金属元素
としては、被接合セラミック部材が少なくとも窒化物お
よび/または炭化物を含むセラミックスの場合には、Z
r+ Ti、 Ta+ If。
The wax used to join ceramic parts and metal parts is
Preferably, it is an active metal solder containing an active metal element that can be chemically bonded to a ceramic member. The solder may be an alloy solder containing an active metal element, or a brazing material having a structure in which a metal base material is coated with an active metal element. Considering adjustment of the amount of active metal added to the brazing filler metal, ease of handling, and ease of manufacturing, it is preferable to use a brazing filler metal with a structure in which the active metal element is coated on the metal base. It is more preferable to use a brazing material having a structure in which an active metal element is vapor-deposited. Such active metal elements include Z when the ceramic members to be joined are ceramics containing at least nitrides and/or carbides.
r+ Ti, Ta+ If.

V、 Cr、  La、 Sc+ YおよびMoからな
る群から選ばれた少なくとも一種の金属元素が好ましく
、被接合セラミック部材が酸化物セラミックスの場合に
は、Be、 ZrおよびTiからなる群から選ばれる少
なくとも一種の金属元素が好ましい。
At least one metal element selected from the group consisting of V, Cr, La, Sc+ Y and Mo is preferable, and when the ceramic member to be joined is an oxide ceramic, at least one metal element selected from the group consisting of Be, Zr and Ti. One type of metal element is preferred.

上記活性金属ろうは、セラミックスとの濡れ性が良いの
で、セラミック部材に対してメタライズ処理のような特
別な前処理をする必要はない。また、金属部材に対して
はNiめっきをすればろうに対して濡れが良くなる。従
って、該ろうを使用すれば所定の接合位置へ毛細管現象
を利用して溶融ろうを浸透させることができるので、接
合予定位置にろう材を配置させずとも被接合部に形成す
る隙間の管理を行うだけで、気泡やひけなどの欠陥の少
ないろう付けを行うことができる。
Since the active metal solder has good wettability with ceramics, there is no need to perform special pretreatment such as metallization treatment on the ceramic member. Furthermore, if metal members are plated with Ni, they will have better wettability to the solder. Therefore, if this solder is used, it is possible to infiltrate the molten solder into a predetermined joining position using capillary action, so it is possible to manage the gap formed in the parts to be joined without placing the solder metal at the planned joining position. Just by doing this, you can achieve brazing with fewer defects such as bubbles and sink marks.

活性金属を含有しないろうでろう付けを行う場合は、セ
ラミック部材の凸部外表面の接合予定位置にメタライズ
層を設けて該メタライズ層にNiめっきを施し、より好
ましくは金属部材の凹部内表面の接合予定位置にNiめ
っきを施すことにより、上述の活性金属を含むろうの場
合と同様の効果が得られる。この場合、メタライズ層を
設けていない凸部先端では、ろうとセラミックスが反応
しないので接合されず、凸部先端表面と凹部底面との間
に隙間が形成される。さらに、金属部材の凹部内表面の
接合予定位置にNiめっきを施すことにより、該凹部内
表面とろうとの濡れが良くなるので、より好ましい。
When brazing is performed using a solder that does not contain active metals, a metallized layer is provided at the planned joining position on the outer surface of the convex part of the ceramic member, and Ni plating is applied to the metallized layer, and more preferably, the inner surface of the recessed part of the metal member is plated with Ni. By applying Ni plating to the intended joining position, the same effect as in the case of the solder containing the active metal described above can be obtained. In this case, at the tips of the protrusions where no metallized layer is provided, the solder and ceramics do not react, so they are not joined, and a gap is formed between the tips of the protrusions and the bottoms of the recesses. Furthermore, it is more preferable to apply Ni plating to the intended joining position on the inner surface of the recess of the metal member, since this improves the wettability between the inner surface of the recess and the solder.

さらにまた、セラミック部材の凸部外表面と金属部材の
凹部内表面の接合予定位置に、活性金属の箔を配置し、
金属部材の凹部底面には、活性金属を含まないろう材を
配置してろう付けを行うことにより、活性金属ろうを使
用したと同様の効果を得ることも出来る。
Furthermore, an activated metal foil is placed at a position where the outer surface of the convex portion of the ceramic member and the inner surface of the recessed portion of the metal member are to be joined,
By placing a brazing material that does not contain an active metal on the bottom surface of the recess of the metal member and performing brazing, the same effect as using an active metal brazing material can be obtained.

また、実質的接合を圧入、焼ばめ、冷やしぼめ等の機械
的接合により行い、少なくともセラミック部材の凸部接
合端近傍の実質的全周にわたって設けた溝部の端と金属
部材の凹部との間にろう材が介在するように構成すれば
、接合を機械的接合でのみ行った場合に前記溝部の端と
金属部材の凹部とが当接し、その位置で発生した過大な
応力集中がろう材の緩衝作用で低減され、さらに高温燃
焼ガス等の腐蝕性ガスが接合界面に侵入するのを防ぐこ
とができるため好ましい。
Further, the substantial joining is performed by mechanical joining such as press fitting, shrink fitting, cold fitting, etc., and the end of the groove provided over substantially the entire circumference at least near the joining end of the convex part of the ceramic member and the recessed part of the metal member. If the structure is such that the brazing metal is interposed between them, the end of the groove will come into contact with the recess of the metal member when joining is performed only by mechanical joining, and the excessive stress concentration generated at that position will be absorbed by the brazing metal. This is preferable because it can be reduced by the buffering effect of and further prevent corrosive gases such as high-temperature combustion gases from entering the bonding interface.

なお、上記のにように実質的接合を機械的接合にて行な
った場合の少なくとも該溝部の端と金属部材の凹部との
間にろう材を介在させる方法は、機械的接合後、該溝部
に配置したろう材の溶融温度まで接合体を昇温すること
により、溶融したろうが該溝部の端と該凹部との間に浸
透し、本発明の構造を容易に達成することができる。な
お、上記の場合に用いるろう材は活性金属ろうであって
もよいし、活性金属を含有しないろうであってもよい。
In addition, when the substantial joining is performed by mechanical joining as described above, at least the method of interposing a brazing material between the end of the groove and the recess of the metal member is such that the brazing material is inserted into the groove after mechanical joining. By raising the temperature of the joined body to the melting temperature of the disposed brazing material, the molten brazing material infiltrates between the end of the groove and the recess, making it possible to easily achieve the structure of the present invention. The brazing material used in the above case may be an active metal brazing material or may be a brazing material containing no active metal.

また、実質的接合を圧入、焼きばめ、冷やしぼめ等の機
械的接合により行う場合においても、セラミック部材の
凸部外表面と金属部材の凹部内表面との接触面のみで接
合すると、セラミック部材と金属部材の熱膨張量または
熱収縮量の差に起因する前記凸部と前記凹部の相互干渉
による残留応力がなくなり好ましい。
Furthermore, even when the actual joining is performed by mechanical joining such as press fitting, shrink fitting, or cold fitting, if the joining is performed only at the contact surface between the outer surface of the convex part of the ceramic member and the inner surface of the recessed part of the metal member, the ceramic This is preferable because residual stress due to mutual interference between the convex portion and the concave portion due to the difference in the amount of thermal expansion or contraction between the member and the metal member is eliminated.

接合部の上記位置への限定は、中間体または空間を前記
凹部底面と前記凸部先端表面との間に配置することによ
り行なう。
The joint portion is limited to the above position by arranging an intermediate body or space between the bottom surface of the recess and the tip surface of the convex portion.

さらに、実質的接合を圧入により行う場合には、圧入距
離を制御することで、容易に凸部先端表面と凹部底面と
の間に所定の空間を設けることができ好ましい。
Further, when the substantial joining is performed by press-fitting, it is preferable that a predetermined space can be easily provided between the tip surface of the convex portion and the bottom surface of the concave portion by controlling the press-fitting distance.

またさらに、実質的接合を圧入により行なう場合、本出
願人が特願昭61−285974号公報に示したように
、容器内にセラミック部材と金属部材を収容し例えば1
0Torr程度の減圧下で圧入を実施すると、セラミッ
ク部材凸部と金属部材凹部間に形成される空間に圧縮さ
れた空気が残留せず、より信頌性の高い接合体が得られ
るので好ましい。
Furthermore, when the substantial joining is carried out by press-fitting, as disclosed in Japanese Patent Application No. 61-285974 by the present applicant, the ceramic member and the metal member are housed in a container, for example.
It is preferable to carry out the press-fitting under a reduced pressure of about 0 Torr because compressed air does not remain in the space formed between the convex part of the ceramic member and the concave part of the metal member, and a bonded body with higher reliability can be obtained.

本発明の金属・セラミックス接合体を構成するセラミッ
ク材料としては、いずれの材料でもよいが、実用性を考
慮すると窒化珪素、炭化珪素、サイアロン、ジルコニア
、アルミナ、ムライト、チタン酸アルミニウム、および
コージェライトからなる群から選ばれる少なくとも一種
のセラミック材料が好ましい。これらのセラミック材料
のいずれを使用するかは、本発明の金属・セラミックス
接合体の使用目的と接合すべき金属材料の種類に応じて
決定すればよい。
The ceramic material constituting the metal-ceramic bonded body of the present invention may be any material, but in consideration of practicality, silicon nitride, silicon carbide, sialon, zirconia, alumina, mullite, aluminum titanate, and cordierite are preferred. At least one ceramic material selected from the group consisting of: Which of these ceramic materials to use may be determined depending on the purpose of use of the metal-ceramic bonded body of the present invention and the type of metal material to be bonded.

(実施例) 第1図(a)〜(d)はそれぞれ本発明の金属・セラミ
ックス接合体の一例を示す部分断面図である。
(Example) FIGS. 1(a) to 1(d) are partial cross-sectional views showing an example of the metal-ceramic bonded body of the present invention.

各実施例においては、セラミック部材1の凸部2と金属
部材4の凹部5とを接合し、前記凹部5の内径が凹部開
口部で大きくなるように段部3を設けるとともに、接合
時に前記段部3と前記凸部2との間の隙間に少なくとも
ろう材を介在した例を示している。
In each embodiment, the convex portion 2 of the ceramic member 1 and the concave portion 5 of the metal member 4 are bonded, and a step portion 3 is provided so that the inner diameter of the concave portion 5 becomes larger at the opening of the concave portion, and the step portion 3 is provided at the time of bonding. An example is shown in which at least a brazing material is interposed in the gap between the portion 3 and the convex portion 2.

第1図(a)に示す実施例では、接合予定位置の金属部
材4の凹部5の内表面全面にNiめっきを施した後、活
性金属ろう6を使用して接合することにより、凹部5の
内表面とセラミック部材1の凸部2の外表面の接触面と
を実質的に全面ろう付けした構造を示している。なお、
通常の活性金属を含有しないろうを使用するときは、上
述した凹部5の内表面へのNiめっき後、接合予定位置
の凸部2の外表面全面にメタライズ層を設は該メタライ
ズ層にNiめっきを施すことにより、同様な接合を達成
することができる。
In the embodiment shown in FIG. 1(a), the entire inner surface of the recess 5 of the metal member 4 at the planned joining position is plated with Ni, and then the recess 5 is bonded using an active metal solder 6. This shows a structure in which the inner surface and the contact surface of the outer surface of the convex portion 2 of the ceramic member 1 are substantially entirely brazed. In addition,
When using a solder that does not contain a normal active metal, after Ni plating the inner surface of the recess 5 described above, a metallized layer is provided on the entire outer surface of the protrusion 2 at the planned bonding position. A similar bond can be achieved by applying

第1図(b)に示す実施例では、接合予定位置の凹部5
の内表面にNiめっきを施し、凸部2の先端表面9には
ろうと非接合性物質からなる黒鉛を塗布した後、活性金
属ろう6を使用して接合することにより、実質的接合を
凹部5の内表面と凸部2の外表面の接触面においてろう
付けすることにより構成するとともに、凹部5の底面と
凸部2の先端表面9との間に空間7を設は接合していな
い構造を示している。
In the embodiment shown in FIG. 1(b), the recess 5 at the planned joining position
After Ni plating is applied to the inner surface of the convex portion 2 and graphite made of a solder and a non-bonding substance is applied to the tip surface 9 of the convex portion 2, the active metal solder 6 is used to bond the convex portion 2 to the concave portion 5. It is constructed by brazing the contact surface between the inner surface of the convex portion 2 and the outer surface of the convex portion 2, and a space 7 is provided between the bottom surface of the concave portion 5 and the tip surface 9 of the convex portion 2, and the structure is not joined. It shows.

第1図(c)に示す実施例では、接合予定位置の凹部5
の内表面にNiめっきを施し、凸部2の先端表面9に黒
鉛を塗布し、凹部5の底面であって凸部2の先端表面9
に接触する位置にろうと非接合性物質からなる低弾性中
間体である黒鉛フェルト7を設けた後、活性金属ろう6
を使用して接合することにより、実質的接合を凹部5の
内表面と凸部2の外表面の接触面においてろう付けする
ことにより構成するとともに、凹部5の底面と凸部2の
先端表面とが接合していない構造を示している。
In the embodiment shown in FIG. 1(c), the recess 5 at the planned joining position
The inner surface of the convex portion 2 is coated with Ni plating, the tip surface 9 of the convex portion 2 is coated with graphite, and the bottom surface of the concave portion 5 and the tip surface 9 of the convex portion 2 is coated with graphite.
Graphite felt 7, which is a low-elasticity intermediate made of a non-bonding substance, is provided at a position in contact with the wax, and then the active metal solder 6 is
By joining the concave portion 5 to the outer surface of the convex portion 2, a substantial bond is formed by brazing at the contact surface between the inner surface of the concave portion 5 and the outer surface of the convex portion 2, and the bottom surface of the concave portion 5 and the tip surface of the convex portion 2 are indicates an unbonded structure.

第1図(d)に示す実施例では、圧入を行う前に凹部5
の開口部に設けた段部3の内表面の少なくともろう付は
予定位置にNiめっきを施した後圧入を行ない、該段部
3と凸部5との間に配置した活性金属ろうをろう付は温
度まで加熱し、ろう付けすることにより、段部3を形成
する凹部5の内表面と凸部2の外表面との間に活性金属
ろう6を設けた構造を示している。また、段部3の内表
面の少なくともろう付は予定位置へのNiめっきを圧入
後に行ってもよい。さらに、ろう材を段部3と凸部5と
の間に配置する方法としては、圧入前にろう材を前記所
定の位置に配置後圧入を実施してもよいし、可能な場合
は圧入後にろう材を前記所定の位置に配置してもよい。
In the embodiment shown in FIG. 1(d), the recess 5 is
At least brazing of the inner surface of the stepped portion 3 provided in the opening is performed by press-fitting after applying Ni plating at the planned position, and brazing the active metal solder disposed between the stepped portion 3 and the convex portion 5. 1 shows a structure in which an active metal solder 6 is provided between the inner surface of the recess 5 forming the step 3 and the outer surface of the protrusion 2 by heating to a temperature and brazing. Further, at least the brazing of the inner surface of the stepped portion 3 may be performed after Ni plating is press-fitted into the predetermined position. Furthermore, as a method for arranging the brazing material between the step part 3 and the convex part 5, the brazing material may be placed in the predetermined position before press-fitting and then press-fitting, or if possible, after the press-fitting. A brazing filler metal may be placed at the predetermined position.

さらにまた、別のろう付は方法として、圧入後溶融した
ろう材を段部3と凸部5との間に流し込んでろう付けし
てもよい。
Furthermore, as another method of brazing, a molten brazing material may be poured between the stepped portion 3 and the convex portion 5 after press-fitting.

なお、上述した実施例のうち、第1図(a) 、 (b
) 。
In addition, among the above-mentioned embodiments, FIGS. 1(a) and (b)
).

(c)に示した場合、ろう付は温度における凹部内表面
と凸部外表面とのすき間gの厚さは300μm以下とす
るのが好ましく150μm以下とするのがより好ましい
。該すき間gが300μm以上では、接合強度が低くな
ることや、前述の毛細管現象を利用して溶融ろうを浸透
させる場合には、ろうの上昇高さが減少し、所定の接合
距離が得られるので好ましくない。一方、ろう付は温度
における段部を形成する凹部内表面と凸部外表面との間
のすき間Gが、すき間gの1.5〜4倍であると好まし
く、2〜3倍であるとより好ましい。
In the case shown in (c), the thickness of the gap g between the inner surface of the concave portion and the outer surface of the convex portion at the brazing temperature is preferably 300 μm or less, and more preferably 150 μm or less. If the gap g is 300 μm or more, the bonding strength will be low, and if the molten solder is penetrated using the capillary phenomenon described above, the rising height of the solder will be reduced and a predetermined bonding distance will be obtained. Undesirable. On the other hand, in brazing, it is preferable that the gap G between the inner surface of the recess and the outer surface of the protrusion forming the step at temperature is 1.5 to 4 times the gap g, and more preferably 2 to 3 times the gap G. preferable.

また、第1図(d)に示した場合、すき間Gはろう付は
温度において100〜1200μmが好ましく、200
〜800 μmがより好ましい。
In addition, in the case shown in FIG. 1(d), the gap G is preferably 100 to 1200 μm at the brazing temperature, and 200 μm to 200 μm.
-800 μm is more preferable.

なお、上述した第1図(a)〜(d)に示す実施例にお
いて、すき間Gがこれ以上大きくなると金属部材9厚さ
が薄くなるため耐久上よくない場合がある。
In the embodiment shown in FIGS. 1(a) to 1(d), if the gap G becomes larger than this, the thickness of the metal member 9 becomes thinner, which may not be good in terms of durability.

第2図(a)〜(d)はそれぞれ本発明の金属・セラミ
ックス接合体の他の例を示す部分断面図である。第2図
(a)から(c)の実施例においては、セラミック部材
11の凸部12と金属部材13の凹部14とを活性金属
ろうあるいは活性金属を含有しないろう15を使用して
ろう付けにより接合するとともに、前記凸部12の接合
端近傍に対応する位置の全周にわたって溝部16を設け
、さらにこの溝部16に接合に使用したろうと同じろう
15を接合部から連続して設けて、該溝部16の端17
と前記凹部14との間にろう15が少なくとも介在する
ように、ろう15を該溝部16に設けた例を示している
FIGS. 2(a) to 2(d) are partial cross-sectional views showing other examples of the metal-ceramic joined body of the present invention. In the embodiment shown in FIGS. 2(a) to 2(c), the convex portion 12 of the ceramic member 11 and the concave portion 14 of the metal member 13 are brazed using an active metal solder or a solder 15 containing no active metal. At the same time as joining, a groove 16 is provided along the entire circumference at a position corresponding to the vicinity of the joining end of the convex portion 12, and a solder 15, which is the same as the solder used for joining, is provided in this groove 16 continuously from the joining part. 16 end 17
An example is shown in which the solder 15 is provided in the groove 16 so that at least the solder 15 is interposed between the groove 16 and the recess 14.

第2図(a)に示す実施例では、接合予定位置の金属部
材13の凹部14の内表面全面にNiめっきを施した後
、活性金属ろう15を使用して接合することにより、凹
部14の内表面とセラミック部材11の凸部12の外表
面の接触面とを実質的に全面ろう付けした構造を示して
いる。なお、通常のAgろうのようにを含有しないろう
を使用するときは、上述した凹部14の内表面へのNi
めっき後、接合予定位置の凸部12の外表面全面にメタ
ライズ層を設け、該メタライズ層にNiめっきを施すこ
とにより、同様な接合を達成することができる。
In the embodiment shown in FIG. 2(a), the entire inner surface of the recess 14 of the metal member 13 at the planned joining position is plated with Ni, and then the recess 14 is bonded using the active metal solder 15. This shows a structure in which the inner surface and the contact surface of the outer surface of the convex portion 12 of the ceramic member 11 are substantially entirely brazed. Note that when using a solder that does not contain Ni such as ordinary Ag solder, the inner surface of the recess 14 described above may be
After plating, a metallized layer is provided on the entire outer surface of the convex portion 12 at the intended joining position, and the metallized layer is plated with Ni, thereby achieving a similar joining.

第2図(b)に示す実施例では、接合予定位置の凹部1
4の内表面にNiめっきを施し、凸部12の先端表面に
はろうと非接合性物質からなる黒鉛を塗布した後、活性
金属ろう15を使用してろう付けにより凸部12の外表
面と凹部14の内表面のみで接合するとともに、凹部1
4の底面と凸部12の先端表面とを接合せずに、該凹部
14の底面と該凸部12の先端表面との間に、空間18
を設けた構造を示している。
In the embodiment shown in FIG. 2(b), the recess 1 at the planned joining position is
After Ni plating is applied to the inner surface of the convex portion 12 and graphite made of a non-bonding substance is applied to the tip surface of the convex portion 12, the outer surface of the convex portion 12 and the concave portion are brazed using an active metal solder 15. 14, and the recess 1
4 and the tip surface of the convex portion 12, a space 18 is formed between the bottom surface of the concave portion 14 and the tip surface of the convex portion 12.
The figure shows a structure with .

第2図(c)に示す実施例では、接合予定位置の凹部1
4の内表面にNiめっきを施し、凹部14の底面の上に
ろうと非接合性物質からなる低弾性中間体である黒鉛フ
ェルト19の配置と、該黒鉛フェルト19の上に銀ろう
板の表面上にTiを蒸着した活性金属ろうの配置とを行
ない、凸部12の先端表面に黒鉛を塗布した後、該凸部
12を前記凹部14内に挿入して接合用組立体を形成し
た。次に、該接合用組立体を真空中で加熱し、該ろうを
溶融させ、毛細管現象を利用して、溶融ろうを接合予定
位置へ浸透させ凸部12の外表面と凹部14の内表面の
みで接合するとともに、凹部14の底面と凸部12の先
端表面とが接合していない構造を示している。
In the embodiment shown in FIG. 2(c), the recess 1 at the planned joining position is
4, Ni plating is applied to the inner surface of the recess 14, and a graphite felt 19, which is a low-elastic intermediate made of a non-bonding material with the solder, is placed on the bottom of the recess 14, and on top of the graphite felt 19, the surface of the silver brazing plate is placed. After applying graphite to the tip surface of the convex portion 12, the convex portion 12 was inserted into the concave portion 14 to form a bonding assembly. Next, the joining assembly is heated in a vacuum to melt the solder, and by utilizing capillary action, the molten solder permeates into the intended joining position only to the outer surface of the convex portion 12 and the inner surface of the recessed portion 14. This shows a structure in which the bottom surface of the concave portion 14 and the tip surface of the convex portion 12 are not bonded to each other.

第2図(d)に示す実施例においては、セラミック部材
11の凸部12と金属部材13の凹部14とを圧入等の
機械的接合により接合するとともに、前記凸部12の接
合端近傍の全周にわたって溝部16を設け、少なくとも
該溝部16の端17と前記凹部14との間に活性金属ろ
う15が介在するように、該ろう15を該溝部16に設
けた例を示している。本実施例では、Niめっきを該凹
部14のろう付は予定位置へ施す工程は、機械的接合の
実施前でもよいし、該接合の実施後でもよい。さらに、
ろう材の所定の位置への配置は、該接合前に該溝部16
に配置してもよいし、可能であれば該接合後に該溝部1
6に配置してもよい。さらにまた、別のろう付は方法と
して、該接合後に溶融したろう材を該溝部16と前記凹
部14との間に流し込み、ろう付けしてもよい。
In the embodiment shown in FIG. 2(d), the convex part 12 of the ceramic member 11 and the concave part 14 of the metal member 13 are joined by mechanical joining such as press-fitting, and the entire vicinity of the joint end of the convex part 12 is An example is shown in which a groove 16 is provided around the circumference, and the solder 15 is provided in the groove 16 such that the active metal solder 15 is interposed at least between the end 17 of the groove 16 and the recess 14. In this embodiment, the step of applying Ni plating to the predetermined brazing position of the recess 14 may be performed before or after the mechanical bonding. moreover,
The brazing filler metal is placed in a predetermined position in the groove 16 before joining.
If possible, the groove portion 1 may be placed after the bonding.
It may be placed at 6. Furthermore, as another brazing method, a molten brazing material may be poured between the groove 16 and the recess 14 after the joining, and brazing may be performed.

上述した第2図(b) 、 (c)に示すように、凹部
14の底面と凸部12の先端表面とが空間18または黒
鉛フェルト19よりなる中間体により直接接触しない構
造の実施例においては、凹部14の底面と凸部12の先
端表面とが接触もしくは接合している場合に生じる応力
集中を防止できるため好ましい。
As shown in FIGS. 2(b) and 2(c) above, in an embodiment in which the bottom surface of the concave portion 14 and the tip surface of the convex portion 12 are not in direct contact with each other due to the space 18 or the intermediate member made of graphite felt 19, This is preferable because stress concentration that would occur when the bottom surface of the concave portion 14 and the tip surface of the convex portion 12 are in contact with or bond to each other can be prevented.

また、溝部16のろう15の状態は、第3図(a) 、
 (b)において拡大して示すように、少なくとも溝部
16の端17がろう15で包まれていればよい。すなわ
ち、第3図(a)に示すように溝部16の一部にろう1
5が存在しても、第3図(b)に示すように溝部16の
全体にろう15が存在してもよい。しかしながら、第3
図(b)に示すように溝部16の全体にろう15が存在
する構造では抜けに対する強度が高(なり、緩衝作用が
大きくなるとともに、応力集中の低減が図れるため好ま
しい。
The condition of the solder 15 in the groove 16 is shown in FIG. 3(a).
As shown in an enlarged view in (b), it is sufficient that at least the end 17 of the groove portion 16 is wrapped with the wax 15. That is, as shown in FIG. 3(a), a portion of the groove 16 is filled with wax 1.
5 may be present, or the wax 15 may be present throughout the groove portion 16 as shown in FIG. 3(b). However, the third
As shown in Figure (b), a structure in which the solder 15 is present throughout the groove 16 is preferable because it has high strength against pull-out, increases the buffering effect, and reduces stress concentration.

以下、実際の例について説明する。An actual example will be explained below.

1施■ まず、第1図(a)〜(c)に示す本発明の金属・セラ
ミックス接合体を作製した。作製方法を以下に示す。
1. First, a metal-ceramic bonded body of the present invention shown in FIGS. 1(a) to 1(c) was prepared. The manufacturing method is shown below.

直径: 18mmの溶体化処理済インコロイ903丸捧
の一端に内径: 11.05mm 、深さ8mmの凹部
5と直径12mmの細軸部を設けるとともに、凹部内周
の開口部に全周にわたって段部3を設けた金属部材4と
、常圧焼結法による窒化珪素焼結体の一端に直径: 1
1.Omm、長さ: 10mmの凸部2を設けたセラミ
ック部材1を作製した。なお、前記段部3はすき間Gに
対応する寸法に加工し、凹部開口端部よ02.5mm内
側の位置まで設けた。
A recess 5 with an inner diameter of 11.05 mm and a depth of 8 mm and a thin shaft portion with a diameter of 12 mm are provided at one end of a solution-treated Incoloy 903 round piece with a diameter of 18 mm, and a step is provided at the opening on the inner periphery of the recess over the entire circumference. A metal member 4 with a diameter of 1 and a diameter of 1 at one end of a silicon nitride sintered body made by pressureless sintering.
1. A ceramic member 1 provided with a convex portion 2 having a length of 10 mm was produced. Note that the step portion 3 was processed to have dimensions corresponding to the gap G, and was provided up to a position 02.5 mm inside the opening end of the recess.

上記凹部5の底部隅部にはCO,2の面取りが、また開
放端隅部にはテーパー加工がそれぞれ施しである。同じ
く、上記凹部2の先端のエツジ部はC0,5のテーバ加
工が、根本部にはR2の曲面加工がそれぞれ施しである
The bottom corners of the recess 5 are chamfered CO,2, and the open end corners are tapered. Similarly, the edge portion at the tip of the recessed portion 2 is subjected to C0,5 taper processing, and the root portion is subjected to R2 curved surface processing.

これらの金属部材とセラミック部材について、゛上述し
た第1図(a)〜(c)に示す方法で厚さ0.1mmの
銀ろう板の表面上に厚さ2μmのTiを蒸着した活性金
属ろうを使用して本発明の金属・セラミックス接合体を
得た。
Regarding these metal members and ceramic members, ``an active metal solder in which a 2 μm thick Ti layer was deposited on the surface of a 0.1 mm thick silver solder plate by the method shown in FIGS. 1(a) to (c) described above was used. A metal-ceramic bonded body of the present invention was obtained using the following.

このとき、第1図(a)〜(c)におけるNiめっきの
厚さは10μm、第」図(c)における中間体として使
用した黒鉛フェルト8の厚さは0.4mmであった。ま
た、第1図(a)〜(c)におけるgの厚さは150μ
mとした。
At this time, the thickness of the Ni plating in FIGS. 1(a) to 1(c) was 10 μm, and the thickness of the graphite felt 8 used as an intermediate in FIG. 1(c) was 0.4 mm. In addition, the thickness of g in FIGS. 1(a) to (c) is 150μ
It was set as m.

次に、第1図(d)に示す本発明の金属・セラミックス
接合体を作製した。作製方法を以下に示す。
Next, a metal-ceramic bonded body of the present invention shown in FIG. 1(d) was produced. The manufacturing method is shown below.

第1図(a)〜(c)に示す接合体において用いたセラ
ミック部材と同じ材質、形状のセラミック部材と、第1
図(a)〜(c)に示す接合体において用いた金属部材
と同じ材質で凹部5の内径が10.9mmであることを
除けば同じ形状の金属部材を作製した。
A ceramic member having the same material and shape as the ceramic member used in the joined body shown in FIGS. 1(a) to (c), and a first
A metal member was made of the same material as the metal member used in the joined body shown in Figures (a) to (c) and having the same shape except that the inner diameter of the recess 5 was 10.9 mm.

この金属部材とセラミック部材について、上述した第1
図(d)に示す方法でTiを蒸着した活性金属ろうを使
用して本発明の金属・セラミックス接合体を得た。この
とき、Niめっきの厚さは10μmであった。
Regarding this metal member and ceramic member, the first
A metal-ceramic bonded body of the present invention was obtained using an active metal solder on which Ti was deposited by the method shown in Figure (d). At this time, the thickness of the Ni plating was 10 μm.

一方、第1図(a)〜(c)において用いた金属部材や
セラミック部材と同様の形状の第4図(a)に示す段部
を有さず凹部5の内表面と凸部2の外表面の接触面とを
実質的に全面ろう付けした比較例1と、第1図(d)に
おいて用いた金属部材やセラミック部材と同様の形状−
の第4図(b)に示す段部を有さず凸部2を凹部5内に
圧入した比較例2とを準備した。  − なお、第1図、第4図に示す金属・セラミックス接合体
は、すべて真空中で850°Cまで昇温しでろう付けを
行ったのち、インコロイ903所定ノ時効硬化処理を行
って作製したものである。
On the other hand, it does not have the step part shown in FIG. 4(a), which has the same shape as the metal member or ceramic member used in FIGS. Comparative Example 1 in which the surface contact surface was substantially entirely brazed, and a shape similar to that of the metal member or ceramic member used in FIG. 1(d).
A comparative example 2 was prepared in which the convex part 2 was press-fitted into the concave part 5 without having a stepped part as shown in FIG. 4(b). - The metal-ceramic joints shown in Figures 1 and 4 were all fabricated by brazing at a temperature of 850°C in a vacuum and then subjecting them to Incoloy 903 age hardening treatment. It is something.

準備した試料に対し、第5図に示す曲げ試験装置により
金属部材4を固定してセラミック部材1に荷重を付加す
ることにより、セラミック部材が破壊するときの曲げ荷
重を測定して破壊曲げ荷重とするとともに、本発明例に
おけるすき間Gを変化させてそれぞれの破壊曲げ荷重を
求めた。なお、第5図において、1B =40mm+ 
 it =5mmとした。
For the prepared sample, the metal member 4 is fixed and a load is applied to the ceramic member 1 using the bending test device shown in Fig. 5, and the bending load at which the ceramic member breaks is measured and determined as the breaking bending load. At the same time, the fracture bending load was determined by varying the gap G in the example of the present invention. In addition, in Fig. 5, 1B = 40mm +
It was set as 5 mm.

結果を第1表に示す。The results are shown in Table 1.

第1表の結果から、本発明の段部を設けたものが段部を
設けなかった比例例より高い破壊曲げ荷重を示した。な
お、これらの結果を第6図および第7図にまとめて示す
From the results in Table 1, the one provided with the stepped portion of the present invention exhibited a higher fracture bending load than the proportional example without the stepped portion. Note that these results are collectively shown in FIGS. 6 and 7.

以上の結果より、ろう付は温度における段部を形成する
凹部内表面と凸部外表面との間のすき間Gが、すき間g
の1.5〜4倍であると好ましく、2〜3倍であるとよ
り好ましいことがわかる。
From the above results, in brazing, the gap G between the inner surface of the recess and the outer surface of the convex part that forms the step at the temperature
It can be seen that it is preferably 1.5 to 4 times, and more preferably 2 to 3 times.

また、第1図(d)に示した場合、すき間Gはろう付は
温度において100〜1200μmが好ましく、200
〜800 μmがより好ましいことがわかる。
In addition, in the case shown in FIG. 1(d), the gap G is preferably 100 to 1200 μm at the brazing temperature, and 200 μm to 200 μm.
It turns out that ~800 μm is more preferable.

本発明は上述した実施例にのみ限定されるものではなく
、幾多の変形変更が可能である。例えば、第1図に示し
た実施例においては、段部形状を階段状としたが、凹部
開口部へ近づくにともなって大きくなるようなテーパ部
またはR部より構成することもできる。また、第2図に
示した実施例においては、溝部の断面形状が半円状の例
を示したが、他の形状でもよいことはいうまでもない。
The present invention is not limited to the embodiments described above, and can be modified in many ways. For example, in the embodiment shown in FIG. 1, the stepped portion is shaped like a step, but it may also be configured with a tapered portion or an R portion that becomes larger as it approaches the opening of the recess. Further, in the embodiment shown in FIG. 2, the groove section has a semicircular cross-sectional shape, but it goes without saying that other shapes may be used.

(発明の効果) 以上詳細に説明したところから明らかなように、本発明
の金属・セラミックス接合体によれば、金属部材の凹部
の内径が凹部開口部で大きくなるように段部を設け、接
合時に前記段部とセラミック部材の凸部との間の隙間に
少なくともろう材を介在させることにより、またはセラ
ミック部材の凸部の接合端近傍の実質的全周にわたって
溝部を設け、少なくとも該溝部の端と金属部材の凹部と
の間にろう材を介在させることにより、セラミック部材
の接合端の応力集中をろう材の緩衝作用で減少させ、曲
げやねじりに対し破壊しにくく信頼性が高い金属・セラ
ミックス接合体を得ることができる。
(Effects of the Invention) As is clear from the above detailed explanation, according to the metal-ceramic bonded body of the present invention, a stepped portion is provided so that the inner diameter of the recess of the metal member becomes larger at the opening of the recess, and Sometimes, by interposing at least a brazing material in the gap between the stepped part and the convex part of the ceramic member, or by providing a groove part over substantially the entire circumference near the joint end of the convex part of the ceramic member, at least the end of the groove part. By interposing a brazing material between the metal member and the concave part of the metal member, the stress concentration at the joint end of the ceramic member is reduced by the buffering effect of the brazing material, making metals and ceramics highly reliable and resistant to breakage when bent or twisted. A zygote can be obtained.

また、本発明の金属・セラミックス接合体で、タービン
翼車およびタービン軸の一部が窒化珪素セラミックス、
その他の部分が高強度を有する金属からなるターボチャ
ージャロータを構成すれば、ろう材の緩衝作用、残留応
力の低減、接合界面への高温の排気ガス等の腐食性ガス
の侵入が防止でき、耐久性にすぐれ、さらに応答性にす
ぐれた高効率のターボチャージャロータを得ることがで
きる。
Further, in the metal-ceramic bonded body of the present invention, a part of the turbine impeller and the turbine shaft are made of silicon nitride ceramics,
If the other parts of the turbocharger rotor are made of high-strength metal, the brazing material will have a buffering effect, reduce residual stress, and prevent corrosive gases such as high-temperature exhaust gas from entering the joint interface, making it durable. A highly efficient turbocharger rotor with excellent performance and responsiveness can be obtained.

【図面の簡単な説明】[Brief explanation of the drawing]

第1図(a) 〜(d)および第2図(a) 〜(d)
はそれぞれ本発明の金属・セラミックス接合体の一例を
示す部分断面図、 第3図(a) 、 (b)はそれぞれ本発明の溝部を拡
大して示す部分断面図、 第4図(a) 、 (b)はそれぞれ比較例とした金属
・セラミックス接合体を示す部分断面図、第5側は試験
に使用した曲げ試験装置を示す図、第6図および第7図
はそれぞれ実施例における結果を示すグラフである。 1.11・・・セラミック部材 2,12・・・凸部3
・・・段部        4.13・・・金属部材5
.14・・・凹部 6.15・・・活性金属ろうあるいは活性金属を含有し
ないろう 7.18・・・空間      8.19・・・黒鉛フ
ェルト9・・・凸部の先端表面 20・・・接合端 特許出願人  日本碍子株式会社 第1図 @3図 ′20仔甘鴫 \ノ               \ノーン    
          −ノ第4図 (a) (b) 第5図 手続補正書 平成 元年 4月 4日 特許庁長官   吉  1) 文  毅  殿1、事件
の表示 昭和63年手持願第44211号 2、発明の名称 3、補正をする者 事件との関係 特 許 出 願 人 4、代理人 1、明細書の特許請求の範囲を以下の通りに訂正する。 「2、特許請求の範囲 ■、 セラミック部材に設けた凸部が金属部材に設けた
凹部に挿入されて一体的に接合されている構造の金属・
セラミックス接合体において、 前記金属部材の凹部の内径が凹部開口 部で太き(なるように段部を設け、接合時に前記段部と
セラミック部材の凸部との間の隙間に少なくともろう材
を介在させることを特徴とする金属・セラミックス接合
体。 2、 セラミック部材に設けた凸部が金属部材に設けた
凹部に挿入されて一体的に接合されている構造の金属・
セラミックス接合体において、 前記セラミック部材の凸部接合端近傍 の実質的全周にわたって溝部を設け、少なくとも該溝部
の端と前記金属部材の凹部との間にろう材が介在するよ
うにろう材を該溝部に設けたことを特徴とする金属・セ
ラミックス接合体。 3、前記凸部外里面と前記凹部内1面とでのみ接合し、
前記凸部先端表面と前記凹部底面とは接合しない構造で
ある請求項1または2記載の金属・セラミックス接合体
。」 2、明細書第6頁第2行の「4図」を「3図」に訂正す
る。 3、同第7頁第5行、第8頁第2行、第9頁第17行、
第11頁第9行、第12頁第1行、第13頁第9行、第
16頁第3行及び第14行、第17頁第3行及び第16
行、第18頁第3行、第19頁第20行、第20頁第1
4行、第27頁第6行の「外表面」を「外周面」にそれ
ぞれ訂正する。 4、同第7頁第5〜6行、第8頁第2行、第9頁第17
行、第12頁第2行、第13頁第9〜10行、第16頁
第2行及び第13行、第17頁第2〜3行及び第15〜
16行、第18頁第3行、第19頁第20行、第20頁
第14行、第27頁第6行の「内表面」を「内周面」に
それぞれ訂正する。 5、同第7頁第16〜17行の「凹部との間にろう材が
」を「凹部との間あ゛るいはセラミック部材の凸部と金
属部材の凹部に設けた段部との間にろう材が」に訂正す
る。 6、同第8頁第6行の「接合体」を「接合部」に訂正す
る。 7、同第15頁第19行、第16頁第8行の「凹部5の
内表面」を「凹部5の少なくとも内周面」にそれぞれ訂
正する。 8、同第16頁第11〜12行の「黒鉛フェルト7」を
「黒鉛フェルト8」に訂正する。 9、同第19頁第11行の「ようにを含有しない」を「
ように活性金属を含有しない」に訂正する。 10、同第19頁第17行の「凹部14の内表面」を「
凹部14の少なくとも内周面」に訂正する。 11、同第23頁第4行の「上記凹部2」を「上記凸部
2」に訂正する。 12、図面中、第1図〜第5図を別紙訂正図の通り訂正
する。 代理人弁理士   杉  村  暁  秀外1名 箪3図 (ノ              \ノ第4図 (a) (b) り   2 第5図
Figure 1 (a) to (d) and Figure 2 (a) to (d)
3(a) and 3(b) are partial sectional views showing an enlarged groove portion of the present invention, and FIG. 4(a), (b) is a partial cross-sectional view showing a metal-ceramic bonded body as a comparative example, the fifth side is a view showing the bending test device used in the test, and FIGS. 6 and 7 show the results in the example, respectively. It is a graph. 1.11...Ceramic member 2,12...Convex portion 3
...Stepped portion 4.13...Metal member 5
.. 14... Concavity 6.15... Active metal solder or solder containing no active metal 7.18... Space 8.19... Graphite felt 9... Tip surface of convex part 20... Joining Edge patent applicant: Nippon Insulator Co., Ltd. Figure 1 @ Figure 3 '20 Amazu \No \Non
Figure 4 (a) (b) Figure 5 Procedural amendment April 4, 1989 Director General of the Japan Patent Office Yoshi 1) Moon Yi 1. Indication of the case 1988 Hand-held Application No. 44211 2. Invention Name 3. Relationship with the case of the person making the amendment Patent applicant 4, agent 1, amend the scope of claims in the specification as follows. ``2.Claim ■: A metal member having a structure in which a protrusion provided on a ceramic member is inserted into a recess provided in a metal member and joined integrally.
In the ceramic bonded body, a stepped portion is provided so that the inner diameter of the recessed portion of the metal member is thicker at the opening of the recessed portion, and at least a brazing material is interposed in the gap between the stepped portion and the convex portion of the ceramic member during bonding. 2. A metal/ceramic bonded body having a structure in which a protrusion provided on a ceramic member is inserted into a recess provided in a metal member and integrally joined.
In the ceramic bonded body, a groove is provided over substantially the entire circumference near the joining end of the convex portion of the ceramic member, and a brazing filler metal is applied so that the brazing filler metal is interposed between at least the end of the groove and the recess of the metal member. A metal/ceramic bonded body characterized by being provided in a groove. 3. Joining only the outer surface of the convex portion and one inner surface of the recessed portion,
3. The metal-ceramic bonded body according to claim 1, wherein the top surface of the convex portion and the bottom surface of the concave portion are not bonded to each other. ” 2. “Figure 4” in the second line of page 6 of the specification is corrected to “Figure 3.” 3, page 7, line 5, page 8, line 2, page 9, line 17,
Page 11, line 9, page 12, line 1, page 13, line 9, page 16, lines 3 and 14, page 17, line 3 and 16
line, page 18, line 3, page 19, line 20, page 20, line 1
Correct "outer surface" in line 4 and line 6 on page 27 to "outer peripheral surface." 4, page 7, lines 5-6, page 8, line 2, page 9, line 17
Lines, page 12, line 2, page 13, lines 9-10, page 16, lines 2 and 13, page 17, lines 2-3 and lines 15-
"Inner surface" in line 16, line 3 on page 18, line 20 on page 19, line 14 on page 20, and line 6 on page 27 is corrected to "inner peripheral surface." 5. In the same page 7, lines 16-17, "the brazing material is between the recess" is changed to "between the recess, or between the convex part of the ceramic member and the stepped part provided in the recess of the metal member". Corrected to ``Niwa wood.'' 6. Correct "zygote" in line 6 of page 8 to "junction". 7. Correct "inner surface of recess 5" in line 19 of page 15 and line 8 of page 16 to "at least the inner circumferential surface of recess 5". 8. Correct "graphite felt 7" to "graphite felt 8" in lines 11-12 of page 16. 9. On page 19, line 11 of the same page, change “does not contain” to “
"Contains no active metals." 10, “Inner surface of recess 14” on page 19, line 17 of the same page is changed to “
"At least the inner circumferential surface of the recess 14". 11. Correct "the above-mentioned concave portion 2" in the 4th line of page 23 to "the above-mentioned protrusion 2." 12. In the drawings, Figures 1 to 5 have been corrected as shown in the attached correction figures. Representative Patent Attorney Akatsuki Sugimura Hidegai 1 person Figure 3 (ノ\ノFigure 4 (a) (b) ri 2 Figure 5

Claims (1)

【特許請求の範囲】 1、セラミック部材に設けた凸部が金属部材に設けた凹
部に挿入されて一体的に接合されている構造の金属・セ
ラミックス接合体において、 前記金属部材の凹部の内径が凹部開口部で 大きくなるように段部を設け、接合時に前記段部とセラ
ミック部材の凸部との間の隙間に少なくともろう材を介
在させることを特徴とする金属・セラミックス接合体。 2、セラミック部材に設けた凸部が金属部材に設けた凹
部に挿入されて一体的に接合されている構造の金属・セ
ラミックス接合体において、 前記セラミック部材の凸部接合端近傍の実 質的全周にわたって溝部を設け、少なくとも該溝部の端
と前記金属部材の凹部との間にろう材が介在するように
ろう材を該溝部に設けたことを特徴とする金属・セラミ
ックス接合体。 3、前記凸部外表面と前記凹部内表面とでのみ接合し、
前記凸部先端表面と前記凹部底面とは接合しない構造で
ある請求項1または2記載の金属・セラミックス接合体
[Scope of Claims] 1. In a metal-ceramic bonded body having a structure in which a convex part provided on a ceramic member is inserted into a recess provided in a metal member and joined together, the inner diameter of the recess of the metal member is 1. A metal-ceramic bonded body, characterized in that a stepped portion is provided so as to be larger at the opening of the recess, and at least a brazing material is interposed in a gap between the stepped portion and a convex portion of a ceramic member during bonding. 2. In a metal-ceramic bonded body having a structure in which a protrusion provided on a ceramic member is inserted into a recess provided in a metal member and joined together, substantially the entire circumference of the ceramic member near the joining end of the protrusion 1. A metal-ceramic bonded body, characterized in that a groove is provided throughout the groove, and a brazing filler metal is provided in the groove so that the brazing filler metal is interposed between at least an end of the groove and a recess of the metal member. 3. Joining only the outer surface of the convex portion and the inner surface of the concave portion,
3. The metal-ceramic bonded body according to claim 1, wherein the top surface of the convex portion and the bottom surface of the concave portion are not bonded to each other.
JP63044211A 1988-02-29 1988-02-29 Metal / ceramic joints Expired - Fee Related JP2572800B2 (en)

Priority Applications (6)

Application Number Priority Date Filing Date Title
JP63044211A JP2572800B2 (en) 1988-02-29 1988-02-29 Metal / ceramic joints
US07/312,667 US5028162A (en) 1988-02-29 1989-02-21 Metal-ceramic joined composite bodies
DE89301814T DE68906692T2 (en) 1988-02-29 1989-02-24 Connection of metal and ceramic bodies.
EP92118285A EP0530854B1 (en) 1988-02-29 1989-02-24 Metal-ceramic composite bodies
EP89301814A EP0333339B1 (en) 1988-02-29 1989-02-24 Metal-ceramic composite bodies
DE68925128T DE68925128T2 (en) 1988-02-29 1989-02-24 Connection of metal and ceramic bodies

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP63044211A JP2572800B2 (en) 1988-02-29 1988-02-29 Metal / ceramic joints

Publications (2)

Publication Number Publication Date
JPH01219072A true JPH01219072A (en) 1989-09-01
JP2572800B2 JP2572800B2 (en) 1997-01-16

Family

ID=12685219

Family Applications (1)

Application Number Title Priority Date Filing Date
JP63044211A Expired - Fee Related JP2572800B2 (en) 1988-02-29 1988-02-29 Metal / ceramic joints

Country Status (1)

Country Link
JP (1) JP2572800B2 (en)

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006037952A (en) * 2004-07-28 2006-02-09 Borgwarner Inc Titanium aluminide impeller and connection of steel shaft to the impeller
JP2007204361A (en) * 2006-01-30 2007-08-16 Hamilton Sundstrand Corp Shaft assembly
JP2009188390A (en) * 2008-01-08 2009-08-20 Ngk Insulators Ltd Bonding structure and semiconductor device manufacturing apparatus
CN101998892A (en) * 2008-02-22 2011-03-30 Gkn烧结金属有限公司 Brazed component and method of forming a brazed joint therein
CN114199298A (en) * 2021-12-20 2022-03-18 浙江亚通焊材有限公司 Temperature and pressure sensor base and base brazing method
CN114199298B (en) * 2021-12-20 2024-09-03 浙江亚通新材料股份有限公司 Temperature and pressure sensor base and base brazing method

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JPS61219767A (en) * 1985-03-25 1986-09-30 日本碍子株式会社 Metal ceramic bonded body
JPS61180137U (en) * 1985-04-27 1986-11-10
JPS6272578A (en) * 1985-09-20 1987-04-03 ザ ギヤレツト コ−ポレ−シヨン Method of connecting ceramic stub shaft to metal shaft and rotor shaft device thereby
JPS632743U (en) * 1986-06-19 1988-01-09

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61219767A (en) * 1985-03-25 1986-09-30 日本碍子株式会社 Metal ceramic bonded body
JPS61180137U (en) * 1985-04-27 1986-11-10
JPS6272578A (en) * 1985-09-20 1987-04-03 ザ ギヤレツト コ−ポレ−シヨン Method of connecting ceramic stub shaft to metal shaft and rotor shaft device thereby
JPS632743U (en) * 1986-06-19 1988-01-09

Cited By (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006037952A (en) * 2004-07-28 2006-02-09 Borgwarner Inc Titanium aluminide impeller and connection of steel shaft to the impeller
JP2007204361A (en) * 2006-01-30 2007-08-16 Hamilton Sundstrand Corp Shaft assembly
JP4625035B2 (en) * 2006-01-30 2011-02-02 ハミルトン・サンドストランド・コーポレイション Shaft assembly
JP2009188390A (en) * 2008-01-08 2009-08-20 Ngk Insulators Ltd Bonding structure and semiconductor device manufacturing apparatus
CN101998892A (en) * 2008-02-22 2011-03-30 Gkn烧结金属有限公司 Brazed component and method of forming a brazed joint therein
CN103372727A (en) * 2008-02-22 2013-10-30 Gkn烧结金属有限公司 Brazed component and method of forming a brazed joint therein
CN103372727B (en) * 2008-02-22 2016-08-03 Gkn烧结金属有限公司 Brazing component and the method forming brazing link in brazing component
US10471530B2 (en) 2008-02-22 2019-11-12 Gkn Sinter Metals, Llc Brazed component and method of forming a brazed joint therein
CN114199298A (en) * 2021-12-20 2022-03-18 浙江亚通焊材有限公司 Temperature and pressure sensor base and base brazing method
CN114199298B (en) * 2021-12-20 2024-09-03 浙江亚通新材料股份有限公司 Temperature and pressure sensor base and base brazing method

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