JPH0121109Y2 - - Google Patents

Info

Publication number
JPH0121109Y2
JPH0121109Y2 JP8600182U JP8600182U JPH0121109Y2 JP H0121109 Y2 JPH0121109 Y2 JP H0121109Y2 JP 8600182 U JP8600182 U JP 8600182U JP 8600182 U JP8600182 U JP 8600182U JP H0121109 Y2 JPH0121109 Y2 JP H0121109Y2
Authority
JP
Japan
Prior art keywords
orifice
hole
control spool
spool
flow
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP8600182U
Other languages
English (en)
Japanese (ja)
Other versions
JPS58186967U (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP8600182U priority Critical patent/JPS58186967U/ja
Publication of JPS58186967U publication Critical patent/JPS58186967U/ja
Application granted granted Critical
Publication of JPH0121109Y2 publication Critical patent/JPH0121109Y2/ja
Granted legal-status Critical Current

Links

JP8600182U 1982-06-08 1982-06-08 流量制御装置 Granted JPS58186967U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP8600182U JPS58186967U (ja) 1982-06-08 1982-06-08 流量制御装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP8600182U JPS58186967U (ja) 1982-06-08 1982-06-08 流量制御装置

Publications (2)

Publication Number Publication Date
JPS58186967U JPS58186967U (ja) 1983-12-12
JPH0121109Y2 true JPH0121109Y2 (enEXAMPLES) 1989-06-23

Family

ID=30094839

Family Applications (1)

Application Number Title Priority Date Filing Date
JP8600182U Granted JPS58186967U (ja) 1982-06-08 1982-06-08 流量制御装置

Country Status (1)

Country Link
JP (1) JPS58186967U (enEXAMPLES)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0499979A3 (en) 1991-02-16 1993-06-09 Semiconductor Energy Laboratory Co., Ltd. Electro-optical device
US5289030A (en) 1991-03-06 1994-02-22 Semiconductor Energy Laboratory Co., Ltd. Semiconductor device with oxide layer
JP2845303B2 (ja) 1991-08-23 1999-01-13 株式会社 半導体エネルギー研究所 半導体装置とその作製方法

Also Published As

Publication number Publication date
JPS58186967U (ja) 1983-12-12

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