JPH0120483B2 - - Google Patents

Info

Publication number
JPH0120483B2
JPH0120483B2 JP55170996A JP17099680A JPH0120483B2 JP H0120483 B2 JPH0120483 B2 JP H0120483B2 JP 55170996 A JP55170996 A JP 55170996A JP 17099680 A JP17099680 A JP 17099680A JP H0120483 B2 JPH0120483 B2 JP H0120483B2
Authority
JP
Japan
Prior art keywords
light
disk
lens
disk surface
defects
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP55170996A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5794903A (en
Inventor
Mitsuo Sato
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP55170996A priority Critical patent/JPS5794903A/ja
Publication of JPS5794903A publication Critical patent/JPS5794903A/ja
Publication of JPH0120483B2 publication Critical patent/JPH0120483B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
  • Optical Record Carriers And Manufacture Thereof (AREA)
  • Manufacturing Optical Record Carriers (AREA)
JP55170996A 1980-12-05 1980-12-05 Defect detector for disk surface Granted JPS5794903A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP55170996A JPS5794903A (en) 1980-12-05 1980-12-05 Defect detector for disk surface

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP55170996A JPS5794903A (en) 1980-12-05 1980-12-05 Defect detector for disk surface

Publications (2)

Publication Number Publication Date
JPS5794903A JPS5794903A (en) 1982-06-12
JPH0120483B2 true JPH0120483B2 (enrdf_load_stackoverflow) 1989-04-17

Family

ID=15915177

Family Applications (1)

Application Number Title Priority Date Filing Date
JP55170996A Granted JPS5794903A (en) 1980-12-05 1980-12-05 Defect detector for disk surface

Country Status (1)

Country Link
JP (1) JPS5794903A (enrdf_load_stackoverflow)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63244746A (ja) * 1987-03-31 1988-10-12 Tokai Rika Co Ltd 樹脂封止装置
JPH0492239A (ja) * 1990-08-06 1992-03-25 Excel:Kk ビデオカセット等のテープの傷検知方法並びにそれに用いる装置
JP5532792B2 (ja) * 2009-09-28 2014-06-25 富士通株式会社 表面検査装置及び表面検査方法

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5414789A (en) * 1977-07-05 1979-02-03 Mitsubishi Electric Corp Surface inspecting apparatus

Also Published As

Publication number Publication date
JPS5794903A (en) 1982-06-12

Similar Documents

Publication Publication Date Title
US4954723A (en) Disk surface inspection method and apparatus therefor
US5389794A (en) Surface pit and mound detection and discrimination system and method
JPS6367549A (ja) 光ディスク用レジスト原盤の欠陥検査及び膜厚測定装置
US5719840A (en) Optical sensor with an elliptical illumination spot
JP2999712B2 (ja) 端部欠陥検査方法とその装置
US6078385A (en) Method of inspecting magnetic disc and apparatus therefor and process for producing the magnetic disc
US5155372A (en) Optical inspection system utilizing wedge shaped spatial filter
JP5308212B2 (ja) ディスク表面欠陥検査方法及び装置
US4352564A (en) Missing order defect detection apparatus
JPH09257720A (ja) 欠陥検査方法とその装置
JPH0120483B2 (enrdf_load_stackoverflow)
JPH0833354B2 (ja) 欠陥検査装置
JP3452486B2 (ja) 圧延材の表面欠陥検出方法および装置
JP4307343B2 (ja) 光ディスク検査方法および装置
JPH0254494B2 (enrdf_load_stackoverflow)
JPH0228815B2 (enrdf_load_stackoverflow)
JPH0431748A (ja) 透明板状体の欠点検査方法
JPH10227744A (ja) 記録ディスクの光学的検査方法
JPH07286967A (ja) 光ディスクの検査方法と検査装置
JPS6180009A (ja) 磁気デイスクの表面欠陥検査方法および装置
US20120320367A1 (en) Inspection method and device for same
JPS59193561A (ja) 光学式デイスクの欠陥検査方法
JPH0315962B2 (enrdf_load_stackoverflow)
JPS63153454A (ja) 光デイスク透明円板の欠陥検査装置
JPH05149887A (ja) 光デイスク用欠陥検出方法及びその装置