JPH01204337A - X-ray tubular bulb capable of changing over between point focus and line focus - Google Patents

X-ray tubular bulb capable of changing over between point focus and line focus

Info

Publication number
JPH01204337A
JPH01204337A JP2670588A JP2670588A JPH01204337A JP H01204337 A JPH01204337 A JP H01204337A JP 2670588 A JP2670588 A JP 2670588A JP 2670588 A JP2670588 A JP 2670588A JP H01204337 A JPH01204337 A JP H01204337A
Authority
JP
Japan
Prior art keywords
focus
electron gun
target
line
ray tube
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2670588A
Other languages
Japanese (ja)
Other versions
JP2827121B2 (en
Inventor
Katsumi Tsukamoto
塚本 勝美
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
RIGAKU DENKI KK
Rigaku Denki Co Ltd
Original Assignee
RIGAKU DENKI KK
Rigaku Denki Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by RIGAKU DENKI KK, Rigaku Denki Co Ltd filed Critical RIGAKU DENKI KK
Priority to JP63026705A priority Critical patent/JP2827121B2/en
Publication of JPH01204337A publication Critical patent/JPH01204337A/en
Application granted granted Critical
Publication of JP2827121B2 publication Critical patent/JP2827121B2/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Abstract

PURPOSE:To make it possible to allow switch-over between point focus and line focus only with an electron gun rotated by 90 deg. by forming the cooling water injection opening of a target into a cross shape, and thereby mounting the electron gun rotatably. CONSTITUTION:The cooling water injection opening 26 of the back side of a target face 28 to which electron beams are struck is formed into a cross shape, and an electron gun is rotatably mounted onto a vacuum container. The target face 25 is sufficiently cooled by the injection opening 26 in the range of the cross shape. Electron beams 34 emitted from a filament 32 are struck against the target face 28 in a form of a line extending to the vertical direction so that X-rays 38 of line focus are obtained. When the electron gun 16 is rotated clockwise by 90 deg., the filament 32 is rotated clockwise by 90 deg. so as to let the election beams 34 emitted form a line extending to the horizontal direction so that X-rays of point focus may be obtained. By this constitution, a X-ray tubular bulb 10 can be obtained, which makes it possible to allow switch-over between point focus and line focus in the same direction in a simple manner.

Description

【発明の詳細な説明】 [産業上の利用分野] 本発明は、水冷式のターゲットを有するX線管球に関し
、特に点焦点と線焦点を切り換え可能にしたX線管球に
関する。
DETAILED DESCRIPTION OF THE INVENTION [Field of Industrial Application] The present invention relates to an X-ray tube having a water-cooled target, and more particularly to an X-ray tube capable of switching between a point focus and a line focus.

[従来の技術] X線管球では、電子銃からの電子線をターゲットに線状
に当ててX線を発生させている。したがって、X線の発
生部分は線状になる。そして、この線状のX線をX線管
球から取り出す方向によって、点焦点または線焦点のX
線源として利用している。
[Prior Art] In an X-ray tube, an electron beam from an electron gun is applied linearly to a target to generate X-rays. Therefore, the portion where X-rays are generated becomes linear. Then, depending on the direction in which this linear X-ray is extracted from the X-ray tube, the
It is used as a radiation source.

X線を利用した分析装置などにおいては、使用目的によ
って点焦点と線焦点とを使い分ける必要があり、もし1
台のX線管球でこれらを使い分けることができれば便利
である。従来は、X線管球からのX線の取り出し方向に
よってこれらを使い分けている。
In analytical devices that use X-rays, it is necessary to use point focus and line focus depending on the purpose of use.
It would be convenient if the X-ray tube on the stand could be used for different purposes. Conventionally, these are used depending on the direction in which the X-rays are extracted from the X-ray tube.

[発明が解決しようとする課題] もし、特定の一つの方向において点焦点と線焦点とを切
り替えようとすれば、封入式のX線管球にあっては、管
球全体を90度だけ回転してセツティングをし直すこと
になり、一方、開放式のX線管球にあっては、真空を大
気に戻してターゲットや電子銃の取り付は角度を変更す
ることになり、どちらの場合も手間がかかる。後者の場
合は、原理的には、電子銃の取り付は角度を変更するだ
けで切替可能であるが、ターゲット裏面の冷却水の噴出
口の形状が電子の当たる領域に対応して線状になってい
るため、ターゲットの取り付は角度をも変更しなければ
ならないという事情がある。
[Problem to be solved by the invention] If you want to switch between a point focus and a line focus in one specific direction, in an enclosed X-ray tube, you have to rotate the entire tube by 90 degrees. On the other hand, in the case of an open-type X-ray tube, the vacuum must be returned to the atmosphere and the mounting angle of the target and electron gun must be changed. It's also time consuming. In the latter case, in principle, the mounting of the electron gun can be switched simply by changing the angle, but the shape of the cooling water spout on the back of the target is linear in accordance with the area hit by the electrons. Because of this, the angle at which the target is mounted must also be changed.

以上の点に鑑み、本発明の目的は、非常に簡単な操作で
、同一方向において点焦点とX線焦点とを切替可能にし
たX線管球を提供することにある。
In view of the above points, an object of the present invention is to provide an X-ray tube that can switch between a point focus and an X-ray focus in the same direction with a very simple operation.

[課題を解決するための手段] 以上の目的を達成するため、請求項1の発明に係るX線
管球では、電子線の当るターゲット面の裏側の冷却水噴
出口の形状を十字形とし、電子銃を真空容器に対して回
転可能に取り付けたことを特徴とする。
[Means for Solving the Problems] In order to achieve the above object, in the X-ray tube according to the invention of claim 1, the shape of the cooling water spout on the back side of the target surface that is hit by the electron beam is cross-shaped, It is characterized in that the electron gun is rotatably attached to the vacuum vessel.

また、請求項2の発明に係るX線管球では、電子線の当
たるターゲット面の裏側の冷却水噴出口の形状を十字形
とし、電子銃からターゲットに向かう電子線の進行方向
を変更させる電磁レンズを真空容器に設け、この電磁レ
ンズに流す電流の極性を切替可能としたことを特徴とす
る。
Further, in the X-ray tube according to the invention of claim 2, the shape of the cooling water spout on the back side of the target surface that is hit by the electron beam is cross-shaped, and the electromagnetic wave that changes the traveling direction of the electron beam from the electron gun toward the target is provided. A lens is provided in a vacuum container, and the polarity of the current flowing through the electromagnetic lens is switchable.

[作用] 請求項1の発明では、電子銃を真空容器に対して90度
回転させれば、ターゲット面上の線状の電子線照射領域
が90度回転して、点焦点を線焦点に、あるいはその逆
に、切替可能となる。そして、ターゲット裏面の冷却水
噴出口が十字形となっているため、ターゲット面上の線
状の電子線照射領域が90度回転しても、電子線照射領
域は常に冷却水で十分に冷却されることになる。すなわ
ち、ターゲットは固定したままで済む。
[Function] In the invention of claim 1, when the electron gun is rotated by 90 degrees with respect to the vacuum vessel, the linear electron beam irradiation area on the target surface is rotated by 90 degrees, and the point focus becomes a line focus. Or vice versa, it becomes possible to switch. Since the cooling water spout on the back side of the target is cross-shaped, even if the linear electron beam irradiation area on the target surface rotates 90 degrees, the electron beam irradiation area will always be sufficiently cooled by the cooling water. That will happen. In other words, the target remains fixed.

請求項2の発明では、電子銃を回転させるのに代えて、
電子銃からターゲットに向かう電子線の進行方向を変更
させている。すなわち、電子銃も固定したままで良い。
In the invention of claim 2, instead of rotating the electron gun,
The direction of the electron beam from the electron gun toward the target is changed. In other words, the electron gun can also remain fixed.

電磁レンズに流す電流の極性を切り替えることにより、
ターゲット面上の線状の電子線照射領域が90度回転す
ることになる。
By switching the polarity of the current flowing through the electromagnetic lens,
The linear electron beam irradiation area on the target surface is rotated by 90 degrees.

ターゲット裏面の冷却水噴出口の形状は請求項1の発明
と同じであり、ターゲットは同様に冷却される。
The shape of the cooling water spout on the back surface of the target is the same as that of the first aspect of the invention, and the target is similarly cooled.

し実施例] 次に、図面を参照して本発明の詳細な説明する。Examples] Next, the present invention will be described in detail with reference to the drawings.

第1図は請求項1の発明の一実施例の一部断面正面図で
ある。このX線管球10は、開放式であり、真空容器1
2の内部に、ターゲット14と電子銃16を含む。電子
銃16は、O(オー)リング18によって真空封止され
、゛軸受20によって真空容器12に回転可能に取り付
けられている。
FIG. 1 is a partially sectional front view of an embodiment of the invention according to claim 1. This X-ray tube 10 is an open type, and the vacuum container 1
2 includes a target 14 and an electron gun 16. The electron gun 16 is vacuum-sealed by an O-ring 18 and rotatably attached to the vacuum container 12 by a bearing 20.

なお、0リング18は、他のシール手段たとえば磁性流
体を利用したシール手段に変更することもできる。
Note that the O-ring 18 may be replaced with other sealing means, such as a sealing means using magnetic fluid.

ターゲット14は、第2図に示すように、水冷式となっ
ている。冷却水22は、ターゲット14の内側通路24
を通過して、噴出口26から勢い良く噴出し、電子線の
当たるターゲット面28の裏側を冷却する。その後、冷
却水は外側通路30を通って排出される。噴出口26は
、第3図に示すように、十字形になっており、ターゲッ
ト面28を十字形の範囲で十分に冷却する。
As shown in FIG. 2, the target 14 is water-cooled. The cooling water 22 flows through the inner passage 24 of the target 14.
The electron beam passes through and is vigorously ejected from the ejection port 26, cooling the back side of the target surface 28 that is hit by the electron beam. The cooling water is then discharged through the outer passage 30. The jet nozzle 26 is cross-shaped as shown in FIG. 3, and sufficiently cools the target surface 28 within the cross-shaped area.

次に、このX線管球の使用方法を説明する。まず、第4
図に示すように、フィラメント32が鉛直方向になるよ
うに電子銃が設定されていると仮定する。この場合、フ
ィラメント32から発射される電子線34は、鉛直方向
に延びたラインとなって、ターゲット面28に当たり、
第4図の左手前方向には線状のX線ビーム36が出てく
る。すなわち、線焦点のX線3Bが得られる。ターゲッ
ト面28上に描いた破線は、その裏面にある冷却水噴出
口26の位置を示す。
Next, how to use this X-ray tube will be explained. First, the fourth
Assume that the electron gun is set so that the filament 32 is oriented vertically, as shown in the figure. In this case, the electron beam 34 emitted from the filament 32 becomes a line extending in the vertical direction and hits the target surface 28,
A linear X-ray beam 36 emerges in the front left direction of FIG. That is, X-rays 3B with a line focus are obtained. A broken line drawn on the target surface 28 indicates the position of the cooling water spout 26 on the back surface thereof.

次に、第1図の右方向から見て電子銃16を時計方向に
90度回転させると、第4図においてフィラメント32
が時計方向に90度回転し、第5図の状態になる。この
状態では、フィラメント32から発射される電子線34
は水平方向に延びるラインとなり、その結果、第5図の
左手前方向には点焦点のX線40が得られる。
Next, when the electron gun 16 is rotated 90 degrees clockwise when viewed from the right side in FIG. 1, the filament 32 in FIG.
is rotated 90 degrees clockwise, resulting in the state shown in Figure 5. In this state, the electron beam 34 emitted from the filament 32
becomes a line extending in the horizontal direction, and as a result, a point focused X-ray 40 is obtained in the front left direction in FIG.

第6図は請求項2の発明の一実施例の一部断面正面図で
ある。このX線管球50は、真空容器12の内部にター
ゲット14と電子銃16を含む。
FIG. 6 is a partially sectional front view of an embodiment of the invention according to claim 2. This X-ray tube 50 includes a target 14 and an electron gun 16 inside a vacuum vessel 12.

この管球は、機械的可動部分が無く、封入式でも開放式
でも良い。電子銃16は真空容器12に固定されている
。電子銃16のフィラメント32は、第7図に示すよう
に、鉛直方向から45度傾いた状態で固定されている。
This tube has no mechanically moving parts and may be of the enclosed or open type. The electron gun 16 is fixed to the vacuum container 12. As shown in FIG. 7, the filament 32 of the electron gun 16 is fixed at an angle of 45 degrees from the vertical direction.

第6図に戻って、真空容器12の外側には、電磁レンズ
52が設けられている。電磁レンズ52は、鉄などの強
磁性体材料54で周囲を覆われたコイル56によって形
成されている。強磁性体材料54の一部は開口していて
、この近傍に磁場5Bが形成される。この磁場58が電
子線に影響を与えることになる。
Returning to FIG. 6, an electromagnetic lens 52 is provided on the outside of the vacuum container 12. The electromagnetic lens 52 is formed by a coil 56 surrounded by a ferromagnetic material 54 such as iron. A part of the ferromagnetic material 54 is open, and a magnetic field 5B is formed in the vicinity thereof. This magnetic field 58 will affect the electron beam.

電磁レンズ52のコイル56は、電源60に接続され、
コイル56に流れる電流の極性は、切替スイッチ62に
よって切り替えられる。すなわち、2極双投形の切替ス
イッチ62を、第6図の右側または左側に倒すことによ
って、電流の極性を切り替えることができる。
The coil 56 of the electromagnetic lens 52 is connected to a power source 60,
The polarity of the current flowing through the coil 56 is switched by a changeover switch 62. That is, the polarity of the current can be switched by tilting the two-pole, double-throw changeover switch 62 to the right or left side in FIG. 6.

このX線管球50のターゲット14は、第2図と第3図
に示すのと同じ冷却構造をしている。
The target 14 of this X-ray tube 50 has the same cooling structure as shown in FIGS. 2 and 3.

次に、このX線管球50の使用方法を説明する。Next, how to use this X-ray tube 50 will be explained.

まず、切替スイッチ62が第6図の左側に倒れていると
仮定する。この場合、第7図において、電子銃16のフ
ィラメント32から発射された電子線34は、最初は鉛
直方向に対して45度傾いたラインとなって進むが、電
磁レンズの磁場の影響によって、矢印64の方向に全体
が回転し、ターゲット面28に当たるときは鉛直状態と
なる。したがって、このときは、第7図の左手前方向に
線焦点のX線38が得られる。
First, assume that the changeover switch 62 is tilted to the left in FIG. In this case, in FIG. 7, the electron beam 34 emitted from the filament 32 of the electron gun 16 initially travels in a line inclined at 45 degrees with respect to the vertical direction, but due to the influence of the magnetic field of the electromagnetic lens, The whole body rotates in the direction 64, and when it hits the target surface 28, it is in a vertical state. Therefore, at this time, an X-ray 38 with a line focus in the front left direction in FIG. 7 is obtained.

次に、第6図の切替スイッチ62を右側に倒すと、電磁
レンズ52のコイル56に流れる電流の極性が切り替わ
り、磁場58は逆転する。すると、第8図において、電
子線34は今度は矢印64の方向に全体として45度回
転・してターゲット面28に当たる。その結果、点焦点
のX線40が得られる。
Next, when the changeover switch 62 in FIG. 6 is turned to the right, the polarity of the current flowing through the coil 56 of the electromagnetic lens 52 is switched, and the magnetic field 58 is reversed. Then, in FIG. 8, the electron beam 34 is now rotated a total of 45 degrees in the direction of the arrow 64 and hits the target surface 28. As a result, point focused X-rays 40 are obtained.

第7図と第8図のいずれの場合も、ターゲット面28は
十字形の噴出口26から噴出される冷却水によって十分
に冷却される。
In both cases of FIG. 7 and FIG. 8, the target surface 28 is sufficiently cooled by the cooling water jetted from the cross-shaped spout 26.

なお、電子銃からターゲットに至る電子ビームの回転角
度は、電磁レンズからターゲット面までの距離、電磁レ
ンズによる磁場の強さ、電子の加速電圧によって定まり
、これらを適当に選択することによって、電子ビームを
45°だけ回転させることができる。本実施例では、電
磁レンズによる磁場の中心からターゲラ”ト面までの距
離が130mm、電磁レンズの内径が34mm、電磁レ
ンズのアンペアターンが920〜950アンペアターン
、X線管球の印加電圧が50kVのとき、電子ビームが
45°だけ回、転している。
The rotation angle of the electron beam from the electron gun to the target is determined by the distance from the electromagnetic lens to the target surface, the strength of the magnetic field by the electromagnetic lens, and the electron acceleration voltage. can be rotated by 45°. In this example, the distance from the center of the magnetic field by the electromagnetic lens to the target surface is 130 mm, the inner diameter of the electromagnetic lens is 34 mm, the ampere turns of the electromagnetic lens are 920 to 950 ampere turns, and the voltage applied to the X-ray tube is 50 kV. When , the electron beam is rotated by 45°.

[発明の効果] 請求項1の発明は、ターゲットの冷却水噴出口を十字形
にすると共に、電子銃を回転可能に取り付けたことによ
り、電子銃を90度回転させるだけで、点焦点と線焦点
を切り替えることができるという効果がある。
[Effects of the Invention] According to the invention of claim 1, the cooling water spout of the target is made into a cross shape, and the electron gun is rotatably attached, so that by simply rotating the electron gun 90 degrees, a point focus and a line can be created. It has the effect of being able to switch focus.

請求項2の発明は、ターゲットの冷却水噴出口を十字形
にすると共に、電磁レンズに流す電流の極性を切替可能
にしたことにより、ターゲットおよび電子銃を何ら動か
すこと無く、電磁レンズの電気回路のスイッチ操作だけ
で、点焦点と線焦点を切り替えることができるという効
果がある。
According to the second aspect of the invention, the cooling water spout of the target is shaped like a cross, and the polarity of the current flowing through the electromagnetic lens is switchable, so that the electric circuit of the electromagnetic lens can be changed without moving the target or the electron gun. The effect is that you can switch between a point focus and a line focus simply by operating the switch.

【図面の簡単な説明】[Brief explanation of the drawing]

第1図は請求項1の発明の一実施例の一部断面正面図、 第2図はターゲットの縦断面図、 第3図は第2図の■−■線に沿う横断面図、第4図は電
子線およびX線の軌跡を示す斜視図、第5図は別の動作
状態を示す第4図と同様の斜視図、 第6図は請求項2の発明の一実施例の一部断面正面図、 第7図および第8図は第4図および第5図と同様の斜視
図である。 10・・・X線管球 12・・・真空容器 14・・・ターグツド 16・・・電子銃 20・・・軸受 26・・・冷却水噴出口 38・・・線焦点のX線 40・・・点焦点のX線 52・・・電磁レンズ 62・・・切替スイッチ
Fig. 1 is a partially sectional front view of an embodiment of the invention of claim 1, Fig. 2 is a vertical sectional view of the target, Fig. 3 is a transverse sectional view taken along the line ■-■ in Fig. 2, and Fig. The figure is a perspective view showing the trajectory of electron beams and X-rays, FIG. 5 is a perspective view similar to FIG. 4 showing another operating state, and FIG. 6 is a partial cross section of an embodiment of the invention of claim 2. The front view, FIGS. 7 and 8 are perspective views similar to FIGS. 4 and 5. 10...X-ray tube 12...Vacuum vessel 14...Target 16...Electron gun 20...Bearing 26...Cooling water spout 38...X-ray focal point 40...・Point focused X-ray 52...Electromagnetic lens 62...Switch switch

Claims (2)

【特許請求の範囲】[Claims] (1)真空容器の内部に電子銃と水冷式のターゲットと
を含むX線管球において、電子線の当たるターゲット面
の裏側の冷却水噴出口の形状を十字形とし、前記電子銃
を前記真空容器に対して回転可能に取り付けたことを特
徴とする、点焦点と線焦点を切替可能なX線管球。
(1) In an X-ray tube that includes an electron gun and a water-cooled target inside a vacuum vessel, the shape of the cooling water spout on the back side of the target surface that is hit by the electron beam is cross-shaped, and the electron gun is An X-ray tube capable of switching between a point focus and a line focus, characterized in that it is rotatably attached to a container.
(2)真空容器の内部に電子銃と水冷式のターゲットと
を含むX線管球において、電子線の当たるターゲット面
の裏側の冷却水噴出口の形状を十字形とし、前記電子銃
からターゲットに向かう電子線の進行方向を変更させる
電磁レンズを前記真空容器に設け、前記電磁レンズに流
す電流の極性を切替可能としたことを特徴とする、点焦
点と線焦点を切替可能なX線管球。
(2) In an X-ray tube that includes an electron gun and a water-cooled target inside a vacuum vessel, the shape of the cooling water spout on the back side of the target surface that is hit by the electron beam is cross-shaped, and the An X-ray tube capable of switching between a point focus and a line focus, characterized in that an electromagnetic lens for changing the traveling direction of the electron beam toward the vacuum vessel is provided, and the polarity of the current flowing through the electromagnetic lens can be switched. .
JP63026705A 1988-02-09 1988-02-09 X-ray tube with switchable point focus and line focus Expired - Lifetime JP2827121B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP63026705A JP2827121B2 (en) 1988-02-09 1988-02-09 X-ray tube with switchable point focus and line focus

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP63026705A JP2827121B2 (en) 1988-02-09 1988-02-09 X-ray tube with switchable point focus and line focus

Publications (2)

Publication Number Publication Date
JPH01204337A true JPH01204337A (en) 1989-08-16
JP2827121B2 JP2827121B2 (en) 1998-11-18

Family

ID=12200800

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Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5515414A (en) * 1993-07-05 1996-05-07 U.S. Philips Corporation X-ray diffraction device comprising cooling medium connections provided on the X-ray tube
EP1732101A1 (en) * 2005-04-21 2006-12-13 Bruker AXS, Inc. Multiple-position x-ray tube for diffractometer
WO2017038302A1 (en) * 2015-08-31 2017-03-09 ブルカー・エイエックスエス株式会社 X-ray generation device and method, and sample measurement system

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6139351A (en) * 1984-07-30 1986-02-25 Mitsubishi Heavy Ind Ltd X-ray generating system
JPS62188149A (en) * 1986-02-14 1987-08-17 Hitachi Ltd Radiation device

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6139351A (en) * 1984-07-30 1986-02-25 Mitsubishi Heavy Ind Ltd X-ray generating system
JPS62188149A (en) * 1986-02-14 1987-08-17 Hitachi Ltd Radiation device

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5515414A (en) * 1993-07-05 1996-05-07 U.S. Philips Corporation X-ray diffraction device comprising cooling medium connections provided on the X-ray tube
EP1732101A1 (en) * 2005-04-21 2006-12-13 Bruker AXS, Inc. Multiple-position x-ray tube for diffractometer
US7248672B2 (en) 2005-04-21 2007-07-24 Bruker Axs, Inc. Multiple-position x-ray tube for diffractometer
WO2017038302A1 (en) * 2015-08-31 2017-03-09 ブルカー・エイエックスエス株式会社 X-ray generation device and method, and sample measurement system
KR20180042328A (en) * 2015-08-31 2018-04-25 브루커 제팬 가부시키가이샤 X-ray generator and method, and sample measurement system

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