JPH01180190U - - Google Patents

Info

Publication number
JPH01180190U
JPH01180190U JP7404888U JP7404888U JPH01180190U JP H01180190 U JPH01180190 U JP H01180190U JP 7404888 U JP7404888 U JP 7404888U JP 7404888 U JP7404888 U JP 7404888U JP H01180190 U JPH01180190 U JP H01180190U
Authority
JP
Japan
Prior art keywords
thin film
adsorption plate
protective layer
support layer
electrode
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP7404888U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP7404888U priority Critical patent/JPH01180190U/ja
Publication of JPH01180190U publication Critical patent/JPH01180190U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Jigs For Machine Tools (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
JP7404888U 1988-06-03 1988-06-03 Pending JPH01180190U (US07413550-20080819-C00001.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP7404888U JPH01180190U (US07413550-20080819-C00001.png) 1988-06-03 1988-06-03

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7404888U JPH01180190U (US07413550-20080819-C00001.png) 1988-06-03 1988-06-03

Publications (1)

Publication Number Publication Date
JPH01180190U true JPH01180190U (US07413550-20080819-C00001.png) 1989-12-25

Family

ID=31299168

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7404888U Pending JPH01180190U (US07413550-20080819-C00001.png) 1988-06-03 1988-06-03

Country Status (1)

Country Link
JP (1) JPH01180190U (US07413550-20080819-C00001.png)

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62177818A (ja) * 1985-11-27 1987-08-04 イング・チイ・オリベツチ・アンド・チイ・エス・ピ−・ア 多層静電容量式膜型鍵盤

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62177818A (ja) * 1985-11-27 1987-08-04 イング・チイ・オリベツチ・アンド・チイ・エス・ピ−・ア 多層静電容量式膜型鍵盤

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