JPH01179439U - - Google Patents

Info

Publication number

JPH01179439U

JPH01179439U JP7553288U JP7553288U JPH01179439U JP H01179439 U JPH01179439 U JP H01179439U JP 7553288 U JP7553288 U JP 7553288U JP 7553288 U JP7553288 U JP 7553288U JP H01179439 U JPH01179439 U JP H01179439U

Authority

JP

Japan

Prior art keywords

conductor

polycrystalline silicon

electrode

semiconductor chip

electrode extraction

Prior art date

1988-06-06

Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)

Pending

Links

• Espacenet
• Global Dossier
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• 239000004020 conductor Substances 0.000 claims description 8
• 239000004065 semiconductor Substances 0.000 claims description 8
• 229910021420 polycrystalline silicon Inorganic materials 0.000 claims description 4
• 239000012212 insulator Substances 0.000 claims description 3
• 239000000758 substrate Substances 0.000 claims description 3
• 238000000605 extraction Methods 0.000 claims 2
• XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical group [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims 1
• 238000001514 detection method Methods 0.000 claims 1