JPH01179182U - - Google Patents

Info

Publication number
JPH01179182U
JPH01179182U JP1819088U JP1819088U JPH01179182U JP H01179182 U JPH01179182 U JP H01179182U JP 1819088 U JP1819088 U JP 1819088U JP 1819088 U JP1819088 U JP 1819088U JP H01179182 U JPH01179182 U JP H01179182U
Authority
JP
Japan
Prior art keywords
adsorbent
cryopumps
compressors
outlet
replacing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP1819088U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1819088U priority Critical patent/JPH01179182U/ja
Publication of JPH01179182U publication Critical patent/JPH01179182U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Compressor (AREA)
  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
JP1819088U 1988-02-16 1988-02-16 Pending JPH01179182U (US20030199744A1-20031023-C00003.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1819088U JPH01179182U (US20030199744A1-20031023-C00003.png) 1988-02-16 1988-02-16

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1819088U JPH01179182U (US20030199744A1-20031023-C00003.png) 1988-02-16 1988-02-16

Publications (1)

Publication Number Publication Date
JPH01179182U true JPH01179182U (US20030199744A1-20031023-C00003.png) 1989-12-22

Family

ID=31232610

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1819088U Pending JPH01179182U (US20030199744A1-20031023-C00003.png) 1988-02-16 1988-02-16

Country Status (1)

Country Link
JP (1) JPH01179182U (US20030199744A1-20031023-C00003.png)

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4924487A (US20030199744A1-20031023-C00003.png) * 1972-06-30 1974-03-04
JPS54153314A (en) * 1978-05-24 1979-12-03 Ulvac Corp Regenerative apparatus for cryopump
JPS6240143U (US20030199744A1-20031023-C00003.png) * 1985-08-29 1987-03-10

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4924487A (US20030199744A1-20031023-C00003.png) * 1972-06-30 1974-03-04
JPS54153314A (en) * 1978-05-24 1979-12-03 Ulvac Corp Regenerative apparatus for cryopump
JPS6240143U (US20030199744A1-20031023-C00003.png) * 1985-08-29 1987-03-10

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