JPH01176069A - 蒸着フィルム - Google Patents

蒸着フィルム

Info

Publication number
JPH01176069A
JPH01176069A JP33614787A JP33614787A JPH01176069A JP H01176069 A JPH01176069 A JP H01176069A JP 33614787 A JP33614787 A JP 33614787A JP 33614787 A JP33614787 A JP 33614787A JP H01176069 A JPH01176069 A JP H01176069A
Authority
JP
Japan
Prior art keywords
vapor
vapor deposition
deposited
film
silicon
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP33614787A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0573825B2 (enrdf_load_stackoverflow
Inventor
Atsushi Hirokawa
広川　敦
Kunihiko Ozaki
邦彦 尾崎
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Artience Co Ltd
Original Assignee
Toyo Ink Mfg Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toyo Ink Mfg Co Ltd filed Critical Toyo Ink Mfg Co Ltd
Priority to JP33614787A priority Critical patent/JPH01176069A/ja
Publication of JPH01176069A publication Critical patent/JPH01176069A/ja
Publication of JPH0573825B2 publication Critical patent/JPH0573825B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Laminated Bodies (AREA)
  • Physical Vapour Deposition (AREA)
JP33614787A 1987-12-29 1987-12-29 蒸着フィルム Granted JPH01176069A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP33614787A JPH01176069A (ja) 1987-12-29 1987-12-29 蒸着フィルム

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP33614787A JPH01176069A (ja) 1987-12-29 1987-12-29 蒸着フィルム

Publications (2)

Publication Number Publication Date
JPH01176069A true JPH01176069A (ja) 1989-07-12
JPH0573825B2 JPH0573825B2 (enrdf_load_stackoverflow) 1993-10-15

Family

ID=18296176

Family Applications (1)

Application Number Title Priority Date Filing Date
JP33614787A Granted JPH01176069A (ja) 1987-12-29 1987-12-29 蒸着フィルム

Country Status (1)

Country Link
JP (1) JPH01176069A (enrdf_load_stackoverflow)

Cited By (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH04226343A (ja) * 1990-04-20 1992-08-17 E I Du Pont De Nemours & Co 包装用障壁材料
WO1994019506A1 (de) * 1993-02-25 1994-09-01 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Im vakuum aufgedampte barriereschichten für die verpackungsindustrie und aufdampfgut für ihre herstellung
JPH06312478A (ja) * 1993-04-30 1994-11-08 Toppan Printing Co Ltd 脱酸素剤用包装体
US5725958A (en) * 1991-12-26 1998-03-10 Toyo Boseki Kabushiki Kaisha Gas barrier film
JP2010143091A (ja) * 2008-12-19 2010-07-01 Dainippon Printing Co Ltd ガスバリア性シート、ガスバリア性シートの製造方法、及び製品
JP2013057111A (ja) * 2011-09-09 2013-03-28 Toppan Printing Co Ltd 蒸着用材料、ガスバリア性蒸着フィルム及び該蒸着フィルムの製造方法
JP2014069389A (ja) * 2012-09-28 2014-04-21 Toppan Printing Co Ltd ガスバリア積層フィルム
JP2014188884A (ja) * 2013-03-27 2014-10-06 Toppan Printing Co Ltd ガスバリア積層フィルム

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS54152089A (en) * 1978-05-20 1979-11-29 Toyobo Co Ltd Metallized polyester film
JPS5523904A (en) * 1978-08-07 1980-02-20 Mizushima Shokuhin Kk Prearation of bean curd and devilsigma tongue (tofu and konjak)
JPS60219042A (ja) * 1984-04-13 1985-11-01 積水化学工業株式会社 耐透湿性透明合成樹脂体
JPS6151333A (ja) * 1984-08-20 1986-03-13 積水化学工業株式会社 耐透湿性を有する透明合成樹脂体
JPS6151332A (ja) * 1984-08-20 1986-03-13 積水化学工業株式会社 耐透湿性を有する透明合成樹脂体

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS54152089A (en) * 1978-05-20 1979-11-29 Toyobo Co Ltd Metallized polyester film
JPS5523904A (en) * 1978-08-07 1980-02-20 Mizushima Shokuhin Kk Prearation of bean curd and devilsigma tongue (tofu and konjak)
JPS60219042A (ja) * 1984-04-13 1985-11-01 積水化学工業株式会社 耐透湿性透明合成樹脂体
JPS6151333A (ja) * 1984-08-20 1986-03-13 積水化学工業株式会社 耐透湿性を有する透明合成樹脂体
JPS6151332A (ja) * 1984-08-20 1986-03-13 積水化学工業株式会社 耐透湿性を有する透明合成樹脂体

Cited By (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH04226343A (ja) * 1990-04-20 1992-08-17 E I Du Pont De Nemours & Co 包装用障壁材料
US5725958A (en) * 1991-12-26 1998-03-10 Toyo Boseki Kabushiki Kaisha Gas barrier film
WO1994019506A1 (de) * 1993-02-25 1994-09-01 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Im vakuum aufgedampte barriereschichten für die verpackungsindustrie und aufdampfgut für ihre herstellung
JPH06312478A (ja) * 1993-04-30 1994-11-08 Toppan Printing Co Ltd 脱酸素剤用包装体
JP2010143091A (ja) * 2008-12-19 2010-07-01 Dainippon Printing Co Ltd ガスバリア性シート、ガスバリア性シートの製造方法、及び製品
JP2013057111A (ja) * 2011-09-09 2013-03-28 Toppan Printing Co Ltd 蒸着用材料、ガスバリア性蒸着フィルム及び該蒸着フィルムの製造方法
JP2014069389A (ja) * 2012-09-28 2014-04-21 Toppan Printing Co Ltd ガスバリア積層フィルム
JP2014188884A (ja) * 2013-03-27 2014-10-06 Toppan Printing Co Ltd ガスバリア積層フィルム

Also Published As

Publication number Publication date
JPH0573825B2 (enrdf_load_stackoverflow) 1993-10-15

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