JPH01175166U - - Google Patents
Info
- Publication number
- JPH01175166U JPH01175166U JP7136488U JP7136488U JPH01175166U JP H01175166 U JPH01175166 U JP H01175166U JP 7136488 U JP7136488 U JP 7136488U JP 7136488 U JP7136488 U JP 7136488U JP H01175166 U JPH01175166 U JP H01175166U
- Authority
- JP
- Japan
- Prior art keywords
- blade
- center
- particles
- cutting blade
- center blade
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000002245 particle Substances 0.000 claims 2
- 239000004065 semiconductor Substances 0.000 description 3
Landscapes
- Polishing Bodies And Polishing Tools (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7136488U JPH01175166U (US20100223739A1-20100909-C00005.png) | 1988-05-30 | 1988-05-30 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7136488U JPH01175166U (US20100223739A1-20100909-C00005.png) | 1988-05-30 | 1988-05-30 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH01175166U true JPH01175166U (US20100223739A1-20100909-C00005.png) | 1989-12-13 |
Family
ID=31296572
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP7136488U Pending JPH01175166U (US20100223739A1-20100909-C00005.png) | 1988-05-30 | 1988-05-30 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH01175166U (US20100223739A1-20100909-C00005.png) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2000013870A1 (fr) * | 1998-09-04 | 2000-03-16 | Riken | Procede et dispositif de coupe et de polissage miroir de carbure de silicium monocristallin |
| JP2011222698A (ja) * | 2010-04-08 | 2011-11-04 | Disco Abrasive Syst Ltd | 光デバイスウエーハの加工方法 |
| EP3067194A3 (en) * | 2015-03-13 | 2016-09-28 | NGK Insulators, Ltd. | Manufacturing method of honeycomb structure, and grinding wheel |
| JP2019503881A (ja) * | 2015-12-09 | 2019-02-14 | ユニバーシティ・オブ・ノーザンブリア・アット・ニューカッスル | 複合加工ツール |
-
1988
- 1988-05-30 JP JP7136488U patent/JPH01175166U/ja active Pending
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2000013870A1 (fr) * | 1998-09-04 | 2000-03-16 | Riken | Procede et dispositif de coupe et de polissage miroir de carbure de silicium monocristallin |
| US6699105B1 (en) | 1998-09-04 | 2004-03-02 | Riken | Method and apparatus for cutting and grinding single crystal SiC |
| JP2011222698A (ja) * | 2010-04-08 | 2011-11-04 | Disco Abrasive Syst Ltd | 光デバイスウエーハの加工方法 |
| EP3067194A3 (en) * | 2015-03-13 | 2016-09-28 | NGK Insulators, Ltd. | Manufacturing method of honeycomb structure, and grinding wheel |
| US10576609B2 (en) | 2015-03-13 | 2020-03-03 | Ngk Insulators, Ltd. | Manufacturing method of honeycomb structure, and grinding wheel |
| JP2019503881A (ja) * | 2015-12-09 | 2019-02-14 | ユニバーシティ・オブ・ノーザンブリア・アット・ニューカッスル | 複合加工ツール |
