JPH01174918U - - Google Patents

Info

Publication number
JPH01174918U
JPH01174918U JP7219688U JP7219688U JPH01174918U JP H01174918 U JPH01174918 U JP H01174918U JP 7219688 U JP7219688 U JP 7219688U JP 7219688 U JP7219688 U JP 7219688U JP H01174918 U JPH01174918 U JP H01174918U
Authority
JP
Japan
Prior art keywords
processing chamber
pressure control
control valve
vacuum processing
vacuum
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP7219688U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP7219688U priority Critical patent/JPH01174918U/ja
Publication of JPH01174918U publication Critical patent/JPH01174918U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Drying Of Semiconductors (AREA)
  • Physical Vapour Deposition (AREA)
  • Chemical Vapour Deposition (AREA)
JP7219688U 1988-05-31 1988-05-31 Pending JPH01174918U (US20030199744A1-20031023-C00003.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP7219688U JPH01174918U (US20030199744A1-20031023-C00003.png) 1988-05-31 1988-05-31

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7219688U JPH01174918U (US20030199744A1-20031023-C00003.png) 1988-05-31 1988-05-31

Publications (1)

Publication Number Publication Date
JPH01174918U true JPH01174918U (US20030199744A1-20031023-C00003.png) 1989-12-13

Family

ID=31297370

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7219688U Pending JPH01174918U (US20030199744A1-20031023-C00003.png) 1988-05-31 1988-05-31

Country Status (1)

Country Link
JP (1) JPH01174918U (US20030199744A1-20031023-C00003.png)

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