JPH01172048U - - Google Patents

Info

Publication number
JPH01172048U
JPH01172048U JP6868388U JP6868388U JPH01172048U JP H01172048 U JPH01172048 U JP H01172048U JP 6868388 U JP6868388 U JP 6868388U JP 6868388 U JP6868388 U JP 6868388U JP H01172048 U JPH01172048 U JP H01172048U
Authority
JP
Japan
Prior art keywords
substrate
turntable
outer tank
air
coated
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP6868388U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP6868388U priority Critical patent/JPH01172048U/ja
Publication of JPH01172048U publication Critical patent/JPH01172048U/ja
Pending legal-status Critical Current

Links

JP6868388U 1988-05-26 1988-05-26 Pending JPH01172048U (cs)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP6868388U JPH01172048U (cs) 1988-05-26 1988-05-26

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6868388U JPH01172048U (cs) 1988-05-26 1988-05-26

Publications (1)

Publication Number Publication Date
JPH01172048U true JPH01172048U (cs) 1989-12-06

Family

ID=31293987

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6868388U Pending JPH01172048U (cs) 1988-05-26 1988-05-26

Country Status (1)

Country Link
JP (1) JPH01172048U (cs)

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62225268A (ja) * 1986-03-26 1987-10-03 Hitachi Ltd 塗布装置
JPS6378536A (ja) * 1986-09-22 1988-04-08 Hitachi Ltd 塗布装置

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62225268A (ja) * 1986-03-26 1987-10-03 Hitachi Ltd 塗布装置
JPS6378536A (ja) * 1986-09-22 1988-04-08 Hitachi Ltd 塗布装置

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