JPH01170426U - - Google Patents

Info

Publication number
JPH01170426U
JPH01170426U JP6549288U JP6549288U JPH01170426U JP H01170426 U JPH01170426 U JP H01170426U JP 6549288 U JP6549288 U JP 6549288U JP 6549288 U JP6549288 U JP 6549288U JP H01170426 U JPH01170426 U JP H01170426U
Authority
JP
Japan
Prior art keywords
suction port
perforated plate
attached
lattice device
adsorbent
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP6549288U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP6549288U priority Critical patent/JPH01170426U/ja
Publication of JPH01170426U publication Critical patent/JPH01170426U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Ventilation (AREA)
  • Treating Waste Gases (AREA)
  • Separation Of Gases By Adsorption (AREA)
JP6549288U 1988-05-18 1988-05-18 Pending JPH01170426U (US20110105765A1-20110505-C00013.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP6549288U JPH01170426U (US20110105765A1-20110505-C00013.png) 1988-05-18 1988-05-18

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6549288U JPH01170426U (US20110105765A1-20110505-C00013.png) 1988-05-18 1988-05-18

Publications (1)

Publication Number Publication Date
JPH01170426U true JPH01170426U (US20110105765A1-20110505-C00013.png) 1989-12-01

Family

ID=31290927

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6549288U Pending JPH01170426U (US20110105765A1-20110505-C00013.png) 1988-05-18 1988-05-18

Country Status (1)

Country Link
JP (1) JPH01170426U (US20110105765A1-20110505-C00013.png)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH04126513A (ja) * 1990-08-31 1992-04-27 Hitachi Plant Eng & Constr Co Ltd クリーンルーム

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH04126513A (ja) * 1990-08-31 1992-04-27 Hitachi Plant Eng & Constr Co Ltd クリーンルーム

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