JPH01167036U - - Google Patents

Info

Publication number
JPH01167036U
JPH01167036U JP6338588U JP6338588U JPH01167036U JP H01167036 U JPH01167036 U JP H01167036U JP 6338588 U JP6338588 U JP 6338588U JP 6338588 U JP6338588 U JP 6338588U JP H01167036 U JPH01167036 U JP H01167036U
Authority
JP
Japan
Prior art keywords
sample
plasma processing
mounting table
processing apparatus
pressing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP6338588U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP6338588U priority Critical patent/JPH01167036U/ja
Publication of JPH01167036U publication Critical patent/JPH01167036U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Processing And Handling Of Plastics And Other Materials For Molding In General (AREA)
  • Drying Of Semiconductors (AREA)
JP6338588U 1988-05-16 1988-05-16 Pending JPH01167036U (US07534539-20090519-C00280.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP6338588U JPH01167036U (US07534539-20090519-C00280.png) 1988-05-16 1988-05-16

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6338588U JPH01167036U (US07534539-20090519-C00280.png) 1988-05-16 1988-05-16

Publications (1)

Publication Number Publication Date
JPH01167036U true JPH01167036U (US07534539-20090519-C00280.png) 1989-11-22

Family

ID=31288891

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6338588U Pending JPH01167036U (US07534539-20090519-C00280.png) 1988-05-16 1988-05-16

Country Status (1)

Country Link
JP (1) JPH01167036U (US07534539-20090519-C00280.png)

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