JPH01165541U - - Google Patents

Info

Publication number

JPH01165541U

JPH01165541U JP6116888U JP6116888U JPH01165541U JP H01165541 U JPH01165541 U JP H01165541U JP 6116888 U JP6116888 U JP 6116888U JP 6116888 U JP6116888 U JP 6116888U JP H01165541 U JPH01165541 U JP H01165541U

Authority

JP

Japan

Prior art keywords

bearing

collar portion

vacuum valve

movable shaft

vacuum

Prior art date

1988-05-11

Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)

Pending

Links

• Espacenet
• Global Dossier
• Discuss

• 238000000926 separation method Methods 0.000 claims 1
• 238000010586 diagram Methods 0.000 description 4
• 238000007906 compression Methods 0.000 description 3
• 239000000853 adhesive Substances 0.000 description 1
• 230000001070 adhesive effect Effects 0.000 description 1
• 230000007257 malfunction Effects 0.000 description 1

Cited By (1)