JPH01165436U - - Google Patents

Info

Publication number

JPH01165436U

JPH01165436U JP6292388U JP6292388U JPH01165436U JP H01165436 U JPH01165436 U JP H01165436U JP 6292388 U JP6292388 U JP 6292388U JP 6292388 U JP6292388 U JP 6292388U JP H01165436 U JPH01165436 U JP H01165436U

Authority

JP

Japan

Prior art keywords

introduction port

pressure

pressure introduction

pressure sensor

semiconductor

Prior art date

1988-05-13

Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)

Pending

Links

• Espacenet
• Global Dossier
• Discuss

• 239000004065 semiconductor Substances 0.000 claims description 3
• XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
• 239000000428 dust Substances 0.000 description 1
• NJPPVKZQTLUDBO-UHFFFAOYSA-N novaluron Chemical compound C1=C(Cl)C(OC(F)(F)C(OC(F)(F)F)F)=CC=C1NC(=O)NC(=O)C1=C(F)C=CC=C1F NJPPVKZQTLUDBO-UHFFFAOYSA-N 0.000 description 1
• 229910052710 silicon Inorganic materials 0.000 description 1
• 239000010703 silicon Substances 0.000 description 1