JPH01164759U - - Google Patents

Info

Publication number

JPH01164759U

JPH01164759U JP5975788U JP5975788U JPH01164759U JP H01164759 U JPH01164759 U JP H01164759U JP 5975788 U JP5975788 U JP 5975788U JP 5975788 U JP5975788 U JP 5975788U JP H01164759 U JPH01164759 U JP H01164759U

Authority

JP

Japan

Prior art keywords

vacuum evaporation

chamber

decompression

replaced

decompression chamber

Prior art date

1988-05-02

Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)

Granted

Links

• Espacenet
• Global Dossier
• Discuss

• 238000007738 vacuum evaporation Methods 0.000 claims description 8
• 230000006837 decompression Effects 0.000 claims description 7
• 239000007789 gas Substances 0.000 claims description 5
• 239000011261 inert gas Substances 0.000 claims description 3
• 239000000463 material Substances 0.000 claims 1
• 238000005086 pumping Methods 0.000 claims 1
• 238000010586 diagram Methods 0.000 description 4
• 238000005516 engineering process Methods 0.000 description 1

Cited By (3)