JPH01163338U - - Google Patents
Info
- Publication number
- JPH01163338U JPH01163338U JP5207589U JP5207589U JPH01163338U JP H01163338 U JPH01163338 U JP H01163338U JP 5207589 U JP5207589 U JP 5207589U JP 5207589 U JP5207589 U JP 5207589U JP H01163338 U JPH01163338 U JP H01163338U
- Authority
- JP
- Japan
- Prior art keywords
- lid
- holding plate
- pieces
- semiconductor wafer
- wafer case
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000004065 semiconductor Substances 0.000 claims 2
- 230000003014 reinforcing effect Effects 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1989052075U JPH0231789Y2 (cs) | 1989-05-02 | 1989-05-02 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1989052075U JPH0231789Y2 (cs) | 1989-05-02 | 1989-05-02 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH01163338U true JPH01163338U (cs) | 1989-11-14 |
| JPH0231789Y2 JPH0231789Y2 (cs) | 1990-08-28 |
Family
ID=31278086
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1989052075U Expired JPH0231789Y2 (cs) | 1989-05-02 | 1989-05-02 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0231789Y2 (cs) |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5931238U (ja) * | 1982-08-24 | 1984-02-27 | 三菱マテリアル株式会社 | 半導体ウエハ−の収納容器 |
-
1989
- 1989-05-02 JP JP1989052075U patent/JPH0231789Y2/ja not_active Expired
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5931238U (ja) * | 1982-08-24 | 1984-02-27 | 三菱マテリアル株式会社 | 半導体ウエハ−の収納容器 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0231789Y2 (cs) | 1990-08-28 |