JPH01162264U - - Google Patents

Info

Publication number
JPH01162264U
JPH01162264U JP5493288U JP5493288U JPH01162264U JP H01162264 U JPH01162264 U JP H01162264U JP 5493288 U JP5493288 U JP 5493288U JP 5493288 U JP5493288 U JP 5493288U JP H01162264 U JPH01162264 U JP H01162264U
Authority
JP
Japan
Prior art keywords
gas
supplied
mixer
gases
discharge type
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP5493288U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP5493288U priority Critical patent/JPH01162264U/ja
Publication of JPH01162264U publication Critical patent/JPH01162264U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Lasers (AREA)
JP5493288U 1988-04-23 1988-04-23 Pending JPH01162264U (US06252093-20010626-C00008.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP5493288U JPH01162264U (US06252093-20010626-C00008.png) 1988-04-23 1988-04-23

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5493288U JPH01162264U (US06252093-20010626-C00008.png) 1988-04-23 1988-04-23

Publications (1)

Publication Number Publication Date
JPH01162264U true JPH01162264U (US06252093-20010626-C00008.png) 1989-11-10

Family

ID=31280846

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5493288U Pending JPH01162264U (US06252093-20010626-C00008.png) 1988-04-23 1988-04-23

Country Status (1)

Country Link
JP (1) JPH01162264U (US06252093-20010626-C00008.png)

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