JPH01161326U - - Google Patents

Info

Publication number

JPH01161326U

JPH01161326U JP5685688U JP5685688U JPH01161326U JP H01161326 U JPH01161326 U JP H01161326U JP 5685688 U JP5685688 U JP 5685688U JP 5685688 U JP5685688 U JP 5685688U JP H01161326 U JPH01161326 U JP H01161326U

Authority

JP

Japan

Prior art keywords

semiconductor substrate

furnace core

core tube

quartz

tube

Prior art date

1988-04-26

Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)

Pending

Links

• Espacenet
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• 239000010453 quartz Substances 0.000 claims description 5
• VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 5
• 239000004065 semiconductor Substances 0.000 claims description 4
• 239000000758 substrate Substances 0.000 claims description 4
• UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 claims description 2
• 238000002485 combustion reaction Methods 0.000 claims description 2
• 239000001257 hydrogen Substances 0.000 claims description 2
• 229910052739 hydrogen Inorganic materials 0.000 claims description 2
• 230000003647 oxidation Effects 0.000 claims 1
• 238000007254 oxidation reaction Methods 0.000 claims 1
• 238000005192 partition Methods 0.000 claims 1
• QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 1
• 239000001301 oxygen Substances 0.000 description 1
• 229910052760 oxygen Inorganic materials 0.000 description 1