JPH01160345U - - Google Patents

Info

Publication number

JPH01160345U

JPH01160345U JP5582988U JP5582988U JPH01160345U JP H01160345 U JPH01160345 U JP H01160345U JP 5582988 U JP5582988 U JP 5582988U JP 5582988 U JP5582988 U JP 5582988U JP H01160345 U JPH01160345 U JP H01160345U

Authority

JP

Japan

Prior art keywords

hollow chambers

vacuum pump

submarine

partition plate

outer cylinder

Prior art date

1988-04-27

Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)

Pending

Links

• Espacenet
• Global Dossier
• Discuss

• IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 claims description 2
• 229910001873 dinitrogen Inorganic materials 0.000 claims description 2
• 239000007789 gas Substances 0.000 claims description 2
• 238000005192 partition Methods 0.000 claims description 2
• 238000001514 detection method Methods 0.000 claims 1
• 238000010586 diagram Methods 0.000 description 1

Cited By (1)