JPH01159353U - - Google Patents

Info

Publication number
JPH01159353U
JPH01159353U JP5487788U JP5487788U JPH01159353U JP H01159353 U JPH01159353 U JP H01159353U JP 5487788 U JP5487788 U JP 5487788U JP 5487788 U JP5487788 U JP 5487788U JP H01159353 U JPH01159353 U JP H01159353U
Authority
JP
Japan
Prior art keywords
ion source
vicinity
plasma generation
insulating ring
source housing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP5487788U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP5487788U priority Critical patent/JPH01159353U/ja
Publication of JPH01159353U publication Critical patent/JPH01159353U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Electron Sources, Ion Sources (AREA)
JP5487788U 1988-04-22 1988-04-22 Pending JPH01159353U (US20090163788A1-20090625-C00002.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP5487788U JPH01159353U (US20090163788A1-20090625-C00002.png) 1988-04-22 1988-04-22

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5487788U JPH01159353U (US20090163788A1-20090625-C00002.png) 1988-04-22 1988-04-22

Publications (1)

Publication Number Publication Date
JPH01159353U true JPH01159353U (US20090163788A1-20090625-C00002.png) 1989-11-06

Family

ID=31280791

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5487788U Pending JPH01159353U (US20090163788A1-20090625-C00002.png) 1988-04-22 1988-04-22

Country Status (1)

Country Link
JP (1) JPH01159353U (US20090163788A1-20090625-C00002.png)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0531094U (ja) * 1991-09-30 1993-04-23 日新電機株式会社 イオン源チヤンバ
JP4649773B2 (ja) * 2001-05-14 2011-03-16 株式会社デンソー イオン注入機
WO2019054111A1 (ja) * 2017-09-14 2019-03-21 株式会社アルバック イオン源及びイオン注入装置並びにイオン源の運転方法

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0531094U (ja) * 1991-09-30 1993-04-23 日新電機株式会社 イオン源チヤンバ
JP4649773B2 (ja) * 2001-05-14 2011-03-16 株式会社デンソー イオン注入機
WO2019054111A1 (ja) * 2017-09-14 2019-03-21 株式会社アルバック イオン源及びイオン注入装置並びにイオン源の運転方法
US10910192B2 (en) 2017-09-14 2021-02-02 Ulvac, Inc. Ion source, ion implantation apparatus, and ion source operating method

Similar Documents

Publication Publication Date Title
JPH01159353U (US20090163788A1-20090625-C00002.png)
JPS6190586U (US20090163788A1-20090625-C00002.png)
JPH0217386U (US20090163788A1-20090625-C00002.png)
JPS61103535U (US20090163788A1-20090625-C00002.png)
JPS62110155U (US20090163788A1-20090625-C00002.png)
JPH0282415U (US20090163788A1-20090625-C00002.png)
JPH0389146U (US20090163788A1-20090625-C00002.png)
JPS6278813U (US20090163788A1-20090625-C00002.png)
JPS62102077U (US20090163788A1-20090625-C00002.png)
JPS61197958U (US20090163788A1-20090625-C00002.png)
JPS63139497U (US20090163788A1-20090625-C00002.png)
JPS61129904U (US20090163788A1-20090625-C00002.png)
JPH025294U (US20090163788A1-20090625-C00002.png)
JPH01151773U (US20090163788A1-20090625-C00002.png)
JPS6341389U (US20090163788A1-20090625-C00002.png)
JPS6290304U (US20090163788A1-20090625-C00002.png)
JPH01126844U (US20090163788A1-20090625-C00002.png)
JPS6342323U (US20090163788A1-20090625-C00002.png)
JPH0211157U (US20090163788A1-20090625-C00002.png)
JPS61177318U (US20090163788A1-20090625-C00002.png)
JPS61144073U (US20090163788A1-20090625-C00002.png)
JPH0326038U (US20090163788A1-20090625-C00002.png)
JPS6236041U (US20090163788A1-20090625-C00002.png)
JPH0282262U (US20090163788A1-20090625-C00002.png)
JPS61134279U (US20090163788A1-20090625-C00002.png)