JPH01157155U - - Google Patents

Info

Publication number
JPH01157155U
JPH01157155U JP5088888U JP5088888U JPH01157155U JP H01157155 U JPH01157155 U JP H01157155U JP 5088888 U JP5088888 U JP 5088888U JP 5088888 U JP5088888 U JP 5088888U JP H01157155 U JPH01157155 U JP H01157155U
Authority
JP
Japan
Prior art keywords
crucible
solid substance
temperature
ion source
item
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP5088888U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0515712Y2 (US20080094685A1-20080424-C00004.png
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP5088888U priority Critical patent/JPH0515712Y2/ja
Publication of JPH01157155U publication Critical patent/JPH01157155U/ja
Application granted granted Critical
Publication of JPH0515712Y2 publication Critical patent/JPH0515712Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
  • Electron Sources, Ion Sources (AREA)
JP5088888U 1988-04-18 1988-04-18 Expired - Lifetime JPH0515712Y2 (US20080094685A1-20080424-C00004.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP5088888U JPH0515712Y2 (US20080094685A1-20080424-C00004.png) 1988-04-18 1988-04-18

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5088888U JPH0515712Y2 (US20080094685A1-20080424-C00004.png) 1988-04-18 1988-04-18

Publications (2)

Publication Number Publication Date
JPH01157155U true JPH01157155U (US20080094685A1-20080424-C00004.png) 1989-10-30
JPH0515712Y2 JPH0515712Y2 (US20080094685A1-20080424-C00004.png) 1993-04-26

Family

ID=31276915

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5088888U Expired - Lifetime JPH0515712Y2 (US20080094685A1-20080424-C00004.png) 1988-04-18 1988-04-18

Country Status (1)

Country Link
JP (1) JPH0515712Y2 (US20080094685A1-20080424-C00004.png)

Also Published As

Publication number Publication date
JPH0515712Y2 (US20080094685A1-20080424-C00004.png) 1993-04-26

Similar Documents

Publication Publication Date Title
JPH01157155U (US20080094685A1-20080424-C00004.png)
JPS6411423U (US20080094685A1-20080424-C00004.png)
JPS62143260U (US20080094685A1-20080424-C00004.png)
JPH0333059Y2 (US20080094685A1-20080424-C00004.png)
JPS62119664U (US20080094685A1-20080424-C00004.png)
JPS62115176U (US20080094685A1-20080424-C00004.png)
JPS63160719U (US20080094685A1-20080424-C00004.png)
JPS621252U (US20080094685A1-20080424-C00004.png)
JPS61174903U (US20080094685A1-20080424-C00004.png)
JPS6184561U (US20080094685A1-20080424-C00004.png)
JPS63124765U (US20080094685A1-20080424-C00004.png)
JPS62127232U (US20080094685A1-20080424-C00004.png)
JPS61194950U (US20080094685A1-20080424-C00004.png)
JPS63199014U (US20080094685A1-20080424-C00004.png)
JPH0185860U (US20080094685A1-20080424-C00004.png)
JPS6390154U (US20080094685A1-20080424-C00004.png)
JPS6299858U (US20080094685A1-20080424-C00004.png)
JPS61174889U (US20080094685A1-20080424-C00004.png)
JPS61114869U (US20080094685A1-20080424-C00004.png)
JPH02101240U (US20080094685A1-20080424-C00004.png)
JPH03115656U (US20080094685A1-20080424-C00004.png)
JPS636043U (US20080094685A1-20080424-C00004.png)
JPH0418361U (US20080094685A1-20080424-C00004.png)
JPS6235230U (US20080094685A1-20080424-C00004.png)
JPS62186064U (US20080094685A1-20080424-C00004.png)