JPH01156544U - - Google Patents

Info

Publication number
JPH01156544U
JPH01156544U JP5383988U JP5383988U JPH01156544U JP H01156544 U JPH01156544 U JP H01156544U JP 5383988 U JP5383988 U JP 5383988U JP 5383988 U JP5383988 U JP 5383988U JP H01156544 U JPH01156544 U JP H01156544U
Authority
JP
Japan
Prior art keywords
wafer
parallel plate
plate electrode
seesaw
plasma
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP5383988U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP5383988U priority Critical patent/JPH01156544U/ja
Publication of JPH01156544U publication Critical patent/JPH01156544U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Electrodes Of Semiconductors (AREA)
JP5383988U 1988-04-20 1988-04-20 Pending JPH01156544U (US06229276-20010508-P00022.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP5383988U JPH01156544U (US06229276-20010508-P00022.png) 1988-04-20 1988-04-20

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5383988U JPH01156544U (US06229276-20010508-P00022.png) 1988-04-20 1988-04-20

Publications (1)

Publication Number Publication Date
JPH01156544U true JPH01156544U (US06229276-20010508-P00022.png) 1989-10-27

Family

ID=31279798

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5383988U Pending JPH01156544U (US06229276-20010508-P00022.png) 1988-04-20 1988-04-20

Country Status (1)

Country Link
JP (1) JPH01156544U (US06229276-20010508-P00022.png)

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