JPH01154442U - - Google Patents

Info

Publication number

JPH01154442U

JPH01154442U JP5174888U JP5174888U JPH01154442U JP H01154442 U JPH01154442 U JP H01154442U JP 5174888 U JP5174888 U JP 5174888U JP 5174888 U JP5174888 U JP 5174888U JP H01154442 U JPH01154442 U JP H01154442U

Authority

JP

Japan

Prior art keywords

silicon substrate

card

semiconductor

pressure

semiconductor gauge

Prior art date

1988-04-18

Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)

Pending

Links

• Espacenet
• Global Dossier
• Discuss

• 239000004065 semiconductor Substances 0.000 claims description 7
• 239000000758 substrate Substances 0.000 claims description 7
• 229910052710 silicon Inorganic materials 0.000 claims description 6
• 239000010703 silicon Substances 0.000 claims description 6
• XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims 4
• 239000000919 ceramic Substances 0.000 description 1
• 239000011521 glass Substances 0.000 description 1
• 239000000463 material Substances 0.000 description 1