JPH01153361U - - Google Patents

Info

Publication number
JPH01153361U
JPH01153361U JP4778988U JP4778988U JPH01153361U JP H01153361 U JPH01153361 U JP H01153361U JP 4778988 U JP4778988 U JP 4778988U JP 4778988 U JP4778988 U JP 4778988U JP H01153361 U JPH01153361 U JP H01153361U
Authority
JP
Japan
Prior art keywords
roll
seal
evaporation apparatus
control means
adjusting
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP4778988U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP4778988U priority Critical patent/JPH01153361U/ja
Publication of JPH01153361U publication Critical patent/JPH01153361U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
JP4778988U 1988-04-11 1988-04-11 Pending JPH01153361U (US06826419-20041130-M00005.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4778988U JPH01153361U (US06826419-20041130-M00005.png) 1988-04-11 1988-04-11

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4778988U JPH01153361U (US06826419-20041130-M00005.png) 1988-04-11 1988-04-11

Publications (1)

Publication Number Publication Date
JPH01153361U true JPH01153361U (US06826419-20041130-M00005.png) 1989-10-23

Family

ID=31273975

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4778988U Pending JPH01153361U (US06826419-20041130-M00005.png) 1988-04-11 1988-04-11

Country Status (1)

Country Link
JP (1) JPH01153361U (US06826419-20041130-M00005.png)

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