JPH01153360U - - Google Patents

Info

Publication number
JPH01153360U
JPH01153360U JP5120688U JP5120688U JPH01153360U JP H01153360 U JPH01153360 U JP H01153360U JP 5120688 U JP5120688 U JP 5120688U JP 5120688 U JP5120688 U JP 5120688U JP H01153360 U JPH01153360 U JP H01153360U
Authority
JP
Japan
Prior art keywords
irradiation
beam current
irradiated object
irradiated
bias resistor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP5120688U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP5120688U priority Critical patent/JPH01153360U/ja
Publication of JPH01153360U publication Critical patent/JPH01153360U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
  • Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
JP5120688U 1988-04-15 1988-04-15 Pending JPH01153360U (US07943777-20110517-C00090.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP5120688U JPH01153360U (US07943777-20110517-C00090.png) 1988-04-15 1988-04-15

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5120688U JPH01153360U (US07943777-20110517-C00090.png) 1988-04-15 1988-04-15

Publications (1)

Publication Number Publication Date
JPH01153360U true JPH01153360U (US07943777-20110517-C00090.png) 1989-10-23

Family

ID=31277237

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5120688U Pending JPH01153360U (US07943777-20110517-C00090.png) 1988-04-15 1988-04-15

Country Status (1)

Country Link
JP (1) JPH01153360U (US07943777-20110517-C00090.png)

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