JPH01147420A - Galvanomirror turning driving device for optical pickup - Google Patents

Galvanomirror turning driving device for optical pickup

Info

Publication number
JPH01147420A
JPH01147420A JP62306725A JP30672587A JPH01147420A JP H01147420 A JPH01147420 A JP H01147420A JP 62306725 A JP62306725 A JP 62306725A JP 30672587 A JP30672587 A JP 30672587A JP H01147420 A JPH01147420 A JP H01147420A
Authority
JP
Japan
Prior art keywords
mirror
objective lens
galvanomirror
focal plane
rotation
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP62306725A
Other languages
Japanese (ja)
Inventor
Toshihisa Tanaka
稔久 田中
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nikon Corp
Original Assignee
Nikon Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nikon Corp filed Critical Nikon Corp
Priority to JP62306725A priority Critical patent/JPH01147420A/en
Publication of JPH01147420A publication Critical patent/JPH01147420A/en
Pending legal-status Critical Current

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  • Mechanical Optical Scanning Systems (AREA)
  • Optical Recording Or Reproduction (AREA)

Abstract

PURPOSE:To make the title device small in size and light in weight by controlling a pair of driving means provided on the reverse side of a mirror so that one point in a rear side focal plane of an objective lens becomes the turning center. CONSTITUTION:By applying ACs of the same phase and each different voltage to a pair of piezoelectric devices 91, 92 provided on the reverse side of a galvanomirror 4, a turning center point 8 can be set to one point in a rear side focal plane of an objective lens 2. Accordingly, a supporting base 11 for supporting the galvanomirror 4 is formed as a cantilever, and it turns in the C direction when the piezoelectric device 91 is elongated, and turns in the B direction when the piezoelectric device 92 is elongated. In such a way, an arm- like mirror supporting part for setting the turning center becomes unnecessary, and a pickup can be made small in size and light in weight.

Description

【発明の詳細な説明】 〔産業上の利用分野〕 本発明は例えばディスク状媒体(光ディスク或いは光磁
気ディズク以下単に光ディスクと称す)に光ビームを照
射して情報を記録及び/又は再生する光デイスク記録・
再生装置のピックアンプ部(以下光ピックアップと称す
)に用いられる光ビーム偏向用の回動制御可能に構成さ
れた平面鏡(以下ガルバノミラ−と称す)の回動駆動装
置に関する。
Detailed Description of the Invention [Field of Industrial Application] The present invention relates to an optical disk, for example, which records and/or reproduces information by irradiating a light beam onto a disk-shaped medium (optical disk or magneto-optical disk, hereinafter simply referred to as an optical disk). record·
The present invention relates to a rotation drive device for a plane mirror (hereinafter referred to as a galvanometer mirror) configured to be rotatably controllable for deflecting a light beam and used in a pick amplifier section (hereinafter referred to as an optical pickup) of a playback device.

〔従来の技術〕[Conventional technology]

従来光ピンクアップのビーム偏向用ガルバノミラ−回動
駆動装置の構成は第2図に示す如くであった0 第2図に於いて1は光ディスク、2は対物レンズ、3は
対物レンズ駆動用の磁気回路、4はガルバノミラ−14
1は該ガルバノミラ−4を支持するアームでばね性を有
する。5はガルバノミラ−駆動用磁気回路、6はガルバ
ノミラ−5への光ビームの入射光路、61はガルバノミ
ラ−4が点線の位置に回動した時の該ガルバノミラ−に
よる反射光路、7は対物レンズ2の後側焦点面、71は
対物レンズ2の後側焦点、8はガルバノミラ−の回動中
心であって前記アームの回動輪である。
The configuration of a conventional galvanometer mirror rotation drive device for beam deflection in optical pink-up is as shown in Figure 2. In Figure 2, 1 is an optical disk, 2 is an objective lens, and 3 is a magnet for driving the objective lens. Circuit, 4 is galvano mirror 14
Reference numeral 1 denotes an arm that supports the galvanometer mirror 4 and has spring properties. 5 is a magnetic circuit for driving the galvano mirror, 6 is an incident optical path of the light beam to the galvano mirror 5, 61 is a reflected optical path by the galvano mirror when the galvano mirror 4 is rotated to the position indicated by the dotted line, and 7 is the optical path of the objective lens 2. The rear focal plane 71 is the rear focal point of the objective lens 2, and 8 is the center of rotation of the galvanometer mirror and the rotation wheel of the arm.

そして、図示しないトラッキング信号発生装置よリドラ
ッキング・エラー信号を得てガルバノミラ−駆動用磁気
回路5によりガルバノミラ−4を矢印入方向に回動して
矢印T方向にビームを移動させ、ディスクの偏心等に起
因するディスク回転時のディスク半径方向へのトラック
の揺れに照射ビームを追従する様にトラッキングを行う
。又、ディスクの平面性の不完全さ等に起因するディス
ク面の振れに照射ビームの結像状態を確保する為、図示
しないフォーカシング信号発生装置よりフォーカスエラ
ー信号を得て磁気回路3を動作して対物レンズ2を矢印
F方向に移動して光ディスクlにビームスポットを結像
する。
Then, a re-tracking error signal is obtained from a tracking signal generator (not shown), and the galvano-mirror drive magnetic circuit 5 rotates the galvano-mirror 4 in the direction of the arrow T to move the beam in the direction of the arrow T, thereby correcting the eccentricity of the disk. Tracking is performed so that the irradiation beam follows the shaking of the track in the radial direction of the disk as the disk rotates. In addition, in order to ensure the imaging state of the irradiation beam even when the disc surface is shaken due to imperfections in the flatness of the disc, the magnetic circuit 3 is operated by obtaining a focus error signal from a focusing signal generator (not shown). The objective lens 2 is moved in the direction of arrow F to form a beam spot on the optical disk l.

ここでガルバノミラ−の回動中心が対物レンズの後側焦
点面内になければならない理由は以下の通りである。
The reason why the center of rotation of the galvanometer mirror must be within the rear focal plane of the objective lens is as follows.

ガルバノミラ−の回動中心が対物レンズの後側焦点面内
に無いとガルバノミラ−の回動に伴ってビームをディス
ク半径方向(トラックに直交する方向即ちトラッキング
方向)に振る際、ガルバノミラ−による反射ビームがト
ラッキング方向に平行移動(ビームシフト)する。する
と媒体からの反射ビームもトラッキング方向にシフトし
て受光素子上の該反射ビームのスポットの位置が移動し
、トラッキングされているにも拘わらずトラッキングエ
ラー信号が出力されてしまう。即ちトラックサーボ信号
にオフセントが住する。このオフセットによりビームス
ポットはトラッキング方向にずれてた状態でトレースす
るので、結局記録・再生信号が劣化する事となる。そこ
で従来第2図に示す如くガルバノミラ−4の回動中心8
を対物レンズ2の後側焦点面7に於いて回動後の反射光
路61も後側焦点71を通る様にして、ビームシフトが
生じない様にしてトラッキングの精度を向上し、それに
よりC/Nを向上したものが知られている。
If the center of rotation of the galvano mirror is not within the back focal plane of the objective lens, when the beam is swung in the disk radial direction (direction perpendicular to the track, i.e. tracking direction) as the galvano mirror rotates, the beam reflected by the galvano mirror will be reflected. moves in parallel (beam shift) in the tracking direction. Then, the reflected beam from the medium also shifts in the tracking direction, and the position of the spot of the reflected beam on the light receiving element moves, causing a tracking error signal to be output even though tracking is being performed. That is, there is an offset in the track servo signal. Due to this offset, the beam spot is traced in a state shifted in the tracking direction, resulting in the recording/reproduction signal being degraded. Therefore, conventionally, as shown in FIG.
The reflected optical path 61 after rotation at the rear focal plane 7 of the objective lens 2 also passes through the rear focal plane 71, thereby preventing beam shift and improving tracking accuracy. Products with improved N are known.

ここでビームシフトを完全に除去する為にはフォーカシ
ングの為に対物レンズが上下に移動する時それに伴って
移動する後側焦点面に追従する如くミラーの回転中心も
移動制御すべきであるが、ディスクの平面性を一定の範
囲内に規制すればディスク面の平面性の不完全さから生
ずるディスク面からの反射ビームの振れ(面振れ)の範
囲もおのずと限定され、焦点面移動の範囲の中心付近に
ミラーの回転中心を固定しておくことでビームシフトに
よる影響は無視し得る。
In order to completely eliminate the beam shift, the rotation center of the mirror should be controlled so that it follows the rear focal plane that moves as the objective lens moves up and down for focusing. If the flatness of the disk is controlled within a certain range, the range of deflection of the reflected beam from the disk surface (surface deflection) caused by imperfect disk surface flatness will be naturally limited, and the center of the range of focal plane movement will be limited. By fixing the rotation center of the mirror nearby, the influence of beam shift can be ignored.

現行の技術ではディスクの平面性を一定値以上に確保し
て対物レンズの移動の範囲を規制することで対処してお
り、フォーカシングの際に対物レンズが上下に移動する
時それに伴って移動する後側焦点面にミラーの回転中心
を一致させる様に移動制御する事はしていない。
Current technology deals with this by ensuring the flatness of the disk is above a certain value and regulating the range of movement of the objective lens. The movement of the mirror is not controlled so that the center of rotation of the mirror coincides with the side focal plane.

〔発明が解決しようとする問題点〕[Problem that the invention seeks to solve]

しかし、上記の如き従来のガルバノミラ−駆動装置は対
物レンズの後側焦点面付近にミラーの回動中心を固定す
る為にアーム状のミラー支持部4が必要であり、その為
ピックアップが大型化し、重量も増加する。特に光デイ
スク記録・再生装置や光磁気ディスク記録・再生装置の
ピックアップはディスク半径方向に高速で移動し急速に
停止するキャリッジに搭載され、大きな移動(例えばト
ラックジャンプ)は該キャリッジによってピックアップ
全体を移動する如く構成するものが多いがピックアップ
の重量が増加すると該キャリッジの移動を制御する制御
信号に対する追従性が低下するという問題点があった。
However, the conventional galvanometer mirror drive device as described above requires an arm-shaped mirror support part 4 in order to fix the center of rotation of the mirror near the back focal plane of the objective lens, which increases the size of the pickup. Weight also increases. In particular, the pickup of an optical disk recording/playback device or a magneto-optical disk recording/playback device is mounted on a carriage that moves at high speed in the radial direction of the disk and stops rapidly.During large movements (for example, track jumps), the entire pickup is moved by the carriage. However, as the weight of the pickup increases, there is a problem in that the ability to follow the control signal for controlling the movement of the carriage decreases.

そこで本発明は小型軽量を可能とする光ピツクアンプの
ガルバノミラ−駆動装置を提供する事を目的とする。
SUMMARY OF THE INVENTION Accordingly, an object of the present invention is to provide a galvanometer mirror drive device for an optical pickup amplifier that is small and lightweight.

〔問題点を解決する為の手段〕[Means for solving problems]

上記目的の為本発明ではミラーの回動中心の設定の為の
アーム状のミラー支持部を廃し、対物レンズの後側焦点
面内の一点が回動中心となる如くミラーの裏面に設けた
一対の駆動手段をit;It a71する如くなした。
For the above purpose, in the present invention, the arm-shaped mirror support part for setting the rotation center of the mirror is eliminated, and a pair of arm-shaped mirror supports are provided on the back surface of the mirror so that a point in the rear focal plane of the objective lens becomes the rotation center. The driving means of the motor was designed as shown in FIG.

〔作用〕[Effect]

本発明は上記構成の通り回動中心の設定用のアーム状ミ
ラー支持部が無いのでピックアップは小型、軽量化が可
能である。
In the present invention, as described above, since there is no arm-shaped mirror support part for setting the center of rotation, the pickup can be made smaller and lighter.

〔実施例〕〔Example〕

第1図は本発明の詳細な説明する為の図である。 FIG. 1 is a diagram for explaining the present invention in detail.

第1図に於いて第2図と同符号は同効物を示す。In FIG. 1, the same symbols as in FIG. 2 indicate the same effects.

91.92はガルバノミラ−裏面に設けた一対の圧電装
置で同相で電圧の異なる交流を印加する事により回動中
心点8を設定する事が出来る。IOはビームがガルバノ
ミラ−4に入射して反射する反射点、fは対物レンズ2
の後側焦点距離、りは反射点lOから後側焦点面7迄の
距離、り+ 、I)2は圧電装置91.92の中心から
反射点10迄の距離、θはガルバノミラ−4の回動角で
ある。
Reference numerals 91 and 92 are a pair of piezoelectric devices provided on the back side of the galvanometer mirror, and by applying alternating current of the same phase and different voltages, the rotation center point 8 can be set. IO is the reflection point where the beam enters the galvanometer mirror 4 and is reflected, f is the objective lens 2
The rear focal length, ri, is the distance from the reflection point lO to the rear focal plane 7; It is the angle of movement.

第3図は本発明のガルバノミラ−4を回動駆動する一対
の圧電素子の構造の実施例であって第1、第2図と同符
号は同効物を示す611はガルバノミラ−4を支持する
支持台である。支持台11は片持梁になっていて圧電装
置91が伸びるとC方向に回動し、圧電装置92が伸び
るとB方向に回動する。
FIG. 3 shows an embodiment of the structure of a pair of piezoelectric elements for rotationally driving the galvano mirror 4 of the present invention, and the same reference numerals as in FIGS. It is a support stand. The support base 11 is a cantilever beam, and rotates in the C direction when the piezoelectric device 91 is extended, and rotates in the B direction when the piezoelectric device 92 is extended.

制御はガルバノミラ−の裏面に設けた一対の駆動用の圧
電装置の一方の変位を 他方の変位を δ2=(2・I  l12)  θ となる様な印加電圧を圧電装置に入力すればミラーの回
動中心は回動中心8に一致し、ビームシフトが除去出来
る。
Control is achieved by inputting an applied voltage to the piezoelectric device so that the displacement of one of the driving piezoelectric devices installed on the back side of the galvanomirror and the displacement of the other becomes δ2=(2・I12)θ. The center of motion coincides with the center of rotation 8, and beam shift can be eliminated.

尚、圧電装置91と圧電装置92の感度を選定する事に
より、同じ駆動電圧で駆動する事も可能である。
Note that by selecting the sensitivity of the piezoelectric device 91 and the piezoelectric device 92, it is also possible to drive them with the same driving voltage.

又一対の圧電装置への印加電圧により回転中心の変更が
可能であるのでフォーカスエラー信号によって対物レン
ズの移動に伴ってミラーの回転中心を該対物レンズ2の
後側焦点面に追従一致させる事が出来るのでその場合は
光ディスクの平面性の基準をより緩和する事が可能であ
る。
Furthermore, since the center of rotation can be changed by applying a voltage to the pair of piezoelectric devices, the center of rotation of the mirror can be made to follow and coincide with the rear focal plane of the objective lens 2 as the objective lens moves using a focus error signal. Therefore, in that case, it is possible to further relax the standard of flatness of the optical disk.

第4図は本発明の制′4n装置の一実施例を示すブロッ
ク図である。
FIG. 4 is a block diagram showing an embodiment of the control device of the present invention.

圧電装置による変位は印加電圧に比例するので圧電装置
の緒特性が決まり、上記δ1、δ2が決まればおのずと
装置に印加する電圧も決まるεはディスク偏心、15は
トラッキングエラー信号検出器であって該トラッキング
エラー信号検出器15のトラッキングエラー検出信号■
。がそれぞれ増幅回路141と142に人力され該増幅
回路141と142の出力が加算回路1.31と132
に入力され該加算回路131と132の出力がそれぞれ
圧電装置91と92に人力される。
Since the displacement caused by the piezoelectric device is proportional to the applied voltage, the characteristics of the piezoelectric device are determined, and if the above δ1 and δ2 are determined, the voltage applied to the device is also determined. ε is the disk eccentricity, and 15 is a tracking error signal detector, which corresponds to Tracking error detection signal of tracking error signal detector 15 ■
. are input to the amplifier circuits 141 and 142, respectively, and the outputs of the amplifier circuits 141 and 142 are input to the adder circuits 1.31 and 132.
The outputs of adder circuits 131 and 132 are input to piezoelectric devices 91 and 92, respectively.

加算回路131.132ではバイアス電圧と制御電圧を
加えて制御信号とし、圧電装置91と92へ入力する。
Addition circuits 131 and 132 add the bias voltage and control voltage to form a control signal, which is input to piezoelectric devices 91 and 92.

増幅回路では91と92の圧電素子に変位量の差を持た
せる為に検出信号を所定のゲインを持って各々増幅させ
ている。
In the amplifier circuit, the detection signals are each amplified with a predetermined gain in order to provide a difference in displacement between the piezoelectric elements 91 and 92.

そのゲイン比G、/Gbを とする事で対物レンズの後側焦点面でガルバノミラ−を
回動する事が出来る。
By setting the gain ratio G, /Gb, it is possible to rotate the galvano mirror at the rear focal plane of the objective lens.

〔発明の効果〕〔Effect of the invention〕

以上の様に本発明によれば光ピンクアンプのガルバノミ
ラ−回動駆動装置を小型軽量化する事が出来る。
As described above, according to the present invention, the galvanometer mirror rotation drive device for the optical pink amplifier can be made smaller and lighter.

又、現在ピンクアップのガルバノミラ−回動制御装置は
ディスクの面振れを一定範囲内に規制する事で、フす−
カシングの為に対物レンズが上下に移動した時それに伴
って移動する後側焦点面にミラーの回転中心を移動制御
していない事は前述の通りであるが、本発明によればフ
ォーカスエラー信号によって駆動回路へ信号を人力して
ガルバノミラ−の回動中心を対物レンズの移動に伴って
移動制御する事も可能である。その場合はディスクの平
面性の基準を現在よりも緩和する事が出来るという効果
がある。
In addition, the current pink-up galvano mirror rotation control device controls the surface runout of the disk within a certain range, making it possible to
As mentioned above, when the objective lens moves up and down due to focusing, the rotation center of the mirror is not controlled to move to the rear focal plane that moves accordingly, but according to the present invention, the center of rotation of the mirror is not controlled by the focus error signal. It is also possible to control the movement of the rotation center of the galvano mirror in accordance with the movement of the objective lens by manually inputting a signal to the drive circuit. In that case, the effect is that the standards for disk flatness can be made more relaxed than at present.

【図面の簡単な説明】[Brief explanation of the drawing]

第1図は本発明の光ピックアップのガルバノミラ−駆動
装置の原理を示す原理図、第2図は従来の光ピンクアッ
プのガルバノミラ−駆動装置の構成を示す構成図、第3
図は本発明の実施例、第4図はガルバノミラ−駆動装置
の制御装置を示すブロック図である。 (主要部分の符号の説明) 1−−−−・−・−・・−・〜・−・・−・・−一−−
−・−光ディスク2−−−−・−−−m=−・−・・・
・−一一一一−−−−−−−・・−・対物レンズ3.5
−−−一−・・・−・−・・・−・−・・−・・・・磁
気回路4・−・・・・−・−・・−−−−一−−−−・
−・・−・・・・−・−ガルバノミラ−41−−−−−
−−−−−・−・・−一一一−−−−−−アーム6.6
1−・−・−・−・〜・・・−・−光ビーム7−・−・
−m=−−−−・−・・−・−・・・・・・・−後側焦
点面71・−・−・・・−・−−−−−−・−・−・−
・・・・・後側焦点8−・−・・・・・・・・・・−・
−・−・−・・−・−・−・−・・回動中心91.92
・・・・〜・・・・・・−・・−・・−圧電装置10−
・−・−・・−・−・・・−・・・・−・・・−・・−
・・反射点11−・・・・−・・−−一−−−−・−−
−−−−−・・・−支持台12−・−一−−−−−−−
−−−−−−−−−−−−−−一−−−−一定電圧源1
31−−−−−−−−−−−・−・・・・−−−−−−
一加算回路132−・・−・−−−−−−−−・−−−
一−−・・−・・加算回路141−−−−−・・−−−
−−−・・・・−・・−・・−増幅回路142・・・・
−・−・−・−−−−一−−−・・・・−増幅回路15
−・・−−−−−−−・・・−・−・・・−・−・−・
−検出器ε−−−−−−一・−・・・−・−・・−・・
−・・・・・−・・ディスク偏心出願人   日本光学
工業株式会社 代理人 弁理士 渡 辺  隆 カ ニ 第2図(雌剥
FIG. 1 is a principle diagram showing the principle of a galvano mirror drive device for an optical pickup according to the present invention, FIG. 2 is a configuration diagram showing the configuration of a conventional galvano mirror drive device for optical pink-up,
The figure shows an embodiment of the present invention, and FIG. 4 is a block diagram showing a control device for a galvanomirror drive device. (Explanation of symbols of main parts) 1----・------------------1--
−・−Optical disc 2−−−−・−−−m=−・−・・・
・−1111−−−−−−−・・−・Objective lens 3.5
−−−1−・−・−・−・−・・−・・Magnetic circuit 4・−・・・・−・−・・−−−−1−−−−・
−・・−・・−・−Galvano mirror −41−−−−−
−−−−−・−・・−111−−−−−Arm 6.6
1−・−・−・−・〜・・・−・−Light beam 7−・−・
-m=--
...Rear focal point 8--...
−・−・−・・−・−・−・−・・Rotation center 91.92
・・・・・・〜・・・・・・−・・−・・−Piezoelectric device 10−
・−・−・・−・−・・−・・・・−・・・−・・−
・・Reflection point 11−・・・・−・・−−1−−−−・−−
−−−−−・・・−Support stand 12−・−1−−−−−−−
−−−−−−−−−−−−−−1−−−−− Constant voltage source 1
31−−−−−−−−−−−・−・・・・−−−−−−
One adder circuit 132--------------
---- Addition circuit 141------
−−−・・−・・−・・−Amplifier circuit 142 ...
−・−・−・−−−−1−−−・・・・− Amplifier circuit 15
−・・−−−−−−−・−・−・−・−・−・
−Detector ε−−−−−−1・−・−・−・・−・・
−・・・・−・Disc eccentricity Applicant Nippon Kogaku Kogyo Co., Ltd. Agent Patent attorney Takashi Watanabe Crab Figure 2 (female exfoliation)

Claims (1)

【特許請求の範囲】[Claims] 対物レンズと、ガルバノミラーと、ガルバノミラーの裏
面に設けた一対の駆動手段と、該一対の駆動手段を制御
する制御手段とを備え、該制御手段は、該ガルバノミラ
ーが該対物レンズの後側焦点面内の一点を中心として回
動する如く制御する事を特徴とする光ピックアップのガ
ルバノミラー回動駆動装置。
It includes an objective lens, a galvanometer mirror, a pair of driving means provided on the back surface of the galvano mirror, and a control means for controlling the pair of driving means, and the control means is configured such that the galvano mirror is located on the rear side of the objective lens. A galvanomirror rotation drive device for an optical pickup, which is characterized in that it is controlled so as to rotate around one point in a focal plane.
JP62306725A 1987-12-03 1987-12-03 Galvanomirror turning driving device for optical pickup Pending JPH01147420A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP62306725A JPH01147420A (en) 1987-12-03 1987-12-03 Galvanomirror turning driving device for optical pickup

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP62306725A JPH01147420A (en) 1987-12-03 1987-12-03 Galvanomirror turning driving device for optical pickup

Publications (1)

Publication Number Publication Date
JPH01147420A true JPH01147420A (en) 1989-06-09

Family

ID=17960549

Family Applications (1)

Application Number Title Priority Date Filing Date
JP62306725A Pending JPH01147420A (en) 1987-12-03 1987-12-03 Galvanomirror turning driving device for optical pickup

Country Status (1)

Country Link
JP (1) JPH01147420A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5665954A (en) * 1988-10-21 1997-09-09 Symbol Technologies, Inc. Electro-optical scanner module having dual electro-magnetic coils
JP2007155984A (en) * 2005-12-02 2007-06-21 Seiko Epson Corp Optical scanner, scanning method, and image forming apparatus equipped with the same

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5665954A (en) * 1988-10-21 1997-09-09 Symbol Technologies, Inc. Electro-optical scanner module having dual electro-magnetic coils
JP2007155984A (en) * 2005-12-02 2007-06-21 Seiko Epson Corp Optical scanner, scanning method, and image forming apparatus equipped with the same

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