JPH01146535U - - Google Patents

Info

Publication number
JPH01146535U
JPH01146535U JP4360388U JP4360388U JPH01146535U JP H01146535 U JPH01146535 U JP H01146535U JP 4360388 U JP4360388 U JP 4360388U JP 4360388 U JP4360388 U JP 4360388U JP H01146535 U JPH01146535 U JP H01146535U
Authority
JP
Japan
Prior art keywords
wafer
compression spring
wafers
transferred
transfer jig
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP4360388U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP4360388U priority Critical patent/JPH01146535U/ja
Publication of JPH01146535U publication Critical patent/JPH01146535U/ja
Pending legal-status Critical Current

Links

JP4360388U 1988-03-30 1988-03-30 Pending JPH01146535U (US07860544-20101228-C00003.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4360388U JPH01146535U (US07860544-20101228-C00003.png) 1988-03-30 1988-03-30

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4360388U JPH01146535U (US07860544-20101228-C00003.png) 1988-03-30 1988-03-30

Publications (1)

Publication Number Publication Date
JPH01146535U true JPH01146535U (US07860544-20101228-C00003.png) 1989-10-09

Family

ID=31269994

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4360388U Pending JPH01146535U (US07860544-20101228-C00003.png) 1988-03-30 1988-03-30

Country Status (1)

Country Link
JP (1) JPH01146535U (US07860544-20101228-C00003.png)

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